Topic
Fabrication
About: Fabrication is a research topic. Over the lifetime, 20475 publications have been published within this topic receiving 235676 citations.
Papers published on a yearly basis
Papers
More filters
TL;DR: In this paper, the authors describe the design, fabrication and operation of several micromotors that have been produced using integrated-circuit processing and demonstrate that rotors and stators for these motors are formed from polycrystalline silicon 1.0-1.5 μm thick.
453 citations
TL;DR: The fabrication of what is believed to be the first example of a two-dimensional (2D) nonlinear photonic crystal where the refractive index is constant but where the 2nd order nonlinear susceptibility is spatially periodic is reported.
Abstract: We report on the fabrication of what we believe is the first example of a two-dimensional (2D) nonlinear photonic crystal [Berger, Phys. Rev. Lett. 81, 4136 (1998)], where the refractive index is constant but where the 2nd order nonlinear susceptibility is spatially periodic. Such crystals allow for efficient quasi-phase-matched 2nd harmonic generation using multiple reciprocal lattice vectors. External 2nd harmonic conversion efficiencies >60% were measured with picosecond pulses. The fabrication technique is extremely versatile and should allow for the fabrication of a broad range of 2D crystals including quasicrystals.
450 citations
TL;DR: A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass.
Abstract: We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).
445 citations
TL;DR: In this article, a new process was proposed to make films of Y1Ba2Cu3O7 using coevaporation of Y, Cu, and BaF2 on SrTiO3 substrates.
Abstract: We report on a new process to make films of Y1Ba2Cu3O7 using coevaporation of Y, Cu, and BaF2 on SrTiO3 substrates. The films have high transition temperatures (up to 91 K for a full resistive transition), high critical current densities (106 A/cm2 at 81 K), and a reduced sensitivity to fabrication and environmental conditions. Because of the lower reactivity of the films, we have been able to pattern them in both the pre‐annealed and post‐annealed states using conventional positive photoresist technology.
411 citations
TL;DR: This work has achieved solution-based assembly of separated nanotube thin films on complete 3 in.
Abstract: Preseparated, semiconductive enriched carbon nanotubes hold great potential for thin-film transistors and display applications due to their high mobility, high percentage of semiconductive nanotubes, and room-temperature processing compatibility. Here in this paper, we report our progress on wafer-scale processing of separated nanotube thin-film transistors (SN-TFTs) for display applications, including key technology components such as wafer-scale assembly of high-density, uniform separated nanotube networks, high-yield fabrication of devices with superior performance, and demonstration of organic light-emitting diode (OLED) switching controlled by a SN-TFT. On the basis of separated nanotubes with 95% semiconductive nanotubes, we have achieved solution-based assembly of separated nanotube thin films on complete 3 in. Si/SiO2 wafers, and further carried out wafer-scale fabrication to produce transistors with high yield (>98%), small sheet resistance (∼25 kΩ/sq), high current density (∼10 μA/μm), and super...
409 citations