Topic
Fabrication
About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.
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TL;DR: In this article, a new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated, and a photopolymer structure has also been realized and released using a positive tone resist as sacrificial layer.
Abstract: We report on recent advances in micro fabrication technology using micromolding and high aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been realized and released using a positive tone resist as sacrificial layer. The main advantages over past fabrication methods are better design flexibility, simplicity of the fabrication process, the capability to combine metallic materials (Ni) with polymeric materials ( SU-8), and the use of positive tone resist as a sacrificial layer. (C) 1998 Elsevier Science S.A. All rights reserved.
68 citations
TL;DR: In this article, a planar pattern in a SiGe/Si bilayer is created using conventional microfabrication techniques and then self-assembles into 3D structures during a wet etch release.
Abstract: This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures with nanoscale features that can be used for electromechanical sensors The process uses conventional microfabrication techniques to create a planar pattern in a SiGe/Si bilayer that then self-assembles into 3D structures during a wet etch release An additional metal layer can be integrated for higher conductivity Results from the fabrication of the structures are demonstrated Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical and electrical characterization The experimental characterization results were validated by finite element simulation
68 citations
TL;DR: In this article, high quality graphitic wires embedded beneath the surface of a single crystal diamond are fabricated using a combination of adaptive ultrashort pulsed laser fabrication, high numerical aperture focusing, and an axial multi-fabrication scheme.
Abstract: High quality graphitic wires embedded beneath the surface of single crystal diamond are fabricated using a combination of adaptive ultrashort pulsed laser fabrication, high numerical aperture focusing, and an axial multi-fabrication scheme. Wires are created with micrometer and sub-micrometer dimensions that can follow any three dimensional path within the diamond. The measured conductivities are over an order of magnitude greater than previously reported wires fabricated by ultra-short pulsed lasers. The increased level of graphitization control in this scheme appears particularly important for fabrication of wires parallel to the diamond surface.
68 citations
01 Jan 1989
TL;DR: In this paper, a carbothermic-reduction/nitriding process was developed to synthesize UN powders, which were loaded into Nb-1 Zr cladding tubes, irradiated in a fast test reactor, and destructively examined after 0.8 at% burnup.
Abstract: Abstract Uranium nitride fuel was selected for previous space power reactors because of its attractive thermal and physical properties; however, all UN fabrication and testing activities were terminated over ten years ago. An accelerated irradiation test, SP-1, was designed to demonstrate the irradiation performance of Nb-1 Zr clad UN fuel pins for the SP-100 program. A carbothermic-reduction/nitriding process was developed to synthesize UN powders. These powders were fabricated into fuel pellets by conventional cold-pressing and sintering. The pellets were loaded into Nb-1 Zr cladding tubes, irradiated in a fast-test reactor, and destructively examined after 0.8 at% burnup. Preliminary postirradiation examination (PIE) results show that the fuel pins behaved as designed. Fuel swelling, fission-gas release, and microstructural data are presented, and suggestions to enhance the reliability of UN fuel pins are discussed.
68 citations
15 Mar 1991-Materials Science and Engineering A-structural Materials Properties Microstructure and Processing
TL;DR: In this article, the method of melt-extraction was developed to continuously manufacture metallic fibers down to 3 μm diameter, and the results showed that amorphous and crystalline ferrous-based alloys have outstanding soft magnetic properties in their as-cast form.
Abstract: The method of melt-extraction has been developed to continuously manufacture metallic fibers down to 3 μm diameter. Fibers of ferrous-based alloys, both amorphous and crystalline, show outstanding soft magnetic properties in their as-cast form. Furthermore, amorphous alloys show extraordinary yield strengths which increase with decreasing diameter, reaching values of up to 1000 kg mm −2 .
68 citations