Topic
Coherence scanning interferometry
About: Coherence scanning interferometry is a research topic. Over the lifetime, 148 publications have been published within this topic receiving 5644 citations.
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TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.
Abstract: We introduce a three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface. This differs from conventional optical systems in which the depth accuracy is limited by the aperture. Consequently, our sensor supplies high accuracy with a small aperture, i.e., we can probe narrow crevices and holes. The sensor is based on a Michelson interferometer, with the rough object surface serving as one mirror. The small coherence length of the light source is used. While scanning the object in depth, one can detect the local occurrence of interference within the speckles emerging from the object. We call this method coherence radar.
690 citations
01 Jan 2011
TL;DR: In this paper, surface texture measurement using optical 3D sensors has been studied and some common terms and definitions have been defined, including the limitations of optical sensors and limitations of 3D surface topography measuring instruments.
Abstract: Introduction to surface texture measurement.- Some common terms and definitions.- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy.- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.- Coherence scanning interferometry.- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods
485 citations
TL;DR: A system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques, using an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times.
Abstract: We describe a system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques. The system utilizes an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times. Rough and discontinuous surfaces can be profiled without the phase-ambiguity problems associated with conventional phase-shifting techniques. The system measures steps to 100 μm, scans a 10-μm range in 5 s, and has a smooth surface repeatability of 0.5 nm.
414 citations
TL;DR: In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.
Abstract: We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.
401 citations
IBM1
TL;DR: This approach has two significant implications for profilometry: the longitudinal resolution is decoupled from the lateral resolution, and interference effects can be used to further enhance the longitudinalresolution.
Abstract: Coherence scanning microscopy is a new technique in high resolution imaging. It shares many of the features of confocal microscopy but uses coherence effects to enhance the lateral and longitudinal resolution rather than physical apertures. This approach has two significant implications for profilometry: the longitudinal resolution is decoupled from the lateral resolution, and interference effects can be used to further enhance the longitudinal resolution. We detail the features of coherence scanning profilometry and give some examples.
378 citations