Showing papers on "Fabrication published in 2012"

Fabrication of Single‐ and Multilayer MoS2 Film‐Based Field‐Effect Transistors for Sensing NO at Room Temperature

Abstract: Single- and multilayer MoS(2) films are deposited onto Si/SiO(2) using the mechanical exfoliation technique. The films were then used for the fabrication of field-effect transistors (FETs). These FET devices can be used as gas sensors to detect nitrous oxide (NO). Although the single-layer MoS(2) device shows a rapid response after exposure to NO, the current was found to be unstable. The two-, three-, and four-layer MoS(2) devices show both stable and sensitive responses to NO down to a concentration of 0.8 ppm.

Three-Dimensional Nitrogen and Boron Co-doped Graphene for High-Performance All-Solid-State Supercapacitors

Abstract: carbide-derived carbon, [ 12 ] carbon nanotubes (CNTs), [ 14–17 ] and graphene, [ 6 , 7 , 10 , 18 , 19 ] possess notable features including high surface area, high electrical conductivity, and good chemical stability, and therefore they have been widely explored as thinfi lm electrode materials for ASSSs. However, the fabrication of ASSSs generally involves complex solution processing, highpressure pressing, high-temperature sintering, and sputtering techniques. [ 11 , 12 , 14–17 ] Moreover, polymer binders and conductive additives are required to enhance the adhesion between electrode materials and substrates as well as to improve the conductivity of the electrode, which unavoidably leads to decreased energy density of the devices. [ 6 , 20 ] Therefore, several challenges remain in developing ASSSs, such as to: i) explore high-performance electrode materials, ii) enhance the interfacial compatibility between electrode and solid-state electrolyte, and iii) simplify the device fabrication process. Graphene aerogels (GAs) represent a new class of ultralight and porous carbon materials that are associated with high

Fabrication of flexible MoS2 thin-film transistor arrays for practical gas-sensing applications.

Abstract: By combining two kinds of solution-processable two-dimensional materials, a flexible transistor array is fabricated in which MoS2 thin film is used as the active channel and reduced graphene oxide (rGO) film is used as the drain and source electrodes. The simple device configuration and the 1.5 mm-long MoS2 channel ensure highly reproducible device fabrication and operation. This flexible transistor array can be used as a highly sensitive gas sensor with excellent reproducibility. Compared to using rGO thin film as the active channel, this new gas sensor exhibits much higher sensitivity. Moreover, functionalization of the MoS2 thin film with Pt nanoparticles further increases the sensitivity by up to ∼3 times. The successful incorporation of a MoS2 thin-film into the electronic sensor promises its potential application in various electronic devices.

Synthesis of Ultralong Copper Nanowires for High-Performance Transparent Electrodes

Abstract: Cu nanowires hold great promise for the fabrication of low-cost transparent electrodes. However, their current synthesis is mainly performed in aqueous media with poor nanowire dispersibility. We report herein the novel synthesis of ultralong single-crystalline Cu nanowires with excellent dispersibility, providing an excellent candidate material for high-performance transparent electrode fabrication.

Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy

Abstract: Using a simple two step fabrication process substrates with a large and uniform Raman enhancement, based on flexible free standing nanopillars can be manufactured over large areas using readily available silicon processing equipment.

Rod‐Coating: Towards Large‐Area Fabrication of Uniform Reduced Graphene Oxide Films for Flexible Touch Screens

Abstract: A novel strategy is developed for the large-scale fabrication of reduced graphene oxide films directly on flexible substrates in a controlled manner by the combination of a rod-coating technique and room-temperature reduction of graphene oxide. The as-prepared films display excellent uniformity, good transparency and conductivity, and great flexibility in a touch screen.

Free-standing mechanical and photonic nanostructures in single-crystal diamond.

Abstract: A variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators.

Magnetic Nanoparticles : From Fabrication to Clinical Applications

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Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process.

Abstract: We demonstrate the design, fabrication and measurement of integrated Bragg gratings in a compact single-mode silicon-on-insulator ridge waveguide. The gratings are realized by corrugating the sidewalls of the waveguide, either on the ridge or on the slab. The coupling coefficient is varied by changing the corrugation width which allows precise control of the bandwidth and has a high fabrication tolerance. The grating devices are fabricated using a CMOS-compatible process with 193 nm deep ultraviolet lithography. Spectral measurements show bandwidths as narrow as 0.4 nm, which are promising for on-chip applications that require narrow bandwidths such as WDM channel filters. We also present the die-to-die nonuniformity for the grating devices on the wafer, and our analysis shows that the Bragg wavelength deviation is mainly caused by the wafer thickness variation.

Laser micro-fabrication of concave, low-roughness features in silica

Abstract: We describe a micro-fabrication method to create concave features with ultra-low roughness in silica, either on optical fibers or on flat substrates. The machining uses a single CO2 laser pulse train. Parameters are chosen such that evaporation removes material while a low-viscosity melt layer produces excellent surface quality. A surface roughness σ ∼ 0.2 nm is regularly obtained. The concave depressions are near-spherical close to the center with radii of curvature between 20 and 2000 μm. The method allows fabrication of low-scatter micro-optical devices such as mirror substrates for high-finesse cavities or negative lenses on fiber tips, extending the range of micro-optical components.

Step-by-step fabrication of a highly oriented crystalline three-dimensional pillared-layer-type metal-organic framework thin film confirmed by synchrotron X-ray diffraction.

Abstract: Fabrication of a crystalline ordered thin film based on the porous metal–organic frameworks (MOFs) is one of the practical applications of the future functional nanomaterials. Here, we report the creation of a highly oriented three-dimensional (3-D) porous pillared-layer-type MOF thin film on a metal substrate using a step-by-step approach based on liquid-phase epitaxy. Synchrotron X-ray diffraction (XRD) study clearly indicates that the thin film is crystalline and its orientation is highly controlled in both horizontal and vertical directions relative to the substrate. This report provides the first confirmation of details of not only the crystallinity but also the orientation of 3-D MOF thin film using synchrotron XRD. Moreover, we also demonstrate its guest adsorption/desorption behavior by using in situ XRD measurements. The results presented here would promise useful insights for fabrication of MOF-based nanodevices in the future.

High-Q MEMS Resonators for Laser Beam Scanning Displays

Abstract: This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer level vacuum packaging technology including deposition of titanium thin film getters. The effective reduction of gas damping allows the MEMS actuator to achieve large amplitudes at high oscillation frequencies while driving voltage and power consumption can be minimized. Exemplarily shown is a micro scanner that achieves a total optical scan angle of 86 degrees at a resonant frequency of 30.8 kHz, which fulfills the requirements for HD720 resolution. Furthermore, results of a new wafer based glass-forming technology for fabrication of three dimensionally shaped glass lids with tilted optical windows are presented.

Reduced graphene Oxide–MnO2 hollow sphere hybrid nanostructures as high-performance electrochemical capacitors

Abstract: This paper presents the first successful fabrication of reduced graphene oxide (RGO)–MnO2 hollow sphere (HS) hybrid electrode materials through a solution-based ultrasonic co-assembly method. The porous structure of these MnO2 hollow spheres and the excellent dispersion of active materials give the as-fabricated RGO–MnO2 HS hybrid electrodes excellent specific capacitance and energy density, which can reach up to 578 F g−1 and 69.8 W h kg−1, respectively. These values are considerably larger than those of most reported graphene–MnO2 based hybrid electrochemical capacitors. This solution-processed method can also be used for the hybridization of graphene with other metal oxides in the fabrication of high-performance electrochemical capacitors.

Controlled Self‐Assembly of Organic Semiconductors for Solution‐Based Fabrication of Organic Field‐Effect Transistors

Abstract: The solubility and low processing temperatures of organic semiconductors enable fabrication of electronic devices using relatively simple printing technologies, and hold promise for realizing flexible plastic devices by environment-friendly production methods at low cost. In particular, by effectively using the self-assembling ability of molecules, production methods for organic semiconductor devices are expected to become more efficient in terms of energy and material consumption. We have developed two solution-based methods for self-organized formation of organic semiconductor crystals, including area selective nucleation of crystalline semiconductor films and direct formation of organic single crystals. These bottom-up methods of device fabrication, wherein the intrinsic functionalities of molecules are utilized for spontaneous assembly, may become a core technology for future plastic electronics.

Thin-film stretchable electronics technology based on meandering interconnections: fabrication and mechanical performance

Abstract: A new fabrication technology for stretchable electrical interconnections is presented. This technology can be used to connect various non-stretchable polyimide islands hosting conventional electronic components. The interconnections are realized by patterning a 200 nm thick sputter-deposited gold film into meandering horseshoe shapes, functioning as 'two-dimensional springs' when embedded in a silicone elastomer. Polyimide support is introduced around the meandering conductors as a means to improve the mechanical performance. Processing is done on a temporary carrier; the islands and interconnections are embedded in polydimethylsiloxane in a final stage. To this end, a release technique compatible with high temperatures up to 350 based on the evaporation of a 400 nm thick layer of potassium chloride is developed. Test structures consisting of stretchable interconnections with a varying polyimide support width were fabricated. These were strained up to twice their original length without compromising their functionality. Also cyclic mechanical loading at various strains was performed, indicating the influence of the polyimide support width on the lifetime. At strains of 10%, a minimum lifetime of 500 000 cycles is demonstrated. The presented technology thus provides a promising route towards the fabrication of stretchable electronic circuits with enhanced reliability.

Continuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filters

Abstract: We demonstrate the continuous fabrication of large-area flexible metamaterial films via roll-to-roll (R2R) nanoimprint lithography (NIL) technique that can be conducted in an ambient environment at high speed The plasmonic metal-insulator-metal structure is successfully fabricated by R2R NIL to continuously pattern the sub-wavelength scale metal disk array on flexible substrates The patterned metal disks having varying diameters and sub-micron spacing with few defects lead to the desired broadband IR filtering performance at the designed dual-band, which correlates well with simulation analysis Our method realizes a simple and high-throughput fabrication of plasmonic metamaterials for scalable and flexible optoelectronic and photonic applications

Solution-processed, Self-organized Organic Single Crystal Arrays with Controlled Crystal Orientation

Abstract: A facile solution process for the fabrication of organic single crystal semiconductor devices which meets the demand for low-cost and large-area fabrication of high performance electronic devices is demonstrated. In this paper, we develop a bottom-up method which enables direct formation of organic semiconductor single crystals at selected locations with desired orientations. Here oriented growth of one-dimensional organic crystals is achieved by using self-assembly of organic molecules as the driving force to align these crystals in patterned regions. Based upon the self-organized organic single crystals, we fabricate organic field effect transistor arrays which exhibit an average field-effect mobility of 1.1 cm2V−1s−1. This method can be carried out under ambient atmosphere at room temperature, thus particularly promising for production of future plastic electronics.

Fabrication of graphene based on Q-switched Nd:YAG laser ablation of graphite target in liquid nitrogen

Abstract: In this work, a novel technique is presented for the graphene fabrication based on the pulsed laser ablation of graphite target inside the cryogenic liquid using the pulsed nanosecond Q-switched Nd:Y3Al5O12 (Nd:YAG) laser at 1064 nm. Single-stage fabrication process is taken into account as a remarkable advantage without need to high vacuum devices and additional chemical components. The synthesis process is controllable by changing the laser properties and the irradiation conditions accompanying easy collection of the products.

Fabrication and Characterization of a Highly Temperature Sensitive Device Based on Nematic Liquid Crystal-Filled Photonic Crystal Fiber

Abstract: We report on the fabrication and characterization of a highly sensitive temperature sensor by selectively filling the nematic liquid crystal (NLC) 6CHBT into a single void within the photonic crystal fiber (PCF) structure. The temperature response of the device is experimentally characterized, showing good linearity, repeatability, and sensitivity at around -3.90 nm/°C within the temperature range from 44°C to 53°C. The mode properties of the device are theoretically investigated, confirming the mode coupling principle and the temperature sensitivity of the device.

Fabrication of molded chalcogenide-glass lens for thermal imaging applications.

Abstract: With the recent development of less costly uncooled detector technology, expensive optics are among the remaining significant cost drivers. As a potential solution to this problem, the fabrication of IR lenses using chalcogenide glass has been studied in recent years. We report on the fabrication of a molded chalcogenide-glass lens for car night vision and on the evaluation of the lens. The moldability of chalcogenide glass was characterized through transcription properties of the mold's surface. In addition, both IR transmittance and x-ray diffraction patterns of the molded chalcogenide-glass lens were evaluated to verify the compositional and structural stability of the glass material under the given molding conditions.

Batch fabrication of optical actuators using nanotube–elastomer composites towards refreshable Braille displays

Abstract: This paper reports an opto-actuable device fabricated using micro-machined silicon moulds. The actuating component of the device is made from a composite material containing carbon nanotubes (CNTs) embedded in a liquid crystal elastomer (LCE) matrix. We demonstrate the fabrication of a patterned LCE-CNT film by a combination of mechanical stretching and thermal cross-linking. The resulting poly-domain LCE-CNT film contains ‘blister-shaped’ mono-domain regions, which reversibly change their shape under light irradiation and hence can be used as dynamic Braille dots. We demonstrate that blisters with diameters of 1.0 and 1.5 mm, and wall thickness 300 µm, will mechanically contract under irradiation by a laser diode with optical power up to 60 mW. The magnitude of this contraction was up to 40 µm, which is more than 10% of their height in the ‘rest’ state. The stabilization time of the material is less than 6 s for both actuation and recovery. We also carried out preliminary tests on the repeatability of this photo-actuation process, observing no material or performance degradation. This manufacturing approach establishes a starting point for the design and fabrication of wide-area tactile actuators, which are promising candidates for the development of new Braille reading applications for the visually impaired.

Self-aligned fabrication of graphene RF transistors with T-shaped gate.

Abstract: Exceptional electronic properties of graphene make it a promising candidate as a material for next generation electronics; however, self-aligned fabrication of graphene transistors has not been fully explored. In this paper, we present a scalable method for fabrication of self-aligned graphene transistors by defining a T-shaped gate on top of graphene, followed by self-aligned source and drain formation by depositing Pd with the T-gate as a shadow mask. This transistor design provides significant advantages such as elimination of misalignment, reduction of access resistance by minimizing ungated graphene, and reduced gate charging resistance. To achieve high-yield scalable fabrication, we have combined the use of large-area graphene synthesis by chemical vapor deposition, wafer-scale transfer, and e-beam lithography to deposit T-shaped top gates. The fabricated transistors with channel lengths in the range of 110-170 nm exhibited excellent performance with peak current density of 1.3 mA/μm and peak transconductance of 0.5 mS/μm, which is one of the highest transconductance values reported. In addition, the T-gate design enabled us to achieve graphene transistors with extrinsic current-gain cutoff frequency of 23 GHz and maximum oscillation frequency of 10 GHz. These results represent important steps toward self-aligned design of graphene transistors for various applications.

An all-gas-phase approach for the fabrication of silicon nanocrystal light-emitting devices.

Abstract: We present an all-gas-phase approach for the fabrication of nanocrystal-based light-emitting devices. In a single reactor, silicon nanocrystals are synthesized, surface-functionalized, and deposited onto substrates precoated with a transparent electrode. Devices are completed by evaporation of a top metal electrode. The devices exhibit electroluminescence centered at a wavelength of λ = 836 nm with a peak external quantum efficiency exceeding 0.02%. This all-gas-phase approach permits controlled deposition of dense, functional nanocrystal films suitable for application in electronic devices.