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Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.


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Patent
11 Feb 2003
TL;DR: In this article, a microstructure device is cast from the device mold, then the mold component is removed from the micro-structured device and the device is then released from the mold body.
Abstract: Fabrication of a microstructure device includes assembling a mold component and a mold body to form a device mold for the microstructure device. The microstructure device is cast from the device mold, then the mold component is removed from the microstructure device. The microstructure device is then released from the mold body.

75 citations

Journal ArticleDOI
TL;DR: In this article, a non-photolithographic fabrication method using soft lithography and electrodeposition was reported to produce highly layered full-metallic structures with excellent structural fidelity. But the method was not suitable for the fabrication of 3D metallic photonic crystal structures.
Abstract: 3D micropatterning of materials can create advanced mechanical, chemical, or electromagnetic functionalities not observed in bulk. This is especially true for 3D periodic structures, called photonic crystals, which significantly modify optical properties of materials for light having wavelengths close to the periodicity of the patterning. Among them, a 3D metallic photonic crystal (MPC), usually in a woodpilelike pattern, has recently attracted attention because it can produce efficient thermal emitters and photovoltaic devices through tailoring of the absorption spectrum. However, its fabrication is still problematic because of challenges in 3D microfabrication at optical scales. In this letter, we report a nonphotolithographic fabrication method using soft lithography and electrodeposition to produce highly layered full-metallic structures with excellent structural fidelity. By adding a homogeneous monolithic backplane to the conventional woodpile structure, the difficulty of alignment in layer-by-layer fabrication is alleviated, while preserving characteristic highly enhanced thermal radiation in a tailorable range of frequencies. Although the tailored enhancement of absorption has been observed from woodpile MPCs fabricated by semiconductor processing, obstacles in multilayer alignment and intricate processing still remain. As an alternative approach, direct laser writing could be considered to create a template for woodpile MPCs. As in all approaches using a template, metalinfiltration is a critical step because of the complex 3D geometry of the template. Electrodeposition has strong potential for complete bottom-up filling rather than vapor-phase deposition, which often results in voids from blocked channels. However, a number of requirements must be satisfied, including: complete wetting of the template, slow deposition to prevent hydrogen generation at the cathode, and good chemical and mechanical stability of the template under electrolytes. Additionally, the surface of the conducting substrate cannot have any insulating residue impeding current flow after forming the template. It is not clear whether other approaches using photolithography, including direct laser writing, are adequate for the fabrication of woodpile metallic structures using electrodeposition. Recently, we reported a soft lithographic technique, called two-polymer microtransfer molding, for the fabrication of layer-by-layer polymer microstructures using nonoptical additive processing. With this technique, a photocurable polyurethane prepolymer (J91, Summers Optical) is filled in linear microchannels of a polydimethylsiloxane-based elastomeric mold (Sylgard 184, Dow Corning) and solidified. The surface of the prefilled polymer is coated with a photocurable polymetacrylate prepolymer (SK9, Summers Optical) as an adhesive layer and the assembly is placed in contact with an indium-tin-oxide (ITO)-coated glass. Then, after curing the adhesive layer and peeling off the elastomeric mold, a layer of microrods are transferred to the ITO-coated glass. Awoodpile polymer template is created after multiple transfer steps. Generally, the layer-bylayer structure requires sophisticated translational alignment to place rods of each layer in the proper position centered between the rods of alternate layers with the same orientation. In this study, we attempted only angular alignment for the parallel arrangement of rods in different layers using a moirefringes-based alignment technique without the translational alignment. We show here that translational alignment is not crucial in the metallic layer-by-layer structure. The multilayer polymer template was backfilled by the electrodeposition of nickel until a homogenous overlayer was formed. The overlayer served as the backplane of the photonic crystal structure and its optical contribution is discussed. The backfilling speed was slower than for a bare ITO surface, which indicates that some electrically insulating residue existed on the surface, although it was not sufficient to prohibit electroplating. The residue may have originated from the elastomer molds used in soft lithography or prepolymers used in forming the polymer templates. Because of weak adhesion of the electrodeposited nickel to ITO, the backfilled structure was easily peeled off manually. The polymer template embedded in the backfilled nickel structure was chemically removed. Figure 1 shows scanning electron microscopy (SEM) images of a free-standing 11 layer nickel structure without the backplane. The size of the fabricated nickel structures was sufficiently wide (4 mm × 4 mm) for a thermal emitter and each layer consisted of more than 1500 rods, 1.1 lm wide and C O M M U N IC A IO N

75 citations

Journal ArticleDOI
23 Sep 2022-Science
TL;DR: In this paper , the solvent dielectric constant and Gutmann donor number were used to grow phase-pure 2D halide perovskite stacks of the desired composition, thickness, and bandgap without dissolving the underlying substrate, which achieved a photovoltaic efficiency of 24.5% with less than 1% degradation under continuous light at 55°C and 65% relative humidity.
Abstract: Realizing solution-processed heterostructures is a long-enduring challenge in halide perovskites because of solvent incompatibilities that disrupt the underlying layer. By leveraging the solvent dielectric constant and Gutmann donor number, we could grow phase-pure two-dimensional (2D) halide perovskite stacks of the desired composition, thickness, and bandgap onto 3D perovskites without dissolving the underlying substrate. Characterization reveals a 3D–2D transition region of 20 nanometers mainly determined by the roughness of the bottom 3D layer. Thickness dependence of the 2D perovskite layer reveals the anticipated trends for n-i-p and p-i-n architectures, which is consistent with band alignment and carrier transport limits for 2D perovskites. We measured a photovoltaic efficiency of 24.5%, with exceptional stability of T99 (time required to preserve 99% of initial photovoltaic efficiency) of >2000 hours, implying that the 3D/2D bilayer inherits the intrinsic durability of 2D perovskite without compromising efficiency. Description Pure perovskite topcoats Two-dimensional (2D) halide perovskite passivation layers grown on three-dimensional (3D) perovskite can boost the power conversion efficiency (PCE) of solar cells, but spin-coating of these layers usually forms heterogeneous 2D phases or only ultrathin layers. Sidhik et al. found that solvents with the appropriate dielectric constant and donor strength could grow phase-pure 2D phases of controlled thickness and composition on 3D substrates without dissolving them. Solar cells maintained a peak PCE of 24.5% for 2000 hours with less than 1% degradation under continuous light at 55°C and 65% relative humidity. —PDS Solvents enable growth of phase-pure two-dimensional perovskites without dissolving three-dimensional perovskite substrates.

75 citations

Journal ArticleDOI
TL;DR: A monolithic structured polymer preform was formed by in-situ chemical polymerization of high-purity MMA monomer in a home-made mould, which provides advantages over alternative preform fabrication methods such as drilling and capillary stacking, which are less suitable for mass production.
Abstract: A monolithic structured polymer preform was formed by in-situ chemical polymerization of high-purity MMA monomer in a home-made mould. The conditions for fabrication of the preforms were optimized and the preform was drawn to microstructured polymer optical fibre. The optical properties of the resultant elliptical-core fibre were measured. This technique provides advantages over alternative preform fabrication methods such as drilling and capillary stacking, which are less suitable for mass production.

75 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20241
20235,291
202210,627
2021845
2020805
2019944