Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.

Angular micropositioner for disk drives

Abstract: Rotary electrostatic microactuators suitable for use in a two-stage servo system for magnetic disk drives have been fabricated using the HexSil process. A 2.6 mm diameter device is shown to be capable of producing 0.17 mN-mm of output torque, corresponding to a predicted actuation bandwidth of 1.6 kHz. The structures are formed from LPCVD polysilicon deposited into deep trenches etched into a silicon mold wafer. Upon release, these structures are transferred to a target wafer using a solder bond. The solder bonding process will provide easy integration of mechanical structures with integrated circuits, allowing separate optimization of the circuit and structure fabrication processes. An advantage of HexSil is that once the mold wafer has undergone the initial plasma etching, it may be re-used for subsequent polysilicon depositions, amortizing the cost of the deep trench etching over many structural runs and thereby significantly reducing the cost of finished actuators. Further, 100 /spl mu/m high structures may be made from a 3 /spl mu/m deposition of polysilicon, increasing overall fabrication speed.

Ceramic Fabrication Technology

Abstract: Background and OverviewPreparation of Ceramic PowdersUse of Additives in Powder Preparation and Other Raw Materials and Nondensification UsesForming and Pressureless Sintering of Powder-Derived BodiesUse of Additives to Aid DensificationOther General Densification and Fabrication MethodsSpecial Fabrication MethodsCrosscutting, Manufacturing Factors, and FabricationIndex

Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching

Abstract: We report a novel method to fabricate GaN-based nanorod light emitting diodes (LEDs) with controllable dimension and density using self-assemble nickel (Ni) and Ni/Si 3 N 4 nano-masks and inductively coupled plasma reactive ion etching (ICP-RIE). Under the fixed Cl 2 /Ar flow rate of 50/20 sccm, ICP/Bias power of 400/100 W and chamber pressure of 0.67 Pa, the GaN-based nanorod LEDs were fabricated with density of 2.2 × 10 9 to 3 × 10 10 cm −2 and dimension of 150–60 nm by self assemble Ni nano-masks with various size. The size of Ni/Si 3 N 4 nano-mask was control by the thickness Ni film ranging 150–50 A and rapid thermal annealing condition. The technique offers a controllable method of fabrication of GaN-based nanorod LEDs and should be applicable for fabrication of the others III–V nanoscale photonic and electronic devices.

Roll‐to‐Roll Fabrication of Multilayer Films for High Capacity Optical Data Storage

Abstract: Optical data storage (ODS) has led to transformative advances in information storage and distribution technology. Conventional two-dimensional ODS media have allowed storage capacities necessary for high-defi nition video. The capacity is limited, however, by the size of the disk and the number of layers that can be addressed using highly scattering phase-change materials employed in these media. [ 1 ] Here we report on a co-extrusion process for fabricating roll-to-roll multilayer (ML) fi lms for high-density ODS. This process can easily produce a continuous, complete storage medium hundreds of meters in length and meters in width, ready for fabrication into the standard 120 mm diameter disk or a variety of other potential formats, with total writable areas suffi cient for terabyte (TB) to petabyte (PB)-scale capacity. The co-extrusion process is also low-cost and far simpler than current manufacturing approaches, such as spin-coating [ 2 , 3 ] and lamination. [ 4–6 ] We demonstrate data storage in 23 layers of a 78 μ m thick ML fi lm using a continuous-wave Blu-Ray (BR) laser by fl uorescence (FL) quenching of an organic dye. The areal density is found to be similar to that of commercial disks, and the small layer spacing allowed by a FL-based scheme leads to a bit density of 1.2 × 10 12 cm − 3 . Given the mechanism and high axial density, the cross-talk during writing is also examined. The approach is generic so that materials already developed for high-density ODS can be exploited for innovations including “cloud”-scale data storage. Commercial ODS disks are made by fi rst injection molding of the thick, plastic substrate. The refl ective and active layers are added by a combination of sputtering and spin-coating. [ 1 ] For simple read/write systems based on a bit-wise one-photon write scheme, a multilayer architecture would require a multiplicity of steps with the current manufacturing processes. Several organic dye/polymer schemes suitable for three-dimensional

Fabrication of Carbon nanotube poly-methyl-methacrylate composites for nonlinear photonic devices.

Abstract: Carbon nanotubes (CNT) are an attractive material for photonic applications due to their nonlinear optical properties, such as the nonlinear saturable absorption and high third order nonlinearity. However their utilization has been hindered by the lack of flexibility on the device design which rises from the current methods of Carbon nanotube deposition within the optical system. A suitable approach to solve this problem is to embed the CNTs in an optical material from which complex devices such as optical waveguides or optical fibers can be fabricated. Here, we propose a novel method to fabricate Carbon nanotube-doped poly-methyl-methacrylate (PMMA) composites in which the Carbon nanotubes are dispersed in the methyl-methacrylate (MMA) monomer solution prior to and during the polarization process. This method allows the bundle separation and dispersion of the CNT in a liquid state without the need for solvents, hence simplifying the method and facilitating the fabrication of volume CNT-PMMA. Volume fabrication makes this technique suitable for the fabrication of CNT-doped polymer fibers. In this paper, we also analyzed the merits of adding dopants such as diphenyl sulfide (DPS) and benzyl benzoate (BEN) to the CNT-PMMA composite and we observed that DPS plays the role of CNT dispersion stabilizer that can improve the device performance. The CNT-PMMA composite was employed to implement passive mode-locked laser.