Fabrication

About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.

Transparent Ferroelectric Glass-Ceramics

Abstract: In recent years, there has been a resurgence of interest in transparent ferroelectric glass-ceramics (TFGCs), which are a special class of glass-ceramic composites that combine the low cost of fabrication and forming of transparent glass with the superior nonlinear optical and electro-optical properties of ferroelectric crystals. In this paper, we present a review of the current status, focusing on the challenges of fabrication and opportunities for selectively creating nonlinear optical structures, which will be useful in realizing integrated optical devices. A successful fabrication of TFGC requires the nucleation and growth of crystallites that are too small to scatter light, yet large enough to have ferroelectric response. Early experiments on silica based glasses containing common ferroelectric oxides indicated that although the preparation of TFGC is feasible, such a balance of crystallite size is difficult to achieve. However, later studies have demonstrated successful fabrication of TFGCs with com...

Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer

Abstract: The formation of well-controlled circular patterns on the nanoscale is important for the fabrication of a range of devices such as sensors, memories, lasers, transistors, and quantum devices. Concentric, smooth ring patterns with tunable dimensions have been formed from a cylinder-forming poly(styrene-b-dimethylsiloxane) (PS-PDMS) diblock copolymer under confinement in shallow circular trenches. The high etch selectivity between PS and PDMS facilitates pattern transfer, illustrated by the fabrication of arrays of ferromagnetic cobalt rings with a density of 1.1 × 109/cm2. The effects of confinement diameter and commensurability on the diameter and period of the concentric rings are analyzed using a free energy model that includes interfacial, strain, and bending energies. This work provides a simple process for the fabrication of nanoscale circular patterns with very narrow line width using a much coarser-scale template, and may facilitate the miniaturization of a variety of microelectronic devices.

Fabrication of microfluidic devices for AC electrokinetic fluid

Abstract: Two techniques for the fabrication of novel microfluidic devices for electrokinetic fluid pumping are presented. Both consist of forming a micro-channel and reservoirs on a transparent cover sheet and patterning an array of interdigitated asymmetric micro-electrodes on a flat substrate. The two techniques differ from each other in their building materials as well as the pattern replication technique used for the cover sheet fabrication. In the first approach, we used a glass substrate for the electrode fabrication and casting of an elastomer for the cover sheet. In the second approach, both cover sheet and substrate are obtained by imprinting plastic pellets on a pre-patterned or flat mold. In assembled devices, pumping has been demonstrated and characterized by optical microscopy. The observed dependence of the pumping velocity on applied voltage and frequency are in line with theoretical predictions. © 2002 Elsevier Science B.V. All rights reserved.

Multilayer high vertical aspect ratio thin film structures

Abstract: This invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the fabrication of thin film structures (2) in excess of 150 microns in height using thin film deposition processes. Wafers may be employed as reusable molds for efficient production of such structures. Various material properties may be varied within the structures to produce electrical, mechanical or electromechanical devices.