Topic
Excimer
About: Excimer is a research topic. Over the lifetime, 3725 publications have been published within this topic receiving 75104 citations.
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TL;DR: In this article, a method of etching a metallized substrate by excimer laser radiation is described, where the substrate is exposed to a selected gas, which spontaneously reacts with the metal forming a solid reaction product layer on the metal by a partial consumption of the metal.
Abstract: Disclosed is a method of etching a metallized substrate by excimer laser radiation. The substrate is exposed to a selected gas, e.g., a halogen gas, which spontaneously reacts with the metal forming a solid reaction product layer on the metal by a partial consumption of the metal. A beam of radiation from an excimer laser, e.g. XeF laser operating at a wavelength of 351 nm or XeCl laser at 308 nm or KrF laser at 248 nm or KrCl laser at 222 nm or ArF laser at 193 nm or F2 laser at 157 nm, is applied to the reaction product in a desired pattern to vaporize the reaction product and thereby selectively etch the metal with a high resolution.
64 citations
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TL;DR: In this paper, the authors examined experimental techniques for extracting values of k1 from experiments involving intramolecular pyrene excimer formation in polymers of the form pyrene-polystyrene-pyrene.
63 citations
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63 citations
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TL;DR: In this paper, the stationary and time-resolved photoluminescence spectra of n-pentyl-n′-cyanobiphenyl (5CB) were studied in a mesophase and solid-crystal state.
Abstract: The stationary and time-resolved photoluminescence spectra of n-pentyl-n′-cyanobiphenyl (5CB) are studied in a mesophase and solid-crystal state. The photoluminescence spectra of 5CB are determined by the molecular configuration and the intramolecular charge transfer in the excited state. It is shown that in the mesophase and solid-crystal state, 5CB exhibits along with monomer radiation at least two types of excimer radiation from different pre-dimer states.
63 citations