Electron-beam lithography

About: Electron-beam lithography is a research topic. Over the lifetime, 8982 publications have been published within this topic receiving 143325 citations. The topic is also known as: e-beam lithography.

Radial heterojunction based on single ZnO-Cu x O core-shell nanowire for photodetector applications.

Abstract: ZnO-CuxO core-shell radial heterojunction nanowire arrays were fabricated by a straightforward approach which combine two simple, cost effective and large-scale preparation methods: (i) thermal oxidation in air of a zinc foil for obtaining ZnO nanowire arrays and (ii) radio frequency magnetron sputtering for covering the surface of the ZnO nanowires with a CuxO thin film. The structural, compositional, morphological and optical properties of the high aspect ratio ZnO-CuxO core-shell nanowire arrays were investigated. Individual ZnO-CuxO core-shell nanowires were contacted with Pt electrodes by means of electron beam lithography technique, diode behaviour being demonstrated. Further it was found that these n-p radial heterojunction diodes based on single ZnO-CuxO nanowires exhibit a change in the current under UV light illumination and therefore behaving as photodetectors.

Plasmon resonance tuning in metal nanostars for surface enhanced Raman scattering

Abstract: We report the fabrication of Au nanostar arrays by means of electron beam lithography, in which the plasmon resonance energy can be tuned via the nanostar size from the visible into the near-infrared region. The spectral response of the nanostar arrays was investigated by optical extinction (transmittance) experiments, and their surface enhanced Raman scattering performance has been tested at two different excitation wavelengths, 633 nm and 830 nm, using chemisorbed Cresyl violet molecules as analyte. The experimental results are supported by numerical simulations of the spatial and spectral electric field enhancement.

Flexible method based on four-beam interference lithography for fabrication of large areas of perfectly periodic plasmonic arrays

Abstract: A novel nanofabrication technique based on 4-beam interference lithography is presented that enables the preparation of large macroscopic areas (>50 mm2) of perfectly periodic and defect-free two-dimensional plasmonic arrays of nanoparticles as small as 100 nm. The technique is based on a special interferometer, composed of two mirrors and a sample with photoresist that together form a right-angled corner reflector. In such an interferometer, the incoming expanded laser beam is split into four interfering beams that yield an interference pattern with rectangular symmetry. The interferometer allows setting the periods of the array from about 220 nm to 1500 nm in both directions independently through the rotation of the corner-reflector assembly around horizontal and vertical axes perpendicular to the direction of the incident beam. Using a theoretical model, the implementation of the four-beam interference lithography is discussed in terms of the optimum contrast as well as attainable periods of the array. Several examples of plasmonic arrays (on either glass or polymer substrate layers) fabricated by this technique are presented.

ultrahigh resolution magnetic force microscope tip fabricated using electron beam lithography

Abstract: A novel magnetic force microscope tip has been proposed and fabricated that consists of a ∼30 nm thick ferromagnetic film coated on one side of a nonmagnetic pillar which is ∼150 nm wide and over 1.5 μm long. The pillar was fabricated on the apex of a commercial scanning force microscope tip using high‐resolution electron beam lithography. The ferromagnetic film was evaporated on the pillar from an angle so that only the pillar, not the rest of the tip, was coated. The coated ferromagnetic film has a trough shape and a tapered end with a tip radius of ∼10 nm. The film is single domain because of the nanoscale size and shape anisotropy. Compared to conventional Ni wire tips, the new tips have a much smaller, magnetic cross section at the end of the tip, thus offering better imaging resolution and they have lower stray field, thus making them well suited to measuring soft magnetic materials.

Nanoparticle Spectroscopy: Birefringence in Two-Dimensional Arrays of L-Shaped Silver Nanoparticles

Abstract: We present theoretical models and experiments demonstrating nanoparticle optical birefringence. The experiments use polarization optical methods to describe the birefringence properties of two-dimensional arrays of L-shaped silver nanoparticles. These particles have two major resonances with perpendicular polarization directions. The beam depolarization at incident angles intermediate to the resonance polarization directions is explained with a model based on a finite-difference time-domain (FDTD) calculation for both arrays and single particles. The maximum relative phase retardation is observed between the two overlapping dipole resonance wavelengths, and experimentally it is about 30°. While the FDTD models predict a larger effect of up to 105°, this might be due to the statistical variation of nanoparticle shapes in the experimental arrays. The arrays were fabricated by electron beam lithography, and the size of particles was ∼145 and ∼155 nm in nominal total edge length, 63 nm arm width, and 30 nm he...