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Showing papers on "Fabrication published in 1972"



Proceedings Article
01 Jan 1972
TL;DR: In this paper, the characteristics and behavior of 10 ohm-cm silicon cells having abnormally high open-circuit voltages was made. And the authors showed that these cells can have the high initial efficiencies and desirable temperature behavior of low resistivity cells.
Abstract: An investigation of the characteristics and behavior of 10 ohm-cm silicon cells having abnormally high open-circuit voltages was made. The cells studied were made by a new, highly simplified, contact fabrication process which creates both a contact and a thin electric field region at the cell back surface without the need for phosphorus layer removal. These cells had open-circuit voltages of about 0.58 V and their performance as a function of thickness, temperature, and 1 MeV electron irradiation is detailed. The study showed that 10 ohm-cm back-surface-field cells can have the high initial efficiencies and desirable temperature behavior of low resistivity cells. Thin back-surface-field cells were made and showed, in addition, much greater radiation damage resistance. A mechanism is proposed to explain the results.

30 citations


Journal ArticleDOI
TL;DR: In this paper, a circular strip waveguide is constructed by ion implantation of fused silica through a mask made by electron-beam exposure of polymethylmethacrylate (PMMA) and guidance of 0.6328μm light from a He-Ne laser through the guide is demonstrated.
Abstract: Fabrication of a circular strip waveguide by ion implantation of fused silica through a mask made by electron‐beam exposure of polymethylmethacrylate (PMMA) is described. This technique has an advantage in its simplicity and the small number of processing steps involved. Guidance of 0.6328‐μm light from a He–Ne laser through the guide is demonstrated.

28 citations


Journal ArticleDOI
TL;DR: In this paper, the molybdenum isotopes have been rolled to a thickness of ≈200μg/cm2 using modified pack-rolling techniques on conventional mills.

19 citations


Patent
01 May 1972
TL;DR: In this article, a planar millimeter wave beam lead Schottky barrier device was constructed by growing a 6 to 7 micron layer of epitaxial gallium arsenide doped to 3 to 5 X 1018 atoms/cc.
Abstract: A technique is described for the fabrication of a novel planar millimeter wave beam lead Schottky barrier device. The inventive technique involves the growth of a 6 to 7 micron layer of epitaxial gallium arsenide doped to 3 to 5 X 1018 atoms/cc on a semi-insulating gallium arsenide substrate by the arsenic trichloride-gallium-hydrogen vapor transport technique. Following, the epitaxial layer is etched in the same ambient by adding helium and establishing a doping level of 5 X 1015 to 2 X 1017 atoms/cc. Growth of a 0.1 to 0.2 micron thick layer of gallium arsenide is then effected. The technique results in the formation of an abrupt doping profile and in a device manifesting enhanced frequency.

16 citations


Patent
W Gosney1, M Buehler1
14 Nov 1972
TL;DR: In this paper, a substantially intrinsic region was formed by implanting selected ions, which increased the space charge region of the adjacent junction, thus reducing the effective capacitance of metal-insulator-semiconductor structures.
Abstract: Metal-insulator-semiconductor structures characterized by reduced junction capacitance and methods of fabrication are disclosed. A substantially intrinsic region beneath the junction is formed by implanting selected ions. The ion implantation does not produce lateral diffusion of conventionally formed junctions, and therefore breakdown and packing density are not changed. The substantially intrinsic region does, however, increase the space charge region of the adjacent junction, thus reducing the effective capacitance. In the preferred method of fabrication, ions are implanted using the same mask employed in forming the p-n junction.

12 citations


Patent
31 Jan 1972
TL;DR: In this paper, a new technology is proposed to contact the ENDS of a movie, which is capable of forming metallwires in a slurry of feature films.
Abstract: A NEW TECHNIQUE OF CONTACTING THE ENDS OF FILM FORMING METAL WIRE IN A SLURRY OF FILM FORMING METAL POWDER IN A LIQUID, DRYING THE COATING, AND SINTERING THE ADHERING POWDER TO THE IWRE RESULTS IN ANODES SUITABLE FOR FABRICATION INTO CAPACITORS. D R A W I N G

11 citations


Journal ArticleDOI
D.M. Brown1, Marvin Garfinkel1, Mario Ghezzo1, E.A. Taft1, A. Tenney1, J. Wong1 
TL;DR: In this article, an infrared method for determining the composition of glasses in the B 2 O 3 -SiO 2 system over the range 0-100% B O 3, (b) As O 3 −SiO 3, and (c) P 2 O 5 -Si O 5, was developed, which may be used to unambiguously characterize films in the 1000-10000 A range such as are commonly used in device manufacture.

9 citations


Patent
22 Mar 1972
TL;DR: In this paper, an improved composite anode for rotating-anode x-ray tubes and an improved method of fabrication thereof are presented. But they do not specify a fabrication procedure.
Abstract: Disclosed is an improved composite anode for rotating-anode x-ray tubes and an improved method of fabrication thereof.

9 citations


Journal ArticleDOI
TL;DR: In this paper, a 2-phase charge-coupled device (c.c.d) is proposed, which makes use of charge storage in an m.n.o.s. structure to define in the silicon substrate the asymmetrical potential wells required for unidirectional charge flow.
Abstract: A 2-phase charge-coupled device (c.c.d.) is proposed. It makes use of charge storage in an m.n.o.s. structure to define in the silicon substrate the asymmetrical potential wells required for unidirectional charge flow. The fabrication and operation of the device are described. The structure permits substantial simplification of the fabrication method as compared with other c.c.d.s.

8 citations


Journal ArticleDOI
TL;DR: In this article, a blend of integrated circuit manufacturing techniques and rf sputtering techniques has resulted in TeAs-XXX threshold devices sustaining 100 million switchings, and the fabrication and properties of these devices are outlined.
Abstract: A blend of integrated circuit manufacturing techniques and rf sputtering techniques has resulted in TeAs-XXX threshold devices sustaining 100 million switchings. The fabrication and properties of these devices are outlined in this paper. Observations of space charge effects and the influence of strain on the switching properties of these devices are also reported.

01 Feb 1972
TL;DR: In this paper, a conceptual study of physical vapor-deposition processes for in-space fabrication of thin-film structures is presented, which can find use as photon propulsion devices (solar sails) or thermal control coatings of spacecraft surfaces.
Abstract: A conceptual study of physical vapor-deposition processes for in-space fabrication of thin-film structures is presented. Potential advantages of in-space fabrication are improved structural integrity and surface reflectivity of free-standing ultra-thin films and coatings. Free-standing thin-film structures can find use as photon propulsion devices (solar sails). Other applications of the concept involve free-standing shadow shields, or thermal control coatings of spacecraft surfaces. Use of expendables (such as booster and interstage structures) as source material for the physical vapor deposition process is considered. The practicability of producing thin, textured, aluminum films by physical vapor deposition and subsequent separation from a revolving substrate is demonstrated by laboratory experiments. Heating power requirement for the evaporation process is estimated for a specific mission.

Journal ArticleDOI
David P. Kennedy1, Philip C. Murley1
TL;DR: In this article, it was shown that a thickness variation of approximately 7·0 per cent (2σ) can be expected from modern epitaxial reactors, in conjunction with the technique of designing into a transistor collector junction and buried layer interference, will often produce problems of fabrication reproducibility.
Abstract: Measurements indicate that a thickness variation of approximately 7·0 per cent (2σ) can be expected from modern epitaxial reactors. This epitaxial layer thickness variability, in conjunction with the technique of designing into a transistor collector junction and buried layer interference, will often produce problems of fabrication reproducibility. Statistical calculations are presented to demonstrate some fabrication difficulties that are mathematically attributable to this thickness variability. Problems arising from simple space-charge layer interference are compared with those arising from deep penetration of the collector junction into its buried layer.

Journal ArticleDOI
TL;DR: In this paper, the fabrication of Ge and Si field-emission cathodes by grinding of single crystal oriented blanks of the semiconductor followed by electrolytic etching is described.
Abstract: Methods are described for the fabrication of Ge and Si field‐emission cathodes by grinding of single crystal, oriented blanks of the semiconductor followed by electrolytic etching. Highly symmetrical, well formed emitters result. A glow discharge cleaning and shaping technique is presented that leads to atomically clean, well developed surfaces in the field‐emission microscope.

G. W. King1
01 Jan 1972
TL;DR: In this paper, a fabrication schedule for producing wire from refractory metal alloys ASTAR-811C, B-88 and W-Hf-C was developed for 0.25 mm to 0.51 mm diameter.
Abstract: Fabrication schedules were developed for producing wire, 0.25 mm to 0.51 mm diameter, from the refractory metal alloys ASTAR-811C, B-88 and W-Hf-C. Tensile properties were evaluated at room temperature and up to 1204 C. Also, the stress rupture properties of the alloys at 1093 C were determined. W-Hf-C and B-88 were found to have the best mechanical properties on a strength to density basis. The fabrication schedules for producing wire from these two alloys were further improved with regards to the wire quality and material yield under the optimization of fabrication schedule.

Patent
10 Apr 1972
TL;DR: The use of a mask blank results in a mask which is reasonably transparent to visible light but substantially opaque to ultravoilet light, and which may be deposited on to and removed from various substrates including glass using etchants which do not attack the substrate material as discussed by the authors.
Abstract: Photomasks and method of fabrication thereof, whereby a thin layer of germanium is deposited to a substrate which may be then etched in a pattern to provide a photomask or information storage device. In the fabrication method, a substrate is carried by belt through a first inert gas curtain into a furnace containing a mixture of suitable gases for causing the deposition of germanium onto the heated substrate, and there outward through a second inert gas curtain into a cooling region. The use of a germanium film for a mask blank results in a mask which is reasonably transparent to visible light but substantially opaque to ultravoilet light, and which may be deposited on to and removed from various substrates including glass using etchants which do not attack the substrate material.

Patent
20 Jun 1972
TL;DR: A TECHNIQUE for the fabrication of an AIR ISOLATED CROSSOVER including a SUPPLEMENTARY INSULATING LAYER is described in this paper.
Abstract: A TECHNIQUE IS DESCRIBED FOR THE FABRICATION OF AN AIR ISOLATED CROSSOVER INCLUDING A SUPPLEMENTARY INSULATING LAYER WHICH IS COMPATIBLE WITH THE CROSSOVER PROCESS AND THE THIN FILM CONDUCTOR SYSTEM UTILIZED IN ITS FABRICATION THE SUPPLEMENTARY INSULATING LAYER COMPRISES SILICON DIOXIDE AND IS DEPOSITED DURING THE PROCESSING SEQUENCE BY CONVENTIONAL EVAPORATION OR OTHER DEPOSITION TECHNIQUES. THE RESULTANT DOUBLE DIELECTRIC PERMITS FREE MOVEMENT OF BEAMS DURING TEMPERATURE CYCLING, AVOIDS EDGE DEPOSITION PROBLEMS DUE TO SHADOWING ON SHARP EDGES OF THE DIELECTRIC AND MAKES PINHOLES IN THE DIELECTRIC INNOCUOUS.


01 Jul 1972
TL;DR: In this paper, a one-shift autoclave operation at 350 F and 200 psi maximum while maintaining epoxy matrix-type properties was used for the fabrication and test of an F-4 polyimide rudder.
Abstract: : The objectives of this program were to place polyimide matrix advanced composite processing technology on a production basis, and to demonstrate its acceptability for structural applications by fabrication and test of representative structure. Under this program polyimide matrix advanced composites were cured in a one shift autoclave operations (-8 hours) at 350 F and 200 psi maximum while maintaining epoxy matrix-type properties. These process parameters were confirmed by the successful fabrication and test of an F-4 polyimide rudder, which demonstrated the flight worthiness of thin gauge boron and graphite/polyimide in this type structure. Design allowable data for tension, compression, and inplane shear were developed at both room temperature and 550 F.

Proceedings ArticleDOI
01 Jan 1972
TL;DR: In this article, preferential electrolytic etching for wafer thinning and electroplating for formation of a heat sink has been applied to the fabrication of Ka-band (26.5-40 GHz) GaAs IMPATTS.
Abstract: A recently developed procedure, incorporating both preferential electrolytic etching for wafer thinning and electroplating for formation of a heat sink has been applied to the fabrication of Ka-band (26.5-40 GHz) GaAs IMPATTS. The technique is an extension of the work recently reported on 50-60 GHz silicon diodes. Both epitaxially-grown GaAs-pn juction and Schottky barrier (Pt and Cr) diodes have been fabricated. Uniform GaAs structures as thin as 4µm have been produced on plated Cu and Au supports.


01 Dec 1972
TL;DR: In this paper, five full size and eight reduced length fuel pins were fabricated for irradiation testing to evaluate design concepts for a fast spectrum lithium cooled compact space power reactor, which consisted of uranium mononitride fuel pellets encased in a Ta-8W-2Hf clad with a tungsten barrier separating fuel and clad.
Abstract: Five full size and eight reduced length fuel pins were fabricated for irradiation testing to evaluate design concepts for a fast spectrum lithium cooled compact space power reactor. These assemblies consisted of uranium mononitride fuel pellets encased in a T-111 (Ta-8W-2Hf) clad with a tungsten barrier separating fuel and clad. Fabrication procedures were fully qualified by process development and assembly qualification tests. Detailed specifications and procedures were written for the fabrication and assembly of prototype fuel pins.