Topic
Fabrication
About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.
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Papers
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TL;DR: In this article, a polyiimide-based process for the fabrication of high-aspect-ratio electroplated microstructures is presented, which is a low-cost alternative to the LIGA process for microstructure fabrication.
Abstract: A polyiimide-based process for the fabrication of thick (1-150 mu m), sharp-sidewall, high-aspect-ratio electroplated microstructures is presented. This process is a low-cost alternative to the LIGA process for microstructure fabrication. Although this process cannot match the performance of the LIGA process, it uses ordinary optical masks and ultraviolet light exposure, resulting in simple and inexpensive equipment requirements. Using this technology, structures made of a variety of electroplated metals can be fabricated. Vertically integrated structures that exploit the multilayer ability of the polyimides used can also be realized. Surface micromachining with this process can be used to fabricate movable electroplated microactuators. >
197 citations
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16 Mar 2000TL;DR: In this article, a large area, thin-film, flexible photovoltaic structure is described, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, "continuous motion" method for producing such a structure.
Abstract: A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.
197 citations
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TL;DR: Zhou et al. as mentioned in this paper proposed a key laboratory of metal and molecular based material chemistry at Nankai University in China, named Tianjin Key Laboratory of Metal and Molecule Based Material Chemistry.
Abstract: Dr. M. Yang, Y. R. Zhong, J. J. Ren, X. L. Zhou, Prof. J. P. Wei, Prof. Z. Zhou Tianjin Key Laboratory of Metal and Molecule Based Material Chemistry Key Laboratory of Advanced Energy Materials Chemistry (Ministry of Education) Institute of New Energy Material Chemistry School of Materials Science and Engineering Collaborative Innovation Center of Chemical Science and Engineering (Tianjin) Nankai University Tianjin 300071 , China E-mail: zhouzhen@nankai.edu.cn
197 citations
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TL;DR: A non-lithographic technique that utilizes the self-organized, highly ordered anodized aluminum oxide (AAO) porous membrane as a template is employed as a general fabrication means for the formation of vastly different two-dimensional lateral nanometric superlattices.
Abstract: A non-lithographic technique that utilizes the self-organized, highly ordered anodized aluminum oxide (AAO) porous membrane as a template is employed as a general fabrication means for the formation of vastly different two-dimensional lateral nanometric superlattices. The fact that material systems as different as metals, semiconductors, and carbon nanotubes (CNT) can be treated with the same ease attests to the generality of this nano-fabrication approach. The original alumina nanopore membranes determine the uniformity, packing density, and size of the nanostructures. The flexibility of using a variety of materials, the accurate control over fabrication process, and the command over the alumina template attributes give us the freedom of engineering various physical properties determined by the shape, size, composition, and doping of the nanostructures. The novel nanomaterial platform realized by this unique technique is powerfully enabling for a broad range of applications as well as for uncovering new physical phenomena such as the collective behavior of arrays of nano-elements that may not be intrinsic to individual nano-elements.
196 citations