Topic
Fabrication
About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.
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TL;DR: The friction-induced nanofabrication method points out a new route in fabricating nanostructures on demand, which enables fabrication at specified locations and facilitates measuring the dimensions of nanostructure with high precision.
Abstract: Fabrication of nanostructures has become a major concern as the scaling of device dimensions continues. In this paper, a friction-induced nanofabrication method is proposed to fabricate protrusive nanostructures on silicon. Without applying any voltage, the nanofabrication is completed by sliding an AFM diamond tip on a sample surface under a given normal load. Nanostructured patterns, such as linear nanostructures, nanodots or nanowords, can be fabricated on the target surface. The height of these nanostructures increases rapidly at first and then levels off with the increasing normal load or number of scratching cycles. TEM analyses suggest that the friction-induced hillock is composed of silicon oxide, amorphous silicon and deformed silicon structures. Compared to the tribochemical reaction, the amorphization and crystal defects induced by the mechanical interaction may have played a dominating role in the formation of the hillocks. Similar to other proximal probe methods, the proposed method enables fabrication at specified locations and facilitates measuring the dimensions of nanostructures with high precision. It is highlighted that the fabrication can also be realized on electrical insulators or oxide surfaces, such as quartz and glass. Therefore, the friction-induced method points out a new route in fabricating nanostructures on demand.
59 citations
TL;DR: A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented and batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.
Abstract: A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.
59 citations
TL;DR: In this paper, a three-stage fabrication process was proposed to fabricate fully dense (density>99%) structures with complex geometries based on pre-coated Ti3SiC2 powder.
59 citations
TL;DR: Glass, silicon, poly(dimethylsil-oxane) (PDMS), and poly(methylmethacrylate) (PMMA) have been used for the fabrication of miniaturized devices.
Abstract: Glass, silicon, poly(dimethylsil-oxane) (PDMS), and poly(methylmethacrylate) (PMMA)have been used for the fabrication of miniaturized devices.Fabrication with glass or silicon substrates requires relativelycomplex processes, and the fabrication costs are high.Relatively cheap polymers such as PDMS or PMMA arenot suitable for application in organic chemical processesowing to their low chemical stability and easy swelling.
59 citations
TL;DR: In this paper, the authors demonstrate the fabrication of superconducting SmFeAsO1-xFx (Sm-1111) wires by using the ex-situ powder-in-tube technique.
Abstract: We demonstrate the fabrication of superconducting SmFeAsO1-xFx (Sm-1111) wires by using the ex-situ powder-in-tube technique. Sm-1111 powder and a binder composed of SmF3, samarium arsenide, and iron arsenide were used to synthesize the superconducting core. Although the F content of Sm-1111 is reduced in the process of ex-situ fabrication, the binder compensates by sufficiently supplementing the F content, thereby preventing a decrease in the superconducting transition temperature and a shrinkage of the superconducting volume fraction. Thus, in the superconducting Sm-1111 wire with the binder, the transport critical current density reaches the highest value of ~4 kA/cm2 at 4.2 K.
59 citations