Showing papers on "Coplanar waveguide published in 1972"
Patent•
17 May 1972TL;DR: In this article, an integrated circuit operative in vacuum and having all circuit elements formed in coplanar fashion on a single surface of a substrate to provide superior performance even in the presence of adverse environmental conditions is presented.
Abstract: An integrated circuit operative in vacuum and having all circuit elements formed in coplanar fashion on a single surface of a substrate to provide superior performance even in the presence of adverse environmental conditions. The circuit is especially adapted to microminiaturization and includes a unique electron discharge device having coplanar electrodes easily formed on a substrate surface by relatively simple film deposition techniques.
25 citations