Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.

Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties.

Abstract: Two-photon polymerization (2PP) is a powerful technique for the fabrication of 3D micro- and submicro-structures. By applying laser powers that are only slightly above the polymerization threshold, 3D structuring of photosensitive materials with a resolution down to 100 nm can be realized. Here we report on woodpile photonic crystal structures fabricated in organic-inorganic hybrid polymers (Ormocers) and investigation of their optical properties. The fabricated crystals possess a photonic band gap in the near infrared spectral region. The polymeric woodpile structures can be used as templates for the fabrication of highly refractive TiO2 replicas. First results in this direction are presented.

Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy

Abstract: Using a simple two step fabrication process substrates with a large and uniform Raman enhancement, based on flexible free standing nanopillars can be manufactured over large areas using readily available silicon processing equipment.

Electron‐beam fabrication of 80‐Å metal structures

Abstract: Metal structures 100 A high with sharply defined linewidths of 80 A have been produced using an electron‐beam fabrication process. A contamination resist pattern is written with a 5‐A 45‐keV scanning electron beam in a 100‐A‐thick Au‐Pd film supported by a 100‐A carbon foil. The unprotected Au‐Pd is removed by dc ion etching with 1‐keV Ar ions. Unlike most electron‐beam microfabrication processes, the resolution of the resulting structure is not limited by electron scattering, but by the grain size of the metal films. These structures should have direct application in a large number of device fabrication problems in electron and x‐ray beam technology and they should provide masks for other microfabrication processes such as x‐ray lithography.

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

Abstract: Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors’ experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed.