Topic
Chemical state
About: Chemical state is a research topic. Over the lifetime, 2378 publications have been published within this topic receiving 78183 citations.
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12 Nov 1996TL;DR: In this article, a novel vapor phase clean is shown to be a viable method for removing copper and iron from wafer surfaces using thin films and sub-monolayer samples.
Abstract: A novel vapor phase clean is shown to be a viable method for removing copper and iron from wafer surfaces Utilizing thin films and sub-monolayer samples of copper and iron on Si or SiO/sub 2/ substrates the reaction of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (CF/sub 3/COCH/sub 2/COCF/sub 3/ or H/sup +/hfac) with these metals has been explored as a potential vapor phase clean It is shown that the chemical state of the surface metal is an important factor in the removal of these metals The reaction of CuO and Cu/sub 2/O with H/sup +/hfac results in volatile reaction by-products of Cu/sup 11/(hfac)/sub 2/ and H/sub 2/O Additionally, the reaction with Cu/sub 2/O yields Cu/sup (0/) Reaction of H/sup +/hfac with iron contamination is more complex and leads to at least two different types of reactions These reactions include a nucleophilic substitution reaction and a reaction leading to a mixed ligand system The final surface metal concentration is dependent upon the processing conditions and can result in concentrations similar to those achieved with standard wet cleans
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TL;DR: In this paper, a 1% and 3% wt concentration of gallium sesquioxide (Ga2O3) doped tausonite (SrTiO3), compounds have been developed by mechanochemical synthesis followed by calcination process and their microstructural, spectral and opto-electrical characterization are discussed for the first time.
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TL;DR: In this paper, features of the expansion of a pulsed laser-initiated plasma-vapor plume containing Se and Watoms in buffer gases of different chemical compositions (Ar and He) are investigated.
Abstract: Features of the expansion of a pulsed laser-initiated plasma-vapor plume containing Se and Watoms in buffer gases of different chemical compositions (Ar and He) is investigated. It is found that gas pressure influences the structure and chemical state of the deposited WSex layers. The conditions for preparing coatings with low coefficients of sliding friction and high wear resistance are determined.
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TL;DR: In this article, the X-ray absorption fine structure (XAFS) spectroscopy was used to analyze the chemical state conversion of the Ni species in SiO2-supported Ni catalysts which were prepared by the impregnation me...
Abstract: The X-ray absorption fine structure (XAFS) spectroscopy was used to analyze the chemical state conversion of the Ni species in SiO2-supported Ni catalysts which were prepared by the impregnation me...
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TL;DR: In this article, the chemical compositions of Ag-Er co-doped phosphate and silicate glasses were investigated with X-ray photoelectron spectroscopy with the purpose to identify the chemical state of silver.
Abstract: The chemical compositions of Ag-Er co-doped phosphate and silicate glasses were investigated with X-ray photoelectron spectroscopy with the purpose to identify the chemical state of silver. The analysis of the Ag 3d core lines show the presence of nanometer-sized silver particles in each of the annealed samples, even if these Ag 3d lines appear to be very different from each other. We explain these results as a different interaction of silver with the two glasses matrix, which leads to a different nucleation rate of the Ag clusters.