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Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.


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TL;DR: In this paper, an opto-actuable device fabricated using micro-machined silicon molds is presented, which is made from a composite material containing carbon nanotubes (CNTs) embedded in a liquid crystal elastomer (LCE) matrix.
Abstract: This paper reports an opto-actuable device fabricated using micro-machined silicon moulds. The actuating component of the device is made from a composite material containing carbon nanotubes (CNTs) embedded in a liquid crystal elastomer (LCE) matrix. We demonstrate the fabrication of a patterned LCE-CNT film by a combination of mechanical stretching and thermal cross-linking. The resulting poly-domain LCE-CNT film contains ‘blister-shaped’ mono-domain regions, which reversibly change their shape under light irradiation and hence can be used as dynamic Braille dots. We demonstrate that blisters with diameters of 1.0 and 1.5 mm, and wall thickness 300 µm, will mechanically contract under irradiation by a laser diode with optical power up to 60 mW. The magnitude of this contraction was up to 40 µm, which is more than 10% of their height in the ‘rest’ state. The stabilization time of the material is less than 6 s for both actuation and recovery. We also carried out preliminary tests on the repeatability of this photo-actuation process, observing no material or performance degradation. This manufacturing approach establishes a starting point for the design and fabrication of wide-area tactile actuators, which are promising candidates for the development of new Braille reading applications for the visually impaired.

72 citations

Journal ArticleDOI
TL;DR: In this article, a thermoelectric power generation system with a flexible structure was developed, which is composed of a polyimide sheet as a substrate, a heat absorber sheet and a heat sink sheet.
Abstract: A thermoelectric power generation system is developed with a flexible structure. Its micro fabrication has the advantage of miniaturization and integration. Thermoelectric materials are fabricated by using micro fabrication technology. The developed structure is composed of a polyimide sheet as a substrate, thermoelectric materials deposited on the substrate, a heat absorber sheet and a heat sink sheet. The flexibility of this structure depends on the wavy form of the substrate and slits in the substrate, and the heat absorber and heat sink sheets. Because of the characteristic evaluation, open-circuit voltage of 16 µV K−1 per thermocouple was obtained. In addition, the thermopile generator does not break till a bending radius of curvature of 9 mm is reached. A prospect for practical application of the thermoelectric power generator for a curved surface was confirmed.

72 citations

Journal ArticleDOI
TL;DR: In this paper, a concept for full-wafer processing (FWP) and fullwafer testing (FWT) for semiconductor laser fabrication in the AlGaAs-GaAs material system is presented.
Abstract: A concept for full-wafer processing (FWP) and full-wafer testing (FWT) for semiconductor laser fabrication in the AlGaAs-GaAs material system is presented. The approach is based on chemically assisted ion beam etching for the laser-mirror formation. Record values for mirror scattering, optimum mirror reflectivity, and equivalence to cleaved mirrors in terms of laser threshold and efficiency have been achieved. Promising results for uniformity and reproducibility for major laser diode characteristics on processed 2-in wafers have been found. The FWP technology has been extensively used for designing test sites to determine various materials, process, and laser parameters, such as sheet resistance, ridge dimensions, lithographic alignment errors, mirror surface leakage, etc. >

72 citations

Journal ArticleDOI
TL;DR: In this article, the authors investigated the most suitable device structure for large-scale SFQ circuits and proposed a new Nb 10-layer device structure that is composed of active layers including junctions at the top, PTL layers in the middle and DC power layers at the bottom.
Abstract: We investigated the most suitable device structure for large-scale SFQ circuits and propose a new Nb 10-layer device structure that is composed of active layers including junctions at the top, PTL layers in the middle and DC power layers at the bottom. This device structure enables us to reduce the influence of the magnetic field due to large bias currents and to form a Nb/AlOx/Nb junction layer in the last part of the fabrication sequence. To achieve this structure, we developed a higher quality planarization that could remove the residual slight roughness after standard caldera planarization. We fabricated a diagnostic chip that is composed of test elements such as junctions, contacts, resistors and many kinds of process test patterns. We obtained sufficient characteristics for the diagnostic chips. Moreover, to evaluate the fabrication process, we designed and fabricated several shift registers. We confirmed the correct operation of an up to 2560-bit shift register having 10,281 junctions.

72 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20241
20235,291
202210,627
2021845
2020805
2019944