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Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.


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Journal ArticleDOI
TL;DR: In this article, a dual-beam Focused Ion Beam (FIB) was used to assist the fabrication of nanometre-sized materials with precision in the nanometres range.

60 citations

Journal ArticleDOI
TL;DR: A new fabrication process that employs a polycrystalline-Si (poly-Si) sacrificial layer was developed that enables the stable fabrication of Si3N4 membranes with thicknesses of 3 nm, and DNA translocation through the nanopores was observed.
Abstract: To improve the spatial resolution of solid-state nanopores, thinning the membrane is a very important issue. The most commonly used membrane material for solid-state nanopores is silicon nitride (Si3N4). However, until now, stable wafer-scale fabrication of Si3N4 membranes with a thickness of less than 5 nm has not been reported, although a further reduction in thickness is desired to improve spatial resolution. In the present study, to fabricate thinner Si3N4 membranes with a thickness of less than 5 nm in a wafer, a new fabrication process that employs a polycrystalline-Si (poly-Si) sacrificial layer was developed. This process enables the stable fabrication of Si3N4 membranes with thicknesses of 3 nm. Nanopores were fabricated in the membrane using a transmission electron microscope (TEM) beam. Based on the relationship between the ionic current through the nanopores and their diameter, the effective thickness of the nanopores was estimated to range from 0.6 to 2.2 nm. Moreover, DNA translocation through the nanopores was observed.

60 citations

Journal ArticleDOI
27 Feb 2007-Langmuir
TL;DR: A new method for the fabrication of surface-chemical gradients via oxidation of the monolayer, using a gradated grayscale mask between the UV source and the TiO2, which is demonstrated on gold surfaces bearing alkanethiol SAMs.
Abstract: We describe a new method for the fabrication of surface-chemical gradients. A film of titanium dioxide is brought into close proximity to a uniformly monolayer-covered surface and exposed to UV lig...

60 citations

Journal ArticleDOI
TL;DR: The enhancement of material properties with the ultrasonic probe assisted novel fabrication process are attributed to grain refinement of composite and homogeneous distribution of SiC nanoparticles due to the acoustic streaming and cavitation effect.

60 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20241
20235,291
202210,627
2021845
2020805
2019944