Showing papers on "Fluence published in 2010"
TL;DR: In this paper, the formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSS) on single-crystalline silicon upon irradiation with single (N=1) and multiple (N≤1000) linearly polarized femtosecond (fs) laser pulses (pulse duration τ=130 fs, central wavelength λ=800 nm) in air is studied experimentally.
Abstract: The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSS) on single-crystalline silicon upon irradiation with single (N=1) and multiple (N≤1000) linearly polarized femtosecond (fs) laser pulses (pulse duration τ=130 fs, central wavelength λ=800 nm) in air is studied experimentally. Scanning electron microscopy (SEM) and optical microscopy are used for imaging of the ablated surface morphologies, both revealing LIPSS with periodicities close to the laser wavelength and an orientation always perpendicular to the polarization of the fs-laser beam. It is experimentally demonstrated that these LIPSS can be formed in silicon upon irradiation by single fs-laser pulses—a result that is additionally supported by a recent theoretical model. Two-dimensional Fourier transforms of the SEM images allow the detailed analysis of the distribution of the spatial frequencies of the LIPSS and indicate, at a fixed peak fluence, a monotonous decrease in their mean spatial period between ∼770 nm...
320 citations
TL;DR: In this article, the effect of laser parameters such as fluence, number of shots, and gaseous environments on micro-nano structure formation has been investigated, and it has been shown that arrays of micro/nano holes could be formed in thin Ti foils by direct laser treatment.
197 citations
TL;DR: In this paper, femtosecond laser ablation studies of the metals copper, silver and tungsten are presented. But they do not consider the effect of heat diffusion.
Abstract: In this paper we present femtosecond laser ablation studies of the metals copper, silver and tungsten. Measurements of the threshold fluence determined from the hole diameters versus fluence provide incubation coefficients of the three materials, which are found to be equal within one standard deviation. Furthermore, we have determined the single-shot threshold fluences to be 1.7±0.3 J/cm2, 1.5±0.4 J/cm2 and 0.44±0.02 J/cm2 for copper, silver and tungsten, respectively. These are in good agreement with theoretical values calculated neglecting heat diffusion.
196 citations
TL;DR: Sakabe et al. as discussed by the authors showed that the formation of periodic structures depends not only on metal properties but also on the electron density of plasma produced on a surface by femtosecond laser pulses.
Abstract: Periodic structures self-formed on the surface of several metals under femtosecond laser-pulse irradiation are investigated by electron microscopy. For the self-formation of periodic gratings on metal surfaces, the interspaces of the periodic structures depend on laser fluence. This dependence is the same for all metals, although the range of laser fluence in which the structures are formed differs between metals. The laser fluence dependence can be explained by the generation of a plasma wave through the parametric decay of laser light [S. Sakabe, M. Hashida, S. Tokita, S. Namba, and K. Okamuro, Phys. Rev. B 79, 033409 (2009)]. This indicates that the formation of periodic structures depends not only on metal properties but also on the electron density of plasma produced on a surface by femtosecond laser pulses.
185 citations
TL;DR: In this article, the authors reported the synthesis of aluminum nanoparticles using pulsed laser ablation in water-cubed plasma, where strong blue photoluminescence peaks at 405 nm and 430 nm due to oxygen deficient defects (F, F+, and F++ centers) were reported with different UV excitations.
Abstract: We report the synthesis of aluminum nanoparticles using pulsed laser ablation in water confined plasma. Nanoparticles have spherical shape and size distribution depends on laser fluence. Strong blue photoluminescence peaks at 405 nm (3.06 eV) and 430 nm (2.89 eV) due to oxygen deficient defects (F, F+, and F++ centers) is reported with different UV excitations. A comparative study of plasma in deionized water and air ambient reveals enhanced line broadening and higher electron density in water confined plasma compared to that in air, in agreement with radiative recombination model. The temporal dependence of spectral radiant energy density of plasma is also discussed.
89 citations
TL;DR: In this paper, a Q-switched Nd:YAG laser pulse (7 ns, 1064 nm) was used for ablation of the samples and was followed, after a suitable delay, by an Optical Parametric Oscillator (OPO) laser pulse tuned at 396.15 nm, to resonantly excite the aluminium host atoms.
Abstract: Resonance-enhanced laser-induced breakdown spectroscopy (RELIBS) was investigated with the aim to improve the limit of detection of trace elements in the context of elemental analysis of aluminium alloys. A Q-switched Nd:YAG laser pulse (7 ns, 1064 nm) was used for ablation of the samples and was followed, after a suitable delay, by an Optical Parametric Oscillator (OPO) laser pulse (7 ns), tuned at 396.15 nm, to resonantly excite the aluminium host atoms. In particular, the Mg I 285.21 nm and Si I 288.16 nm lines were observed in the acquisition spectral window. We investigated the influence of the main experimental parameters, namely, the excitation wavelength, the interpulse delay and the ablation and excitation fluences, on the signal-to-noise ratio for the Mg I 285.21 nm line. We found that, at low ablation fluences, typically less than a few J cm−2, the Mg signal at 285.21 nm achieved using RELIBS was significantly enhanced when compared to LIBS using the same ablation fluence. At fluences higher than 8 J cm−2, the effect of the excitation pulse became unnoticeable and similar results were observed for both approaches. The optimum conditions were achieved for an interpulse delay of about 30 ns, an ablation fluence of about 3.8 J cm−2 and an excitation fluence of about 1.1 J cm−2. The corresponding absolute LoDs were 0.7 and 50 fg, for Mg and Si, respectively, using RELIBS. When using LIBS, they were 4 and 128 fg, instead. Finally, the applicability of RELIBS in the context of a minimally destructive elemental analysis is discussed.
87 citations
TL;DR: In this paper, the femtosecond laser-induced ripples on patterned metal surfaces were investigated through using a crossed two-step line-scribing method, and it was found that the ripple periodicity tends to decrease with larger surface roughness but increase with higher laser fluence.
Abstract: Properties of femtosecond laser-induced ripples on patterned metal surfaces are investigated through using a crossed two-step line-scribing method. It is found that the ripple periodicity tends to decrease with larger surface roughness but increase with higher laser fluence. For the increased roughness, the change in ripple periodicity becomes more sensitive to the incident laser fluence. A cut-off surface roughness that prevents from altering the ripple periodicity is also revealed to increase with the lower laser fluence. These phenomena are discussed in the view of surface plasmon polaritons in the laser-induced plasma and the modified dielectric constant of the roughened surfaces.
75 citations
TL;DR: Secondary reactions of matrix cations with analyte neutrals are efficient even though analyte ions are ablated in clusters of matrix, and total ion yield is only weakly dependent on pulse width, and consistent with experimental estimates.
Abstract: Molecular dynamics simulations of matrix-assisted laser desorption/ionization were carried out to investigate laser pulse width and fluence effects on primary and secondary ionization process. At the same fluence, short (35 or 350 ps) pulses lead to much higher initial pressures and ion concentrations than longer ones (3 ns), but these differences do not persist because the system relaxes toward local thermal equilibrium on a nanosecond timescale. Higher fluences accentuate the initial disparities, but downstream differences are not substantial. Axial velocities of ions and neutrals are found to span a wide range, and be fluence dependent. Total ion yield is only weakly dependent on pulse width, and consistent with experimental estimates. Secondary reactions of matrix cations with analyte neutrals are efficient even though analyte ions are ablated in clusters of matrix.
73 citations
TL;DR: In this paper, the authors have analyzed ultrafast laser ablation of a metallic target (Nickel) in high vacuum addressing both expansion dynamics of the various plume components (ionic and nanoparticle components) and basic properties of the ultrafast LM ablation process while the ion temporal profile and ion angular distribution were analyzed by means of Langmuir ion probe technique, the angular distribution of the nanoparticulate component was characterized by measuring the thickness map of deposition on a transparent substrate.
Abstract: We have analyzed ultrafast laser ablation of a metallic target (Nickel) in high vacuum addressing both expansion dynamics of the various plume components (ionic and nanoparticle) and basic properties of the ultrafast laser ablation process While the ion temporal profile and ion angular distribution were analyzed by means of Langmuir ion probe technique, the angular distribution of the nanoparticulate component was characterized by measuring the thickness map of deposition on a transparent substrate The amount of ablated material per pulse was found by applying scanning white light interferometry to craters produced on a stationary target We have also compared the angular distribution of both the ionic and nanoparticle components with the Anisimov model While the agreement for the ion angular distribution is very good at any laser fluence (from ablation threshold up to ≈1 J/cm2), some discrepancies of nanoparticle plume angular distribution at fluencies above ≈04 J/cm2 are interpreted in terms of the
62 citations
TL;DR: In this paper, the fabrication of textured metal surfaces by ultrafast laser processing and its optical property characterization by measurement of reflection and scattering as a function of angle and wavelength were reported.
Abstract: We report the fabrication of textured metal surfaces by ultrafast laser processing and its optical property characterization by measurement of reflection and scattering as a function of angle and wavelength. The ultrafast laser textured metal surface reflection combined with scattering can be reduced to low values of ∼3% over a broad spectral and angular range. Furthermore, it is shown that surface optical reflection and scattering can be varied by parameters like laser fluence, number of laser pulses, and coating the textured surfaces with suitable absorbers. It is also shown that ultrafast laser textured metal surfaces can have low surface reflection and scattering properties even at high temperatures (≤500 °C) of operation.
62 citations
TL;DR: A plasma polymerized tetraglyme film is used as the model organic system and the dimensionless parameter R, (analysis beam fluence)/(total ion fluence), is introduced to quantify the degree of sample damage induced as a function of the analysis beams fluence.
Abstract: In dual-beam depth profiling, a high energy analysis beam and a lower energy etching beam are operated in series Although the fluence of the analysis beam is usually kept well below the static SIMS limit, complete removal of the damage induced by the high energy analysis beam while maintaining a good depth resolution is difficult In this study, a plasma polymerized tetraglyme film is used as the model organic system and the dimensionless parameter R, (analysis beam fluence)/(total ion fluence), is introduced to quantify the degree of sample damage induced as a function of the analysis beam fluence For a constant C60+ etching beam fluence, increasing the analysis fluence (and consequently increasing the R parameter) increased the amount of damage accumulated in the sample For Bin+ (n = 1 and 3) and C60+ depth profiling, minimal damage accumulation was observed up to R = 003, with a best depth resolution of 8 nm In general, an increase in the Bin+ analysis fluence above this value resulted in a decrea
TL;DR: In this article, a second harmonic (532-nm) output of a Nd:YAG laser was used to irradiate a Ti target with the operative fluence between 1 and 10 cm−2 and for an ablation time ranging from 10 to 30 min.
01 Oct 2010-Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
TL;DR: In this paper, the authors investigated the formation of color centers in Al2O3 by reactor neutrons by optical measurements (absorption and photoluminescence) and discussed the evolution of each absorption bands as a function of fluence and annealing temperature.
Abstract: Colour centers formation in Al2O3 by reactor neutrons were investigated by optical measurements (absorption and photoluminescence). The irradiation’s were performed at 40 °C, up to fast neutron (En > 1.2 MeV) fluence of 1.4 × 1018 n cm−2. After irradiation the coloration of the sample increases with the neutron fluence and absorption band at about 203, 255, 300, 357 and 450 nm appear in the UV–visible spectrum. The evolution of each absorption bands as a function of fluence and annealing temperature is presented and discussed. The results indicate that at higher fluence and above 350 °C the F+ center starts to aggregate to F center clusters (F2, F2+ and F 2 2 + ). These aggregates disappear completely above 650 °C whereas the F and F+ centers persist even after annealing at 900 °C. It is clear also from the results that the absorption band at 300 nm is due to the contribution of both F2 center and interstitial Al i + ions.
TL;DR: The experimental results demonstrate that along with the increase of laser fluence, significant changes in the surface morphology can be observed, and the most prominent phenomenon is the enlarging of the feature size of formed structures.
Abstract: We systematically study the morphological and optical characteristics of the large-area micro/nanostructures produced by femtosecond laser irradiation on GaAs, Si, and brass. The experimental results demonstrate that along with the increase of laser fluence, significant changes in the surface morphology can be observed, and the most prominent phenomenon is the enlarging of the feature size of formed structures. Interestingly, by the fourier analysis of the treated areas, a peculiar phenomenon can be revealed: as laser fluence increases, the spatial frequencies of the structures change following a specific law – the allowed main frequencies are discrete, and appear to be a sequence of 2f, f, f/2, f/4, and f/8 (f is the fundamental frequency corresponding to the near-subwavelength ripples). In our opinion, the new frequency components of f/2, f/4, and f/8 originate in the 2-order, 4-order, and 8-order grating coupling. The law can offer us new insights for the evolving mechanisms of a variety of laser-induced micro/nanostructures in different scales. Furthermore, the optical characteristics of the treated surface are strongly dependent on the morphological characteristics that are mainly determined by laser fluence, such as the feature size of the micro/nanostructures, the topology of the surface morphology, the surface roughness, and the irregular degree of the formed structures. In general, as laser fluence increases in a moderate range, the specular reflectance of the structured surface would be significantly reduced. However, if laser fluence is excessive, the anti-specular-reflection effect would be much weakened. In ideal laser fluence, the micro/nanostructures produced by the near-infrared laser can achieve an ultra-low specular reflectance in the visible and near-infrared spectral region, which exhibits an attracting application prospect in the field of utilizing solar energy.
TL;DR: In this article, the optical properties of nano or mesoparticles play a significant role in double pulse ablation with large pulse separations, and the second pulse can cause re-deposition of ejecta from the first pulse resulting in a double-pulse ablation depth only 40% that of the first one alone.
15 May 2010-Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
TL;DR: In this article, NiO nanoparticle films (200nm thick) grown on Si substrates by pulsed laser deposition method were irradiated by 200 MeV Ag 15+ ions and were characterized by glancing angle X-ray diffraction, atomic force microscopy and optical absorption spectroscopy.
Abstract: NiO nanoparticle films (200 nm thick) grown on Si substrates by pulsed laser deposition method were irradiated by 200 MeV Ag 15+ ions. The films were characterized by glancing angle X-ray diffraction, atomic force microscopy and optical absorption spectroscopy. Though electronic energy loss of 200 MeV Ag ions in NiO matrix was higher than the threshold electronic energy loss for creation of columnar defects, films remained crystalline with the initial fcc structure even up to a fluence of 5 × 10 13 ions cm −2 , where ion tracks are expected to overlap. Irradiation however modified the microstructure of the NiO films considerably. The grain size decreased with increasing ion fluence, which led to reduced surface roughness and increased optical band gap due to quantum confinement. These results correlate well with variation of the power spectral density exponent with ion fluence, which indicate that at high ion fluences, the evolution of surface morphology is governed by surface diffusion.
TL;DR: In this article, the defect characterization in 1.2 MeV Ar8+ irradiated polycrystalline ZnO has been carried out by x-ray diffraction, scanning electron microscopy (SEM) along with electrical resistivity, and photoluminescence (PL) measurements at room temperature (RT).
Abstract: Defect characterization in 1.2 MeV Ar8+ irradiated polycrystalline ZnO has been carried out by x-ray diffraction (XRD), scanning electron microscopy (SEM) along with electrical resistivity, and photoluminescence (PL) measurements at room temperature (RT). Interestingly, irradiation with the initial fluence (1×1015 ions/cm2) changes the color of the sample from white to orange while the highest irradiation fluence (5×1016 ions/cm2) makes it dark reddish brown that appears as black. XRD study reveals no significant change in the average grain size of the samples with irradiation fluence. Increase in surface roughness due to sputtering is clearly visible in SEM with highest fluence of irradiation. RT PL spectrum of the unirradiated sample shows intense ultraviolet (UV) emission (∼3.27 eV) and less prominent defect level emissions (2–3 eV). The overall emission is largely quenched due to initial irradiation fluence. Increasing the fluence of Ar beam further, UV emission is enhanced along with prominent defect...
TL;DR: In this article, composite films consisting of an insulating polymethyl methacrylate (PMMA) polymer matrix and metal powder (Cu) additive were prepared by solution-costing method.
Abstract: In this study, composite films consisting of an insulating polymethyl methacrylate (PMMA) polymer matrix and metal powder (Cu) additive were prepared by solution costing method. These films were irradiated with 140 MeV silver ions at the fluences of 1 × 1011 ions/cm2 and 1 × 1012 ions/cm2. The radiation induced changes in dielectric, structural and surface properties of PMMA/Cu composites were studied using impedance/gain phase-analyzer, X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). It was observed that the dielectric properties and ac electrical conductivity increased significantly with the concentration of dispersed metal powder (Cu) and also with the fluence. This reveals that ion beam irradiation creates free radicals, unsaturation etc. due to emission of hydrogen and/or other volatile gases, which makes the polymer more conductive. XRD analysis of the pristine and irradiated samples shows that the crystallinity improved upon irradiation at low fluence and deteriorated on further increase of the fluence, which could be attributed to cross linking of polymer chains at low fluence and degradation at higher fluence. High energy ion beam irradiation of semicrystalline polymer composite films changes its Tg behavior as observed from DSC analysis. This result is also corroborated with the results of XRD. The average surface roughness and topography of surfaces changed with the concentration of filler and also with the ion fluence as revealed from AFM/SEM analysis.
TL;DR: In this article, the surface chemicals and structures of aluminum plates irradiated by scanning femtosecond laser pulses in air for a wide range of laser fluence from 0.38 to 33.6 J/cm2 were studied.
TL;DR: In this article, the thermal conductivity of α-SiC was measured as a function of temperature and annealing temperature, and it appeared that such an approach is reliable to estimate thermal conductivities of ceramics under neutron irradiation.
TL;DR: In this paper, thin-film CdS (300-400nm) was deposited onto p-GaAs with low-temperature pulsed-laser deposition (PLD) using 532-nm emission of a Nd:YAG laser (6n, 10n).
TL;DR: In this article, the effects of temperature on helium implanted SiC were investigated through X-ray diffraction measurements, where dynamic annealing was shown to take place in the near surface region and formation of a thin and deep highly strained region.
TL;DR: In this paper, the contribution of non-thermal processes to laser-induced vaporization of soot was investigated, and it was shown that the vibrational and rotational energy distributions of the nascent C2(d 3Πg) and C3(A 1Πu) depend strongly on laser wavelength and are not in local thermodynamic equilibrium with the soot.
Abstract: In order to investigate the contribution of non-thermal processes to laser-induced vaporization of soot, we have recorded temporally and spectrally resolved emission from C2(d 3Πg–a 3Πu; Swan system) and C3(A 1Πu–X ; Swings system) following laser irradiation of soot at 532 and 1064 nm over a wide range of laser fluences. We compared the measured spectra with simulated spectra from C2-Swan and C3-Swings emission to gain new insight into the formation mechanism of the excited species. This comparison shows that the vibrational and rotational energy distributions of the nascent C2(d 3Πg) and C3(A 1Πu) depend strongly on laser wavelength and are not in local thermodynamic equilibrium with the soot. These results suggest non-thermal ejection of highly excited C2(d 3Πg) and C3(A 1Πu) from the particle surface. Multi-photon laser-induced fluorescence from thermally sublimed C2(a 3Πu) and C3(X ) is unlikely to be the source of the observed emission. This work provides fluence thresholds at 532 and 1064 nm for th...
TL;DR: The biocompatibility of the PAni nanofibers is also found to increase with increasing irradiation fluence, indicating the possibility of employing swift heavy ion irradiation as an effective technique in order to modify conducting polymer nanostructures for biomedical applications.
Abstract: Polyaniline (PAni) nanofibers doped with HCl and CSA have been irradiated with 90 MeV O7 + ions with fluence of 3 × 1010, 3 × 1011 and 1 × 1012 ions cm − 2. TEM micrographs show a decrease in the fiber diameter with increasing irradiation fluence, which has been explained on the basis of the Coulomb explosion model. XRD analysis reveals a decrease in the crystalline domain length and an increase in the strain. The increase in d-spacing for the (100) reflection with increasing irradiation fluence is ascribed to the increase in the tilt angle of the polymer chain, which is also evident from micro-Raman spectra. UV–vis spectra of the PAni nanofibers exhibit blue-shift in the absorption bands attributed to π–π* band transitions indicating a reduction in particle size after SHI irradiation; as also observed in TEM micrographs. Micro-Raman spectra also reveal a transition from the benzenoid to quinoid structures in the PAni chain as the fluence is increased. Although the quinoid unit has no hydrogen for DPPH scavenging, the antioxidant activity of PAni nanofibers is found to increase with increasing fluence. This has been attributed to the availability of more reaction sites as a result of fragmentation of the PAni nanofibers which compensates for the benzenoid to quinoid transition after irradiation. The biocompatibility of the PAni nanofibers is also found to increase with increasing irradiation fluence, indicating the possibility of employing swift heavy ion irradiation as an effective technique in order to modify conducting polymer nanostructures for biomedical applications.
TL;DR: In this paper, the surface modification of titanium based implant Ti6Al4V induced by an Nd:YAG laser operating at a wavelength of 266nm, with pulses of 40ps, is presented.
TL;DR: In this article, histopathologic features of a punctate hypopigmentation that occurred after several sessions of 1,064-nm QSNY with low-fluence therapy were evaluated.
Abstract: Melasma is a common pigmentary disorder in Asian populations. Recently, treatment using 1,064-nm Qswitched neodymium-doped yttrium aluminum garnet laser (QSNY) with low fluence has been reported to be effective for Asian patients with melasma, but this treatment modality can rarely induce punctate hypopigmentation, and histopathology of the lesion has not been evaluated so far. In this report, we would like to demonstrate histopathologic features of a punctate hypopigmentation that occurred after several sessions of 1,064-nm QSNY with low-fluence therapy.
21 Nov 2010-Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment
TL;DR: In this article, the Frascati Neutron Generator on silicon Photo-Multipliers was used to test the hardness of the detectors built from a square matrix of avalanche photo-diodes on a silicon substrate.
Abstract: Radiation hardness tests were performed at the Frascati Neutron Generator on silicon Photo-Multipliers that were made of semiconductor photon detectors built from a square matrix of avalanche photo-diodes on a silicon substrate. Several samples from different manufacturers have been irradiated, integrating up to 7×1010 1-MeV-equivalent neutrons per cm2. Detector performance was recorded during the neutron irradiation, and a gradual deterioration of their properties began after an integrated fluence of the order of 108 1-MeV-equivalent neutrons per cm2 was reached.
TL;DR: In this article, shadowgraphs of dynamic processes outside and inside transparent target during the intense femtosecond laser ablation of silica glass are recorded, and two material ejections outside the target and two corresponding stress waves inside the target are observed at different energy fluences.
Abstract: Shadowgraphs of dynamic processes outside and inside transparent target during the intense femtosecond laser ablation of silica glass are recorded. Two material ejections outside the target and two corresponding stress waves inside the target are observed at different energy fluences. In particular, a third stress wave can be observed at energy fluence as high as 40 J/cm2. The first wave is a thermoelastic wave, while the second and the third may be generated subsequently by the mechanical expansions. In addition, the magnitudes of the three stress waves decrease sequentially based on our analysis.
TL;DR: In this paper, an improved two-temperature model to describe femtosecond laser ablation of metal targets was presented, where the temperature-dependent heat capacity and thermal conductivity of the electron, as well as electron temperature dependent absorption coefficient and absorptivity were all considered in this two-time temperature model.
Abstract: An improved two-temperature model to describe femtosecond laser ablation of metal target was presented. The temperature-dependent heat capacity and thermal conductivity of the electron, as well as electron temperature-dependent absorption coefficient and absorptivity are all considered in this two-temperature model. The tailored two-temperature model is solved using a finite difference method for copper target. The time-dependence of lattice and electron temperature of the surface for different laser fluence are performed, respectively. The temperature distribution of the electron and lattice along with space and time for a certain laser fluence is also presented. Moreover, the variation of ablation rate per pulse with laser fluence is obtained. The satisfactory agreement between our numerical results and experimental data indicates that the temperature dependence of heat capacity, thermal conductivity, absorption coefficient and absorptivity in femtosecond laser ablation of metal target must not be neglected. The present model will be helpful for the further experimental investigation of application of the femtosecond laser.
TL;DR: In this paper, a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET) and the surface morphology of polymer samples after irradiation was investigated using an X-ray photoelectron spectroscopy.
Abstract: Extreme ultraviolet (EUV) radiation is the electromagnetic radiation ranging from vacuum ultraviolet to soft X-rays. A single EUV photon carries enough energy to ionize any atom or molecule. The penetration depth of the radiation in any material is very short, ranging from tens to hundreds nanometers. Intense EUV pulses can remove material from the surface or modify its morphology or/and chemical structure. In this work, the radiation from a laser-plasma EUV source based on a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET). The PET samples were irradiated with the EUV pulses emitted from krypton plasma and focused with a gold-plated ellipsoidal collector. The spectrum of the focused radiation covered the wavelength range from 9 to 70 nm. The PET samples were irradiated for 1 s–2 min at a 10-Hz repetition rate. Surface morphology of polymer samples after irradiation was investigated using a scanning electron microscope. Changes in chemical surface structure of the irradiated samples were investigated using an X-ray photoelectron spectroscopy. Different kinds of surface microstructures were obtained depending on the EUV fluence in a single pulse and the total EUV fluence. XPS measurements also revealed a modification of the chemical structure.