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Contrast transfer function

About: Contrast transfer function is a research topic. Over the lifetime, 934 publications have been published within this topic receiving 26533 citations.


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Proceedings ArticleDOI
07 Mar 2001
TL;DR: In this paper, incoherent holography was used for achieving depth discriminative microscopic imaging, and the image quality described by the coherent transfer function was comparable with that of a conventional confocal microscope; the imaging speed was substantially higher.
Abstract: Application of incoherent holography for achievement of the depth-discriminated microscopic imaging was proved. The image quality described by the coherent transfer function is comparable with that of a conventional confocal microscope; the imaging speed can be substantially higher. The observed plane is imaged as a whole, continuously in time, without any scanning system. Besides the amplitude, the phase of the confocal image is reconstructed, carrying information about phase shifts inside the specimen. The depth discrimination property can be enhanced beyond the capability of a conventional confocal microscope by the use of a broad-band illumination.

10 citations

Journal ArticleDOI
TL;DR: In this paper, the authors demonstrated high-resolution imaging of atomic columns in zeolite frameworks with spherical aberration-corrected transmission electron microscopy (AC-HRTEM).
Abstract: We demonstrated high-resolution imaging of atomic columns in zeolite frameworks with spherical aberration-corrected transmission electron microscopy (AC-HRTEM). An MFI-type zeolite was observed by AC-HRTEM with optimized optical setup. Compared with the conventional imaging mode based on a positive spherical aberration, the negative spherical aberration imaging (NCSI) mode sharpened image contrasts at atomic column positions. The projected atomic columns of zeolite are so complex that sharp image contrast can help to distinguish each atomic column position.

10 citations

Proceedings ArticleDOI
09 Feb 1989
TL;DR: In this article, the authors discuss the problem of depth dependent spherical aberration in confocal microscopy and show experimental results, and show that depth and lateral resolution are severely impaired.
Abstract: Scanning confocal microscopy has become an important tool in the field of optical sectioning and 3D-reconstruction of biological objects. Usually these samples are embedded in dispersive media, introducing depth dependent spherical aberration. Depth and lateral resolution are therefore impaired. We discuss this problem theoretically and show experimental results.

10 citations

Journal ArticleDOI
TL;DR: In this paper, a static microfield exposure tool (MET) based on a 0.3 numerical aperture optic and operating at a wavelength of 13.5nm has been developed at the Advanced Light Source, a synchrotron facility at the Lawrence Berkeley National Laboratory.
Abstract: In order to meet the high-resolution printing potential of extreme ultraviolet (EUV) lithography, the projection optics must be of very high quality. The contrast transfer function (CTF), a measure of the aerial-image contrast as a function of pitch, describes one key aspect of projection optic quality. In order to support research into EUV lithography, a static microfield exposure tool (MET) based on a 0.3 numerical aperture optic and operating at a wavelength of 13.5nm has been developed at the Advanced Light Source, a synchrotron facility at the Lawrence Berkeley National Laboratory. This work presents the results of resist-based measurements of the CTF for the MET optic. Although the resist is not an ideal aerial-image detector due to its nonlinear response, it is still possible to study some key characteristics of the optics using such methods. These measurements are based on line/space patterns printed in several different EUV photoresists. The experimental CTF results are compared with the CTF from...

10 citations

Journal ArticleDOI
01 Apr 1998-Micron
TL;DR: In this article, a diagram of Cs (spherical aberration coefficient) and Δf (defocus) is presented for three individual crystals of MgO, MgAl2O4, Al2O3 and their adjoining crystal blocks, and at least two kinds of Bragg reflected waves can be in the AFF condition in each case.

10 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20235
202215
20218
20209
20199
20188