Topic
Diffuser (sewage)
About: Diffuser (sewage) is a research topic. Over the lifetime, 6487 publications have been published within this topic receiving 40404 citations.
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Dissertation•
01 Mar 2013
13 citations
21 Oct 1974
13 citations
01 Jan 1998
13 citations
Patent•
10 Apr 2013
TL;DR: An electrostatic chuck (ESC) is a 2-stage design where a heat transfer fluid inlet (supply) and heat transfer liquid outlet (return) is in a same physical plane as discussed by the authors.
Abstract: An electrostatic chuck (ESC) with a cooling base for plasma processing chambers, such as a plasma etch chamber. An ESC assembly includes a 2-stage design where a heat transfer fluid inlet (supply) and heat transfer fluid outlet (return) is in a same physical plane. The 2-stage design includes an assembly of a base upon which a ceramic (e.g., AlN) is disposed. The base is disposed over a diffuser which may have hundreds of small holes over the chuck area to provide a uniform distribution of heat transfer fluid. Affixed to the diffuser is a reservoir plate which is to provide a reservoir between the diffuser and the reservoir plate that supplies fluid to the diffuser. Heat transfer fluid returned through the diffuser is passed through the reservoir plate.
13 citations
Patent•
20 Dec 1985
TL;DR: In this paper, a method for treating a waste material in which the material is subjected to periods of aeration with air or other oxygen-containing gas, to bring about biological oxidation and nitrification, alternating with periods during which aeration is discontinued to allow development in the material of anaerobic conditions leading to biological denitrification of the material.
Abstract: A method for treating a waste material in which the material is subjected to periods of aeration with air or other oxygen-containing gas, to bring about biological oxidation and nitrification, alternating with periods during which aeration is discontinued to allow development in the material of anaerobic conditions leading to biological denitrification of the material. Aeration is discontinued when the rate of change of dissolved oxygen concentration in the material reaches or exceeds a predetermined value, for example 0.1 to 4 mg/l hr, and resumed after the nitrate concentration in the material is reduced to a desired level, for example after 4 hours. The method preferably takes place in a single vessel (1). Waste enters via inlet (13) and exits via outlet (14); waste entry and exit are preferably continuous. Flow of air to diffuser (12) can be cut-off by means in conduit (11), such means being controlled by a signal processor which monitors the ratio of change of the dissolved oxygen levels sensed by sensor (9). Chemicals for the removal of phosphorous nutrients may be added to the waste material prior to or during the treatment.
13 citations