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Electron-beam lithography

About: Electron-beam lithography is a research topic. Over the lifetime, 8982 publications have been published within this topic receiving 143325 citations. The topic is also known as: e-beam lithography.


Papers
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Journal ArticleDOI
TL;DR: In this article, the authors measured the switching asymmetries due to strong intercell coupling and the presence of a field normal to the cell surface Magnetic domain configurations during switching depended strongly on the initial conditions, as well as the direction of the perpendicular field relative to the in-plane hysteresis-field direction.
Abstract: Cobalt nanostructures (220 and 300 nm×275 nm×30 nm) were fabricated using electron beam lithography into ordered, close proximity (170 nm) arrays Domain configurations with accompanying hysteresis loops were measured using off-axis electron holography Measurements were compared to solutions of the Landau–Lifshitz–Gilbert equations Both exhibit switching asymmetries due to strong intercell coupling and the presence of a field normal to the cell surface Magnetic domain configurations during switching depended strongly on the initial conditions, as well as the direction of the perpendicular field relative to the in-plane hysteresis-field direction

56 citations

Journal ArticleDOI
TL;DR: A submicron domain grating has been created in a bulk ferroelectric as mentioned in this paper, using electron-beam lithography and electric-field poling to fabricate the 800 nm period grating in a 0.5mm-thick flux grow.
Abstract: A submicron domain grating has been created in a bulk ferroelectric. Electron-beam lithography and electric-field poling were used to fabricate the 800 nm period grating in a 0.5-mm-thick flux-grow ...

56 citations

Journal ArticleDOI
TL;DR: In this paper, the optical properties of dense spatially ordered two-dimensional arrays of 50 nm gold nanoparticles are investigated in this aim, and the experimental findings are then compared with calculations based on the discrete dipole approximation.
Abstract: Understanding the plasmon coupling between metal nanoparticles under light irradiation remains a challenging issue for optimizing plasmonic devices for chemical and biological sensing. Here, the optical properties of dense spatially ordered two-dimensional arrays of 50 nm gold nanoparticles are investigated in this aim. Microspectrophotometry experiments are carried out on square arrays and parallel chains, elaborated by electron beam lithography, having different periodicities ranging from 80 to 170 nm. The wavelength, width, and amplitude of the localized surface plasmon resonance (SPR) are quantitatively monitored as a function of both the incident light polarization and the interparticle distance. The experimental findings are then compared with calculations based on the discrete dipole approximation. They match remarkably well these numerical results, not only for the spectral location and the width of the SPR but also for the absolute value of the extinction cross section of the nanoparticles that i...

56 citations

Journal Article
01 Jan 1993-Optik
TL;DR: In this paper, an X-ray microscopy study of hydrated biological and colloidal chemical systems was performed with an Xray microscope installed at the BESSY electron storage ring in Berlin.

56 citations

Journal ArticleDOI
TL;DR: Magnetically isolated single domain islands with perpendicular anisotropy have been prepared by depositing Co/Pd multilayer films on prepatterned sub-50 nm SiO2/Si islands as discussed by the authors.
Abstract: Magnetically isolated single domain islands with perpendicular anisotropy have been prepared by depositing Co/Pd multilayer films on prepatterned sub-50 nm SiO2/Si islands. The island arrays were fabricated by both direct write electron beam lithography and nanoimprinting. Nanoimprinting allows the creation of large area, 4 mm×4 mm, samples appropriate for characterization by conventional measurement techniques. Magnetic force microscopy and vibrating sample magnetometry showed that the reversal behavior of the patterned islands is quite different from that of the continuous films with a large increase in both switching field and switching field distribution. Recording on island arrays with a periodicity of 100 nm, produced from prepatterned substrates, was demonstrated using a quasistatic tester.

56 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202384
2022163
2021108
2020161
2019174
2018204