Topic
Fabrication
About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.
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Patent•
07 Jan 1993TL;DR: In this paper, a mask is described which enables the fabrication of features in GaAs such as waveguides, channels, facets, mesas and mirrors by dry etch processing in chlorine containing ambients.
Abstract: A mask is described which enables the fabrication of features in GaAs such as waveguides, channels, facets, mesas, and mirrors by dry etch processing in chlorine containing ambients. The mask consists of an amorphous form of carbon which may contain incorporated hydrogen. The mask can be applied, patterned and removed through dry processing techniques.
119 citations
TL;DR: In this paper, a new hard tooling fabrication technique, called fused deposition of metals (FDMet), was investigated to fabricate prototype metal components without using molds, dies, or similar tooling.
119 citations
Patent•
11 Apr 2002
TL;DR: In this article, a process of forming a compound film includes formulating a nano-powder material with a controlled overall composition and including particles of one solid solution, and the material is deposited on a substrate to form a layer (52) on the substrate and the layer is reacted in at least one suitable atmosphere to form the compound film.
Abstract: A process of forming a compound film includes formulating a nano-powder material with a controlled overall composition and including particles of one solid solution. The nano-powder material is deposited on a substrate (70) to form a layer (52) on the substrate, and the layer is reacted in at least one suitable atmosphere to form the compound film. The compound film may be used in fabrication of a radiation detector or solar cell.
119 citations
TL;DR: It is demonstrated that by controlling the nanowire growth process, via tuning the experimental parameters such as the concentration of reactants and the growth time, and by introducing a refresh of the growth solution, the device structure efficiency can be enhanced to significantly improve its performance.
Abstract: Developing rationally controlled bottom-up device fabrication processes is essential for the achievement of
high performance optimal devices. We report a controlled, seedless and site-selective hydrothermal
technique to fabricate high-performance nanostructured ZnO UV-detectors directly on-chip. We
demonstrate that by controlling the nanowire growth process, via tuning the experimental parameters such
as the concentration of reactants and the growth time, and by introducing a refresh of the growth solution,
the device structure efficiency can be enhanced to significantly improve its performance. The on-chip
fabricated bridging nanosyringe ultraviolet detector demonstrates improved sensitivity (,105
), nanowatts
detectability, and ultrafast response-time (90 ms) and recovery-time (210 ms). The improvement in
response-time and recovery-time is attributed to the unique nanowire-nanowire junction barrier
dominated resistance and the direct contact between ZnO and Au electrodes. Furthermore, the enhanced
sensitivity and nanowatts detectability of the bridging nanosyringe device are due to the reduction in
dimensionality and ultrahigh surface-to-volume ratio. This work paves the way toward low cost, large scale,
low temperature, seedless and site-selective fabrication of high performance ZnO nanowire sensors on
flexible and transparent substrates.
119 citations
TL;DR: In this article, a stereolithographic technique is presented that allows the usage of pastes composed of ceramic particles dispersed in a photocurable resin for the fabrication of alumina pieces, which exhibit a similar flexural strength than alumina parts made by classical techniques like pressing.
Abstract: Among the different rapid prototyping technologies, solid freeform fabrication (SFF) is the most suitable for ceramics. Here a stereolithographic technique is presented that allows the usage of pastes composed of ceramic particles dispersed in a photocurable resin for the fabrication of alumina pieces. They exhibit a similar flexural strength than alumina parts made by classical techniques like pressing.
119 citations