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Extreme ultraviolet

About: Extreme ultraviolet is a research topic. Over the lifetime, 7650 publications have been published within this topic receiving 128970 citations. The topic is also known as: EUV & XUV.


Papers
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Journal ArticleDOI
08 Jun 2012-Science
TL;DR: By guiding a mid-infrared femtosecond laser in a high-pressure gas, ultrahigh harmonics can be generated that emerge as a bright supercontinuum that spans the entire electromagnetic spectrum from the ultraviolet to more than 1.6 kilo–electron volts, allowing, in principle, the generation of pulses as short as 2.5 attoseconds.
Abstract: High-harmonic generation (HHG) traditionally combines ~100 near-infrared laser photons to generate bright, phase-matched, extreme ultraviolet beams when the emission from many atoms adds constructively. Here, we show that by guiding a mid-infrared femtosecond laser in a high-pressure gas, ultrahigh harmonics can be generated, up to orders greater than 5000, that emerge as a bright supercontinuum that spans the entire electromagnetic spectrum from the ultraviolet to more than 1.6 kilo-electron volts, allowing, in principle, the generation of pulses as short as 2.5 attoseconds. The multiatmosphere gas pressures required for bright, phase-matched emission also support laser beam self-confinement, further enhancing the x-ray yield. Finally, the x-ray beam exhibits high spatial coherence, even though at high gas density the recolliding electrons responsible for HHG encounter other atoms during the emission process.

1,475 citations

Journal ArticleDOI
24 Oct 2002-Nature
TL;DR: It is demonstrated that a laser-based sampling system, consisting of a few-femtosecond visible light pulse and a synchronized sub-feminine soft X-ray pulse, allows us to trace the relaxation dynamics of core-excited atoms directly in the time domain with attosecond resolution.
Abstract: The characteristic time constants of the relaxation dynamics of core-excited atoms have hitherto been inferred from the linewidths of electronic transitions measured by continuous-wave extreme ultraviolet or X-ray spectroscopy. Here we demonstrate that a laser-based sampling system, consisting of a few-femtosecond visible light pulse and a synchronized sub-femtosecond soft X-ray pulse, allows us to trace these dynamics directly in the time domain with attosecond resolution. We have measured a lifetime of 7.9(-0.9)(+1.0) fs of M-shell vacancies of krypton in such a pump-probe experiment.

1,204 citations

Journal ArticleDOI
TL;DR: In this article, a new solar Extreme Ultraviolet (EUV) flux model for aeronomic calulations is presented, which is based on the measured F74113 solar EUV reference spectrum.
Abstract: This paper presents a new solar Extreme Ultraviolet (EUV) flux model for aeronomic calulations (EUVAC), which is based on the measured F74113 solar EUV reference spectrum. The model provides fluxes in the 37 wavelength bins that are in widespread use. This paper also presents cross sections to be used with the EUVAC flux model to calculate photoionization rates. The flux scaling for solar activity is accomplished using a proxy-based on the F10.7 index and its 81-day average together with the measured solar flux variation from the EUVS instrument on the Atmosphere Explorer E satellite. This new model produces 50-575 A integrated EUV fluxes in good agreement with rocket observations. The solar cycle variation of the chromospheric fluxes agrees well with the measured variation of the Lyman alpha flux between 1982 and 1988. In addition, the theoretical photoelectron fluxes, calculated using the new EUV flux model, are in good agreement with the solar minimum photoelectron fluxes from the Atmosphere Explorer E satellite and also with the solar maximum photoelectron fluxes from the Dynamics Explorer satellite. Its relative simplicity coupled with its ability to reproduce the 50-575 A solar EUV flux as well as the measured photoelectron spectrum makes the model well suited for aeronomic applications. However, EUVAC is not designed to accurately predict the solar flux variability for numerous individual lines.

858 citations

Journal ArticleDOI
TL;DR: In this paper, the FERMI free-electron laser operating in the high-gain harmonic generation regime was demonstrated, allowing high stability, transverse and longitudinal coherence and polarization control.
Abstract: Researchers demonstrate the FERMI free-electron laser operating in the high-gain harmonic generation regime, allowing high stability, transverse and longitudinal coherence and polarization control.

831 citations

Book
30 Apr 2020
TL;DR: In this paper, the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation are discussed and their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy.
Abstract: This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

786 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
2023265
2022529
2021187
2020264
2019288
2018249