Topic
Diffraction grating
About: Diffraction grating is a research topic. Over the lifetime, 24884 publications have been published within this topic receiving 372437 citations. The topic is also known as: grating.
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Papers
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19 Dec 1983TL;DR: In this paper, the intensity of the zeroth output order is monitored and the mask is translated and rotated within the plane containing the mask to align the mask with the wafer.
Abstract: An alignment method in which light is diffracted from a mask grating to a wafer grating and back through the mask grating to produce a set of output diffraction orders. The intensity of the zeroth output order is monitored and the mask is translated and rotated within the plane containing the mask to align the mask with the wafer. Alignment occurs when the intensity of the zeroth output order is at an extremum. The distance between the mask and wafer is also adjusted to extremize the intensity of the zeroth output order to make the wafer lie within the focal plane of the exposure optics. The wafer mask is preferrably a holographic phase grating to simplify production of the grating and to eliminate resist related interference. Two dimensional gratings can be used to achieve alignment with only one grating on each wafer.
104 citations
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02 Jun 1996TL;DR: This paper reports a technique that transforms a FBG into a Bragg cell or acousto-optic modulator operating in reflection mode.
Abstract: Summary form only given. Fiber Bragg gratings (FBGs) written with ultraviolet light are becoming of increasing importance in fiber systems because of their high performance, versatility, and excellent physical characteristics. In this paper, we report a technique that transforms a FBG into a Bragg cell or acousto-optic modulator operating in reflection mode.
104 citations
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TL;DR: In this paper, the authors present a method for diffraction gratings with controlled groove form and abnormal distribution of intensity. But the method is not suitable for the use in the field of computer vision.
Abstract: (1912). XXVII. Diffraction gratings with controlled groove form and abnormal distribution of intensity. The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science: Vol. 23, No. 134, pp. 310-317.
104 citations
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TL;DR: In this paper, a phase-controlled laser-induced transient thermal grating technique for noncontact, non-destructive measurements of thermal transport in opaque material is presented, where the phase grating signal includes components associated with both transient reflectivity and surface displacement.
Abstract: The methodology for a heterodyned laser-induced transient thermal grating technique for non-contact, non-destructive measurements of thermal transport in opaque material is presented. Phase-controlled heterodyne detection allows us to isolate pure phase or amplitude transient grating signal contributions by varying the relative phase between reference and probe beams. The phase grating signal includes components associated with both transient reflectivity and surface displacement whereas the amplitude grating contribution is governed by transient reflectivity alone. By analyzing the latter with the two-dimensional thermal diffusion model, we extract the in-plane thermal diffusivity of the sample. Measurements on a 5 μm thick single crystal PbTe film yielded excellent agreement with the model over a range of grating periods from 1.6 to 2.8 μm. The measured thermal diffusivity of 1.3 × 10−6 m2/s was found to be slightly lower than the bulk value.
104 citations
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TL;DR: The design and fabrication of a highly efficient guided-mode resonant color filter array designed using numerical methods based on rigorous coupled-wave analysis and patterned using UV-laser interferometric lithography is demonstrated.
Abstract: We demonstrate the design and fabrication of a highly efficient guided-mode resonant color filter array. The device is designed using numerical methods based on rigorous coupled-wave analysis and is patterned using UV-laser interferometric lithography. It consists of a 60-nm-thick subwavelength silicon nitride grating along with a 105-nm-thick homogeneous silicon nitride waveguide on a glass substrate. The fabricated device exhibits blue, green, and red color response for grating periods of 274, 327, and 369 nm, respectively. The pixels have a spectral bandwidth of ~12 nm with efficiencies of 94%, 96%, and 99% at the center wavelength of blue, green, and red color filter, respectively. These are higher efficiencies than reported in the literature previously.
104 citations