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Showing papers on "Drain-induced barrier lowering published in 2006"


Book
01 Jan 2006
TL;DR: In this article, the authors present a short history of the EKV most model and its application in IC design, and present an extended version of the model with an extended charge-based model.
Abstract: Foreword. Preface. List of Symbols. 1. Introduction. 1.1 The Importance of Device Modeling for IC Design. 1.2 A Short History of the EKV MOST Model. 1.3 The Book Structure. PART I: THE BASIC LONG-CHANNELINTRINSIC CHARGE-BASED MODEL. 2. Introduction. 2.1 The N-channel Transistor Structure. 2.2 Definition of charges, current, potential and electric fields. 2.3 Transistor symbol and P-channel transistor. 3. The Basic Charge Model. 3.1 Poisson's Equation and Gradual Channel Approximation. 3.2 Surface potential as a Function of Gate Voltage. 3.3 Gate Capacitance. 3.4 Charge Sheet Approximation. 3.5 Density of Mobile Inverted Charge. 3.6 Charge-Potential Linearization. 4. Static Drain Current. 4.1 Drain Current Expression. 4.2 Forward and Reverse Current Components. 4.3 Modes of Operation. 4.4 Model of Drain Current Based on Charge Linearization. 4.5 Fundamental Property: Validity and Application. 4.6 Channel Length Modulation. 5. The Small-Signal Model. 5.1 The Static Small-Signal Model. 5.2 A General Non-Quasi-Static Small-Signal Model. 5.3 The Quasi-Static Dynamic Small-Signal Model. 6. The Noise Model. 6.1 Noise Calculation Methods. 6.2 Low-Frequency Channel Thermal Noise. 6.3 Flicker Noise. 6.4 Appendices. Appendix : The Nyquist and Bode Theorems. Appendix : General Noise Expression. 7. Temperature Effects and Matching. 7.1 Introduction. 7.2 Temperature Effects. PART II: THE EXTENDED CHARGE-BASED MODEL. 8. Non-Ideal Effects Related to the Vertical Dimension. 8.1 Introduction. 8.2 Mobility Reduction Due to the Vertical Field. 8.3 Non-Uniform Vertical Doping. 8.4 Polysilicon Depletion. 8.4.1 Definition of the Effect. 8.5 Band Gap Widening. 8.6 Gate Leakage Current. 9. Short-Channel Effects. 9.1 Velocity Saturation. 9.2 Channel Length Modulation. 9.3 Drain Induced Barrier Lowering. 9.4 Short-Channel Thermal Noise Model. 10. The Extrinsic Model. 10.1 Extrinsic Part of the Device. 10.2 Access Resistances. 10.3 Overlap Regions. 10.4 Source and Drain Junctions. 10.5 Extrinsic Noise Sources. PART III: THE HIGH-FREQUENCY MODEL. 11. Equivalent Circuit at RF. 11.1 RF MOS Transistor Structure and Layout. 11.2 What Changes at RF?. 11.3 Transistor Figures of Merit. 11.4 Equivalent Circuit at RF. 12. The Small-Signal Model at RF. 12.1 The Equivalent Small-Signal Circuit at RF. 12.2 Y-Parameters Analysis. 12.3 The Large-Signal Model at RF. 13. The Noise Model at RF. 13.1 The HF Noise Parameters. 13.2 The High-Frequency Thermal Noise Model. 13.3 HF Noise Parameters of a Common-Source Amplifier. References. Index.

307 citations


Proceedings ArticleDOI
04 Oct 2006
TL;DR: A device-size optimization method for subthreshold circuits utilizing RSCE to achieve high drive current, low device capacitance, less sensitivity to random dopant fluctuations, better subth threshold swing, and improved energy dissipation is described.
Abstract: The impact of the Reverse Short Channel Effect (RSCE) on device current is stronger in the subthreshold region due to the reduced Drain-Induced-Barrier-Lowering (DIBL) and the exponential dependency of current on threshold voltage This paper describes a device size optimization method for subthreshold circuits utilizing RSCE to achieve high drive current, low device capacitance, less sensitivity to random dopant fluctuations, and better subthreshold swing Simulation results using ISCAS benchmark circuits show that the critical path delay and power consumption can be improved by up to 104% and 344%, respectively

120 citations


Journal ArticleDOI
TL;DR: In this paper, the threshold voltages and read schemes of silicon nanocrystal memories with two bits per cell were examined by experiments and simulations, and it was found that the drain induced barrier lowering (DIBL) has a marked effect on Vth's in the four states and thus on read schemes for detecting the four Vths.
Abstract: The threshold voltages (Vth's) and read schemes of silicon nanocrystal memories with two bits per cell are examined by experiments and simulations. It is found that the drain induced barrier lowering (DIBL) has a marked effect on Vth's in the four states and thus on read schemes for detecting the four Vth's. It is also shown that the read scheme can be selected by controlling DIBL using device parameters including gate length, injected charge fraction, and injected charge density. Suitable read schemes for low-voltage and low-power applications are discussed.

106 citations


Patent
Anand S. Murthy1, Glenn A. Glass1, Andrew Westmeyer1, Michael L. Hattendorf1, Tahir Ghani1 
20 Jan 2006
TL;DR: In this article, a method for manufacturing an n-MOS semiconductor transistor is described, where the transistor is embedded in the recesses via a selective epitaxial growth process, and the silicon-carbon alloy decreases external resistances by reducing contact resistance between source/drain and silicide regions.
Abstract: A method is described for manufacturing an n-MOS semiconductor transistor. Recesses are formed in a semiconductor substrate adjacent a gate electrode structure. Silicon is embedded in the recesses via a selective epitaxial growth process. The epitaxial silicon is in-situ alloyed with substitutional carbon and in-situ doped with phosphorus. The silicon-carbon alloy generates a uniaxial tensile strain in the channel region between the source and drain, thereby increasing electron channel mobility and the transistor's drive current. The silicon-carbon alloy decreases external resistances by reducing contact resistance between source/drain and silicide regions and by reducing phosphorous diffusivity, thereby permitting closer placement of the transistor's source/drain and channel regions.

103 citations


Journal ArticleDOI
TL;DR: In this paper, the authors simulate the expected device performance and scaling perspectives of carbon nanotube (CNT) field effect transistors with doped source and drain extensions, based on the self-consistent solution of the three-dimensional Poisson-Schroumldinger equation with open boundary conditions, within the nonequilibrium Green's function formalism, where arbitrary gate geometry and device architecture can be considered.
Abstract: This paper simulates the expected device performance and scaling perspectives of carbon nanotube (CNT) field-effect transistors with doped source and drain extensions. The simulations are based on the self-consistent solution of the three-dimensional Poisson-Schroumldinger equation with open boundary conditions, within the nonequilibrium Green's function formalism, where arbitrary gate geometry and device architecture can be considered. The investigation of short channel effects for different gate configurations and geometry parameters shows that double-gate devices offer quasi-ideal subthreshold slope and drain-induced barrier lowering without extremely thin gate dielectrics. Exploration of devices with parallel CNTs shows that on currents per unit width can be significantly larger than the silicon counterpart, while high-frequency performance is very promising

101 citations


Journal ArticleDOI
TL;DR: In this article, the authors demonstrate that careful control of the semiconductor-insulator interface state densities is essential to VT and VFB control and the fabrication of reliable OFET integrated circuits.
Abstract: Charged interface states are introduced by UV-ozone treatment of a polymer gate dielectric, parylene, prior to deposition of the organic semiconductor, pentacene, thereby modifying the organic field effect transistor (OFET) operation from enhancement to depletion mode. Quasistatic capacitance-voltage measurements and the corresponding current-voltage characteristics show that the threshold voltage VT and flatband voltage VFB can be shifted by over +50V, depending on the ozone exposure time. This work demonstrates that careful control of the semiconductor-insulator interface state densities is essential to VT and VFB control and the fabrication of reliable OFET integrated circuits.

86 citations


Patent
Leonard Forbes1
14 Dec 2006
TL;DR: In this paper, a write-once-read-only memory cell with charge trapping is described, where a gate is formed on the gate insulator and a plug is coupled to the first source/drain region.
Abstract: Structures and methods for write once read only memory employing charge trapping are provided. The write once read only memory cell includes a metal oxide semiconductor field effect transistor (MOSFET) in a substrate. The MOSFET has a first source/drain region, a second source/drain region, and a channel region between the first and the second source/drain regions. A gate insulator is formed opposing the channel region. The gate insulator includes a number of high work function nanoparticles. A gate is formed on the gate insulator. A plug is coupled to the first source/drain region and couples the first source/drain region to an array plate. A transmission line is coupled to the second source/drain region. The MOSFET is a programmed MOSFET having a charge trapped in the number of high work function nanoparticles in the gate insulator adjacent to the first source/drain region.

85 citations


Patent
Yang-Wan Kim1
15 Aug 2006
TL;DR: In this paper, a pixel circuit of an organic electroluminescent display device and a method of driving the same was presented, where a threshold voltage compensation transistor was connected between the gate and the drain of the driving transistor, which compensated for a difference in threshold voltages of driving transistors.
Abstract: A pixel circuit of an organic electroluminescent display device and a method of driving the same. In the pixel circuit, a capacitor has a first electrode connected to a gate of a driving transistor, and a second electrode connected to a drain of a switching transistor. Further, a compensation voltage applying transistor is connected to the second electrode of the capacitor. The compensation voltage applying transistor compensates for a difference in IR-drops of a power supply voltage in response to a previous emission control signal. Further, the compensation voltage applying transistor cuts off the compensation voltage in an initialization period, thereby preventing a source of a data voltage and a source of the compensation voltage from being shorted with each other. Additionally, a threshold voltage compensation transistor is connected between the gate and the drain of the driving transistor. Therefore, a difference in threshold voltages of driving transistors is compensated.

79 citations


Patent
Chandra Mouli1
28 Sep 2006
TL;DR: In this paper, a high energy, high dose implant of boron and phosphorus through the p- and n-wells, into the insulator layer, thereby creating a borophosphosilicate glass (BPSG) structure within the insulation layer underlying the P- and Nwells of the SOI wafer.
Abstract: A CMOS device formed with a Silicon On Insulator (SOI) technology with reduced Drain Induced Barrier Lowering (DIBL) characteristics and a method for producing the same. The method involves a high energy, high dose implant of boron and phosphorus through the p- and n-wells, into the insulator layer, thereby creating a borophosphosilicate glass (BPSG) structure within the insulation layer underlying the p- and n-wells of the SOI wafer. Backend high temperature processing steps induce diffusion of the boron and phosphorus contained in the BPSG into the p- and n-wells, thereby forming a retrograde dopant profile in the wells. The retrograde dopant profile reduces DIBL and also provides recombination centers adjacent the insulator layer and the active layer to thereby reduce floating body effects for the CMOS device.

69 citations


Journal ArticleDOI
TL;DR: In this article, an analytical model for short channel effects in nanoscale source/drain extension region engineered double gate (DG) SOI MOSFETs is proposed.
Abstract: In this paper, we propose for the first time, an analytical model for short channel effects in nanoscale source/drain extension region engineered double gate (DG) SOI MOSFETs. The impact of (i) lateral source/drain doping gradient ( d ), (ii) spacer width ( s ), (iii) spacer to doping gradient ratio ( s / d ) and (iv) silicon film thickness ( T si ), on short channel effects – threshold voltage ( V th ) and subthreshold slope ( S ), on-current ( I on ), off-current ( I off ) and I on / I off is extensively analysed by using the analytical model and 2D device simulations. The results of the analytical model confirm well with simulated data over the entire range of spacer widths, doping gradients and effective channel lengths. Results show that lateral source/drain doping gradient along with spacer width can not only effectively control short channel effects, thus presenting low off-current, but can also be optimised to achieve high values of on-currents. The present work provides valuable design insights in the performance of nanoscale DG SOI devices with optimal source/drain engineering and serves as a tool to optimise important device and technological parameters for 65 nm technology node and below.

64 citations


Patent
20 Sep 2006
TL;DR: In this article, a transistor includes a source and a drain separated by a channel, and a gate dielectric layer situated over the channel, where the channel is situated in a well formed in a substrate.
Abstract: According to one exemplary embodiment, a transistor includes a source and a drain separated by a channel. The transistor further includes a gate dielectric layer situated over the channel. The channel is situated in a well formed in a substrate. A pocket implant is not formed between the source and the drain so as to reduce dopant fluctuation in the channel, thereby reducing transistor mismatch. According to this exemplary embodiment, an LDD implant is not formed between the source and the drain so as to further reduce the dopant fluctuation in the channel.

Journal ArticleDOI
TL;DR: In this paper, Ni-salicided nano-silicon-on-insulator FinFETs with deep Ni salicidation and NH3 plasma treatment are fabricated, and it is found that device performances, including subthreshold slope (SS) drain-induced barrier lowering (DIBL) and off-state leakage current, can be greatly improved.
Abstract: In this letter, 50-nm gate-length nano-silicon-on-insulator FinFETs with deep Ni salicidation and NH3 plasma treatment are fabricated. It is found that device performances, including subthreshold slope (SS) drain-induced barrier lowering (DIBL) and off-state leakage current, can be greatly improved by using deep Ni salicidation process compared to no Ni salicidation process. The deep Ni-salicided devices effectively suppress the floating-body effect and parasitic bipolar junction transistor action. In addition, the effect of NH3 plasma on the deep Ni-salicided devices is discussed. Experimental results reveal that the devices under a new state-of-the-art NH3 plasma process can achieve better performance such as an SS of 66 mV/dec and a DIBL of 0.03 V

Journal ArticleDOI
TL;DR: In this article, the authors proposed the most probable mechanism for leakage and drain current offset in poly 3-hexylthiophene (P3HT) organic thin film transistors (OTFTs).

Journal ArticleDOI
TL;DR: In this paper, the 2D analytical body potential is derived by assuming a parabolic potential variation between the lateral junction-gates and by solving Poisson's equation, which is used to obtain the surface threshold voltage of the G4-FET as a function of the lateral gate bias and for all possible charge conditions at the back interface.
Abstract: The two-dimensional (2-D) channel potential and threshold voltage of the silicon-on-insulator (SOI) four-gate transistor (G4-FET) are modeled. The 2-D analytical body potential is derived by assuming a parabolic potential variation between the lateral junction-gates and by solving Poisson's equation. The model is used to obtain the surface threshold voltage of the G4-FET as a function of the lateral gate bias and for all possible charge conditions at the back interface. The body-potential model is extendable to fully depleted SOI MOSFETs and can serve to depict the charge-sharing and drain-induced barrier-lowering effects in short-channel devices

Journal ArticleDOI
TL;DR: In this article, the threshold voltage instabilities in SiO2/polyimide dual-gate dielectric pentacene thin-film transistors are investigated as a function of bias stress time for 1000 s at temperatures between 260 and 340 K in nitrogen atmosphere.
Abstract: Threshold voltage instabilities in SiO2/polyimide dual-gate dielectric pentacene thin-film transistors are investigated as a function of bias stress time for 1000 s at temperatures between 260 and 340 K in nitrogen atmosphere. Field-effect mobility maintains constant values at every measurement temperature during the application of constant bias stress voltage. The threshold voltage shift at all measurement temperatures is described by the stretched exponential stress time dependence of ΔVth(t) = ΔVth0{1-exp [-(t/τ)β]}. These experimental results suggest that our threshold voltage shift can be interpreted as carrier injection from the pentacene channel into traps located at the channel/gate dielectric interface.

Journal ArticleDOI
TL;DR: In this article, a vertical metaloxide-semiconductor field effect transistor (MOSFET) with a dielectric pocket between the channel and source/drain has been fabricated and tested.
Abstract: A vertical metal-oxide-semiconductor field-effect transistor with the novel feature of a dielectric pocket between the channel and source/drain has been fabricated and tested. These dielectric pocket vertical MOSFETs (DPV-MOSFETs) show an improved suppression of short-channel effects such as VT roll-off and drain induced barrier lowering (DIBL). This is due to reduced charge sharing, thus allowing better threshold voltage control. The dielectric pocket also prevents dopant diffusion from the source/drains into the body during device fabrication, mitigating bulk punchthrough.

Patent
08 Feb 2006
TL;DR: In this article, the authors proposed an integrated circuit main body having a plurality of MOSFETs on a semiconductor substrate, and a monitor unit for monitoring at least one of the drain currents of the plurality of mOSFeters.
Abstract: Providing semiconductor integrated circuit apparatus capable of controlling the substrate voltage of a MOSFET so that the drain current for an arbitrary gate voltage value in a subthreshold region or a saturated region will be free from temperature dependence and process variation dependence, thereby enhancing the stable operation. The semiconductor integrated circuit apparatus includes: an integrated circuit main body having a plurality of MOSFETs on a semiconductor substrate; a monitor unit for monitoring at least one of the drain currents of the plurality of MOSFETs; and a substrate voltage regulating unit for controlling the substrate voltage of the semiconductor substrate so as to keep constant the drain current. The monitor unit includes a constant current source and a monitoring MOSFET formed on the same substrate as the plurality of MOSFETs, the substrate voltage regulating unit includes a comparison unit for comparing the source potential of the monitoring MOSFET with a predetermined reference potential with the drain terminal of the monitoring MOSFET and the drain terminals of the plurality of MOSFETs connected to the ground potential, and substrate voltage regulating unit feeds back the output voltage output based on the comparison result by the comparison unit to the substrate voltage of the monitoring MOSFET.

Journal ArticleDOI
TL;DR: In this paper, the performance of thin-film transistors with a poly-Si nanowire channel prepared by solid-phase crystallization is investigated and the major conduction mechanism of the off-state leakage is identified as the gate-induced drain leakage, and it is closely related to the source/drain implant condition and the unique device structure.
Abstract: The performance of thin-film transistors with a novel poly-Si nanowire channel prepared by solid-phase crystallization is investigated in this paper. As compared with conventional planar devices having self-aligned source/drain, the new devices show an improved on-current per unit width and better control over the short channel effects. The major conduction mechanism of the off-state leakage is identified as the gate-induced drain leakage, and it is closely related to the source/drain implant condition and the unique device structure

Journal ArticleDOI
TL;DR: In this article, an analytical sub-threshold surface potential model for short-channel MOSFETs is presented, where the effect of varying depth of the channel depletion layer on the surface potential has been considered.
Abstract: An analytical subthreshold surface potential model for short-channel MOSFET is presented. In this model, the effect of varying depth of the channel depletion layer on the surface potential has been considered. The effect of the depletion layers around the source and drain junctions on the surface potential, which is very important for short channel devices is included in this model. With this, the drawback of the existing models that assume a constant channel depletion layer thickness is removed resulting in a more accurate prediction of the surface potential. A pseudo-two-dimensional method is adopted to retain the accuracy of two-dimensional analysis yet resulting in a simpler manageable one-dimensional analytical expression. The subthreshold drain current is also evaluated utilizing this surface potential model.

Patent
Amitabh Jain1
20 Apr 2006
TL;DR: In this article, a method for making a transistor within a semiconductor wafer was proposed, which may include etching a recess at source/drain extension locations 90 and depositing SiGe within the recess to form SiGe source/drain extensions 90.
Abstract: A method for making a transistor within a semiconductor wafer. The method may include etching a recess at source/drain extension locations 90 and depositing SiGe within the recess to form SiGe source/drain extensions 90 . Dopants are implanted into the SiGe source/drain extensions 90 and the semiconductor wafer 10 is annealed. Also, a transistor source/drain region 80, 90 having a SiGe source/drain extension 90 that contains evenly distributed dopants, is highly doped, and has highly abrupt edges.

Patent
29 Mar 2006
TL;DR: In this article, a current mirror consisting of a current source, a gate and a drain coupled to the gate of the first p-channel MOS transistor, and a source coupled to ground is considered.
Abstract: A current mirror comprising: a current source; a first p-channel MOS transistor having a source coupled to an operating potential, and a gate and a drain coupled to the current source; a second p-channel MOS transistor having a source coupled to the operating potential, a gate coupled to the gate of the first p-channel transistor, and a drain; a first n-channel MOS transistor having a source coupled to ground, and a gate and a drain coupled to the drain of the second p-channel transistor; a zero-threshold n-channel MOS transistor having a drain coupled to a current-output node, a gate coupled to the gate of the first n-channel transistor, and a source; and a second n-channel MOS transistor having a source coupled to ground, and a gate coupled to the gate of the first n-channel transistor and a drain coupled to the source of the zero-threshold n-channel transistor.

Patent
Seung-Hwan Lee1, Moon-han Park1, Hwa-Sung Rhee1, Ho Lee1, Jae-yoon Yoo1 
24 Mar 2006
TL;DR: In this paper, a source/drain extension junction is formed after an epi-layer is formed, thereby preventing degradation of the source/drain junction region, which mitigates the short channel effect and reduces sheet resistance.
Abstract: In a metal-oxide semiconductor (MOS) transistor with an elevated source/drain structure and in a method of fabricating the MOS transistor with the elevated source/drain structure using a selective epitaxy growth (SEG) process, a source/drain extension junction is formed after an epi-layer is formed, thereby preventing degradation of the source/drain junction region. In addition, the source/drain extension junction is partially overlapped by a lower portion of the gate layer, since two gate spacers are formed and two elevated source/drain layers are formed in accordance with the SEG process. This mitigates the short channel effect and reduces sheet resistance in the source/drain layers and the gate layer.

Patent
21 Dec 2006
TL;DR: In this article, the authors proposed a method for protecting against electrostatic discharge by configuring a gate of at least one upper transistor of a transistor network connected between power rails to be biased to a prescribed value.
Abstract: Method and device for protecting against electrostatic discharge The method includes configuring a gate of at least one upper transistor of a transistor network connected between power rails to be biased to a prescribed value, and coupling an electrostatic discharge event to a gate of a lower transistor of the transistor network The at least one upper and at least one lower transistors of the transistor network are respectively coupled between the power rails from a higher voltage to a lower voltage

Patent
17 Mar 2006
TL;DR: In this paper, the problem of the Id-Vg characteristic sometimes varies in a thin-film transistor using oxides including an amorphous In-Ga-Zn-O system was solved.
Abstract: PROBLEM TO BE SOLVED: To solve the problem that Id-Vg characteristic sometimes varies in a thin-film transistor using oxides including an amorphous In-Ga-Zn-O system. SOLUTION: A field effect transistor having an oxide film as a semiconductor layer 11 has a source and a drain to which hydrogen or heavy hydrogen is added into the oxide film. A channel 18, a source 16 and a drain 17 are included in the oxide film, and the concentration of hydrogen or heavy hydrogen in the source section and the drain section is larger than that in the channel. The source and the drain are arranged as self-aligned with a gate electrode arranged through a gate insulation layer, and have a coplanar structure. COPYRIGHT: (C)2007,JPO&INPIT

Patent
Junichi Ikeda1
11 May 2006
TL;DR: An LED drive circuit includes a plurality of LEDs, a power supply circuit for outputting a variable output voltage to supply electricity to the LEDs, and a voltage detection circuit for sequentially comparing drain voltages of the drive transistors with the minimum drain voltage as discussed by the authors.
Abstract: An LED drive circuit includes a plurality of LEDs, a power supply circuit for outputting a variable output voltage to supply electricity to the LEDs, a plurality of drive transistors for driving the respective LEDs, a bias voltage setting circuit for generating and outputting a reference gate voltage for causing the drive transistors to have drain currents having a predetermined constant value, and a minimum drain voltage for causing the drive transistors to have the predetermined constant drain currents when the reference gate voltage is input to the drive transistors, and a voltage detection circuit for sequentially comparing drain voltages of the drive transistors with the minimum drain voltage to output one of the drain voltages smaller than the minimum drain voltage, wherein the power supply circuit controls the output voltage so that the drain voltage output from the voltage detection circuit becomes greater than or equal to the minimum drain voltage.

Patent
08 Mar 2006
TL;DR: In this paper, the authors proposed a field effect transistor (FE transistor) consisting of a drain region made of SiC, a drift layer which is formed on the drain region and is made of n-type SiC.
Abstract: A decrease in breakdown voltage can be prevented as much as possible. A field-effect transistor includes: a drain region made of SiC; a drift layer which is formed on the drain region and is made of n-type SiC; a source region which is formed on the surface of the drift layer and is made of n-type SiC; a channel region which is formed on the surface of the drift layer located on a side of the source region and is made of SiC; an insulating gate which is formed on the channel region; and a p-type base region interposed between the bottom portion of the source region and the drift region, and containing two kinds of p-type impurities.

Patent
12 May 2006
TL;DR: A nonplanar transistor and methods for fabricating the same are discussed in this paper, where an active gate and a passive gate are switchably coupled to a first voltage that is configured to turn on the transistor, and the passive gate may be fixedly coupled with a second voltage different than the first voltage.
Abstract: A non-planar transistor and methods for fabricating the same. In certain embodiments, the transistor includes an active gate and a passive gate. The active gate may be switchably coupled to a first voltage that is configured to turn on the transistor, and the passive gate may be fixedly coupled to a second voltage different than the first voltage. In some embodiments, the difference in voltage between the first voltage and the second voltage is greater than or substantially equal to a difference in voltage between the first voltage and a substrate voltage.

Patent
21 Apr 2006
TL;DR: In this article, the authors proposed a semiconductor-on-insulator (SOSI) substrate, which consists of a single semiconductor layer separated from a bulk layer by an insulator layer of a high-dielectric constant material.
Abstract: Semiconductor device structures with reduced junction capacitance and drain induced barrier lowering, methods for fabricating such device structures, and methods for forming a semiconductor-on-insulator substrate. The semiconductor structure comprises a semiconductor layer and a dielectric layer disposed between the semiconductor layer and the substrate. The dielectric layer includes a first dielectric region with a first dielectric constant and a second dielectric region with a second dielectric constant that is greater than the first dielectric constant. In one embodiment, the dielectric constant of the first dielectric region may be less than about 3.9 and the dielectric constant of the second dielectric region may be greater than about ten (10). The semiconductor-on-insulator substrate comprises a semiconductor layer separated from a bulk layer by an insulator layer of a high-dielectric constant material. The fabrication methods comprise modifying a region of the dielectric layer to have a lower dielectric constant.

Journal ArticleDOI
You Yin, Akihira Miyachi1, Daisuke Niida1, Hayato Sone1, Sumio Hosaka1 
TL;DR: In this paper, phase-change channel transistor memory devices with an ultrathin Ge2Sb2Te5 chalcogenide film channel were studied and two combined functions (memory: resistance change and selection: channel current control) by annealing were demonstrated.
Abstract: We studied phase-change channel transistor memory devices with an ultrathin Ge2Sb2Te5 chalcogenide film channel and tried to demonstrate two combined functions (memory: resistance change and selection: channel current control) by annealing in this paper. Drain–source resistance can be markedly decreased by 2 – 3 orders of magnitude after annealing due to the phase change from the amorphous to crystalline phases. A channel current control effect in which the drain current decreases with the gate voltage was clearly observed in 10- and 20-nm-thick Ge2Sb2Te5 devices. The absolute channel current modulation by the gate voltage in the crystalline state is much stronger than that in the amorphous state. Furthermore, the channel current control ability in devices with thin Ge2Sb2Te5 is stronger than that in devices with thick Ge2Sb2Te5. The channel current control effect might result from the potential change of the ultrathin Ge2Sb2Te5 channel by the gate voltage. [DOI: 10.1143/JJAP.45.3238]

Journal ArticleDOI
TL;DR: In this paper, a simple process for the fabrication of shallow drain junctions on pillar sidewalls in sub-100nm vertical MOSFETs is described, and the key feature of this process is the creation of a polysilicon spacer around the perimeter of the pillar to connect the channel to a poly-silicon drain contact.
Abstract: A simple process for the fabrication of shallow drain junctions on pillar sidewalls in sub-100-nm vertical MOSFETs is described. The key feature of this process is the creation of a polysilicon spacer around the perimeter of the pillar to connect the channel to a polysilicon drain contact. The depth of the junction on the pillar sidewall is primarily determined by the thickness of the polysilicon spacer. This process is CMOS compatible and, hence, facilitates the integration of a sub-100-nm vertical MOSFET in a planar CMOS technology using mature lithography. The fabricated transistors have a subthreshold slope of 95 mV/dec (at VDS=1 V) and a drain-induced barrier lowering of 0.12 V