Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.

Room-temperature fabrication of ultrathin oxide gate dielectrics for low-voltage operation of organic field-effect transistors.

Abstract: Organic fi eld-effect transistors (OFETs) are attractive building blocks for low-cost electronic devices such as radio-frequency identifi cation (RFID) tags, sensors, electronic paper, and backplane circuits for active-matrix displays. [1–6 ] Low-voltage operation of OFETs is necessary for practical applications, hence the need to develop gate dielectrics with a high areal capacitance. [ 7 , 8 ]

Fabrication and characterization of nanoresonating devices for mass detection

Abstract: We report on a novel fabrication process and preliminary characterization of a nanomechanical resonating device, which is to be used for mass detection. The fabrication of the device is based on laser lithography on Al coated SiO2/p++Si/SiO2/Si structures, followed by dry and wet etching. We have fabricated highly doped polysilicon free-hanging cantilevers and anchored drivers for lateral cantilever vibration, where the motion of the cantilever is parallel to the substrate. The cantilevers are actuated electrically by applying an ac voltage between the cantilever and driver. The laterally vibrating cantilever structures are approximately 30–50 μm in length, 1.8 μm in height, and 500 nm in width. The characterization of the resonators was performed by direct observation of the cantilever through an optical microscope. An electrical measuring technique is also presented and discussed. Typical values of resonant frequency and quality factor, at 1 atm, are approximately 500 kHz and 50, respectively. Moreover,...

Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern : Optics and Quantum Electronics

Abstract: An antireflection surface with sub-wavelength structure has been successfully fabricated on a fused silica substrate. The fabricated antireflection structured surface consists of a microcone array of fused silica with a period shorter than the wavelengths of visible light. The microcone array is made by a reactive ion etching method using fluorocarbon plasma. A microdisk array of chromium thin film, formed by an electron-beam lithography and lift-off process, is used as the etching mask. Since an electric field induced near the substrate was focused on the edges of the metal disks, these disks gradually shrank. Consequently, a conical shape was formed. The fabricated cone array has a period of 250 nm and a height of 750 nm. Measured reflectivity of the antireflection structured surface is less than 0.5% in the wavelength range of 400–800 nm for normal incidence.

One-step patterning of hollow microstructures in paper by laser cutting to create microfluidic analytical devices

Abstract: In this paper, we report a simple, low-cost method for rapid, highly reproductive fabrication of paper-based microfluidics by using a commercially available, minitype CO2 laser cutting/engraving machine. This method involves only one operation of cutting a piece of paper by laser according to a predesigned pattern. The hollow microstructures formed in the paper are used as the ‘hydrophobic barriers’ to define the hydrophilic flowing paths. A typical paper device on a 4 cm × 4 cm piece of paper can be fabricated within ∼7–20 s; it is ready for use once the cutting process is finished. The main fabrication parameters such as the applied current and cutting rate of the laser were optimized. The fabrication resolution and multiplexed analytical capability of the hollow microstructure-patterned paper were also characterized.