Showing papers on "Focused ion beam published in 2008"
TL;DR: A review of the state of the art and level of understanding of direct ion and electron beam fabrication and point out some of the unsolved problems can be found in this article, where the authors also discuss structures that are made for research purposes or for demonstration of the processing capabilities.
Abstract: Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer range. Since the beams can be used to locally alter material at the point where they are incident on a surface, they represent direct nanofabrication tools. The authors will focus here on direct fabrication rather than lithography, which is indirect in that it uses the intermediary of resist. In the case of both ions and electrons, material addition or removal can be achieved using precursor gases. In addition ions can also alter material by sputtering (milling), by damage, or by implantation. Many material removal and deposition processes employing precursor gases have been developed for numerous practical applications, such as mask repair, circuit restructuring and repair, and sample sectioning. The authors will also discuss structures that are made for research purposes or for demonstration of the processing capabilities. In many cases the minimum dimensions at which these processes can be realized are considerably larger than the beam diameters. The atomic level mechanisms responsible for the precursor gas activation have not been studied in detail in many cases. The authors will review the state of the art and level of understanding of direct ion and electron beam fabrication and point out some of the unsolved problems.
941 citations
TL;DR: In this paper, the effect of sample size on deformation behavior was investigated on columns with diameters between 8μm and 140nm, fabricated from sputtered amorphous Pd77Si23 films on Si substrates by focused ion beam machining.
Abstract: Uniaxial compression tests were performed on micron-sized columns of amorphous PdSi to investigate the effect of sample size on deformation behavior. Cylindrical columns with diameters between 8μm and 140nm were fabricated from sputtered amorphous Pd77Si23 films on Si substrates by focused ion beam machining and compression tests were performed with a nanoindenter outfitted with a flat diamond punch. The columns exhibited elastic behavior until they yielded by either shear band formation on a plane at 50° to the loading axis or by homogenous deformation. Shear band formation occurred only in columns with diameters larger than 400nm. The change in deformation mechanism from shear band formation to homogeneous deformation with decreasing column size is attributed to a required critical strained volume for shear band formation.
409 citations
TL;DR: In this paper, a cost-effective and fast synthesis route for ZnO one-dimensional nanorod using an aqueous-based approach in a reactor was reported.
320 citations
TL;DR: In this article, the authors reported on the experimental investigation of the high-temperature electrical resistance of graphene and fabricated the test structures were fabricated by using the focused ion beam from the single and bilayer graphene produced by mechanical exfoliation.
Abstract: The authors reported on the experimental investigation of the high-temperature electrical resistance of graphene. The test structures were fabricated by using the focused ion beam from the single and bilayer graphene produced by mechanical exfoliation. It was found that as temperature increases from 300to500K, the resistance of the single, and bilayer graphene interconnects drops down by 30% and 70%, respectively. The quenching and temperature dependence of the resistance were explained by the thermal generation of the electron-hole pairs and carrier scattering by acoustic phonons. The obtained results are important for the proposed graphene interconnect applications in integrated circuits.
238 citations
TL;DR: In this paper, the authors present a review of ion irradiation and implantation effects on pure magnetic patterning of micro-and nano structures, including the interlayer exchange coupling, the exchange bias effect, the magnetic damping behavior and the saturation magnetization to name a few.
234 citations
TL;DR: In this paper, the authors report their recent progress in the development, optimization, and application of a technique for the 3D high-resolution characterization of crystalline microstructures based on automated serial sectioning using a focused ion beam (FIB) and characterization of the sections by orientation microscopy based on electron backscatter diffraction (EBSD).
Abstract: In the present work, we report our recent progress in the development, optimization, and application of a technique for the three-dimensional (3-D) high-resolution characterization of crystalline microstructures. The technique is based on automated serial sectioning using a focused ion beam (FIB) and characterization of the sections by orientation microscopy based on electron backscatter diffraction (EBSD) in a combined FIB–scanning electron microscope (SEM). On our system, consisting of a Zeiss–Crossbeam FIB-SEM and an EDAX-TSL EBSD system, the technique currently reaches a spatial resolution of 100 · 100 · 100 nm 3 as a standard, but a resolution of 50 · 50 · 50 nm 3 seems to be a realistic optimum. The maximum observable volume is on the order of 50 · 50 · 50 lm 3 . The technique extends all the powerful features of two-dimensional (2-D) EBSD-based orientation microscopy into the third dimension of space. This allows new parameters of the microstructure to be obtained—for example, the full crystallographic characterization of all kinds of interfaces, including the morphology and the crystallographic indices of the interface planes. The technique is illustrated by four examples, including the characterization of pearlite colonies in a carbon steel, of twins in pseudonanocrystalline NiCo thin films, the description of deformation patterns formed under nanoindents in copper single crystals, and the characterization of fatigue cracks in an aluminum alloy. In view of these examples, we discuss the possibilities and limits of the technique. Furthermore, we give an extensive overview of parallel developments of 3-D orientation microscopy (with a focus on the EBSD-based techniques) in other groups.
209 citations
Patent•
17 Dec 2008TL;DR: In this article, a charged particle beam irradiation system is described, which includes a charging unit, scanning electromagnets, and a beam position measuring instrument for obtaining one or both of the position and the width of the beam scanned by the scanning electromagnetic sensors.
Abstract: The charged particle beam irradiation system includes a charged particle beam generating unit, scanning electromagnets, a beam irradiation apparatus, beam radiation dose measuring instrument(s), and a beam position measuring instrument for obtaining one or both of the position and the width of the beam scanned by the scanning electromagnets. The beam position measuring instrument obtains one or both of the position and the width of the beam for each irradiation spot and determines whether the obtained result is within an allowable range and obtains one or both of the position and the width of the charged particle beam for each split during irradiation to the spot with the charged particle beam regarding a split of which a dose is managed by dividing a part of or all of irradiation spots into irradiation sections and determines whether the obtained result is within an allowable range.
157 citations
TL;DR: In this paper, a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale superconducting quantum interference devices (SQUIDs) with magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2.
Abstract: Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.
144 citations
TL;DR: Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing nanoslits fabricated with a focused ion beam to prove the capability of stencil lithography for the fabrication of metallic nanowire on a full wafer scale.
Abstract: Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing nanoslits fabricated with a focused ion beam. The stencils were aligned and the nanowires deposited on a substrate with predefined electrical pads. The morphology and resistivity of the wires were studied. Nanowires down to 70 nm wide and 5 µm long have been achieved showing a resistivity of 10 µΩcm for Al and 5 µΩcm for Au and maximum current density of ∼10 8 A/cm 2 . This proves the capability of stencil lithography for the fabrication of metallic nanowires on
122 citations
TL;DR: This work demonstrates for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE), and focused ion beam (FIB) techniques.
Abstract: We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE) and focused ion beam (FIB) techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door to the fabrication of a diamond-based optical chip integrating functional elements such as X-crossings, Y-junctions, evanescent couplers, Bragg reflectors/couplers and various interferometers.
119 citations
TL;DR: It will be shown that a focused ion beam machine equipped with an in situ micromanipulator is an ideal tool to systematically prepare samples containing stress corrosion crack tips for 3D atom-probe tomography and transmission electron microscopy.
TL;DR: In this paper, a new electron beam lithography process was used to produce uniform arrays of subwavelength apertures with diameters in the range of 60-100nm.
Abstract: Metallic subwavelength apertures can be used in epi-illumination fluorescence to achieve focal volume confinement. Because of the near field components inherent to small metallic structures, observation volumes are formed that are much smaller than the conventional diffraction limited volume attainable by high numerical aperture far field optics (circa a femtoliter). Observation volumes in the range of 10−4fl have been reported previously. Such apertures can be used for single-molecule detection at relatively high concentrations (up to 20μM) of fluorophores. Here, we present a novel fabrication of metallic subwavelength apertures in the visible range. Using a new electron beam lithography process, uniform arrays of such apertures can be manufactured efficiently in large numbers with diameters in the range of 60–100nm. The apertures were characterized by scanning electron microscopy, optical microscopy, focused ion beam cross sections/transmission electron microscopy, and fluorescence correlation spectrosc...
TL;DR: In this paper, focused-ion-beam milling of a single-crystal Au surface was used to fabricate a 590-nm-long linear ridge that acts as a surface plasmon nanoresonator.
Abstract: We use focused-ion-beam milling of a single-crystal Au surface to fabricate a 590-nm-long linear ridge that acts as a surface plasmon nanoresonator. Cathodoluminescence imaging spectroscopy is then used to excite and image surface plasmons on the ridge. Principal component analysis reveals distinct plasmonic modes, which proves confinement of surface plasmon oscillations to the ridge. Boundary-element-method calculations confirm that a linear ridge is able to support highly localized surface plasmon modes (mode diameter <100 nm). The results demonstrate that focused-ion-beam milling can be used in rapid prototyping of nanoscale single-crystal plasmonic components.
TL;DR: In this paper, a periodic array of apertures with subwavelength dimensions and submicron periodicity was fabricated on gold-coated tips of silica optical fibers using focused ion beam (FIB) milling.
Abstract: Periodic arrays of apertures with subwavelength dimensions and submicron periodicity were fabricated on gold-coated tips of silica optical fibers using focused ion beam (FIB) milling. Interaction of light with subwavelength structures such as an array of nanoapertures in an optically thick metallic film leads to the excitation of surface plasmon waves at the interfaces of the metallic film and the surrounding media, thereby leading to a significant enhancement of light at certain wavelengths. The spectral position and magnitude of the peaks in the transmission spectra depend on the refractive index of the media surrounding metallic film containing the nanohole array. This lays the foundation for the development of fiber-optic chemical and biological sensors that sense the change in refractive index of the medium around the metallic film. This is demonstrated by testing the sensors with solutions of alcohols with different refractive indices and by the attachment of biomolecules to the sensor surface. The bulk refractive index sensitivity of these nanoaperture array-based sensors is shown to be higher than what has been typically reported for metallic nanoparticle-based plasmonic sensors.
TL;DR: In this paper, three different modes of cold spray impact were compared; aluminium particles onto a piezoelectric ceramic (PZT), aluminum particles onto copper, and deep penetration of copper particles into aluminium.
TL;DR: In this article, a single ZnO nanorod-based photodetector was fabricated using the in-situ lift-out technique in a focused ion beam (FIB/SEM) instrument and characterized.
Abstract: ZnO nanorods and nanowires are promising candidates as new types of high-sensitivity ultraviolet (UV) photodetectors due to their wide bandgap and large aspect ratio. In this study, single-crystalline ZnO nanorods were grown on glass substrates by a hydrothermal method. Specific structural, morphological, electrical, and optical measurements were carried out. A single ZnO nanorod-based photodetector was fabricated using the in-situ lift-out technique in a focused ion beam (FIB/SEM) instrument and characterized. With a source wavelength of 370 nm and an applied bias of 1 V, the responsivity of the ZnO nanorod is 30 mA/W. The single ZnO nanorod photodetector exhibits an ultraviolet (UV) photoresponse promising for potential applications as cost-effective UV detectors. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
TL;DR: In this paper, focused-ion-beam milling of a single-crystal Au surface was used to fabricate a 590-nm-long linear ridge that acts as a surface plasmon nanoresonator.
Abstract: We use focused-ion-beam milling of a single-crystal Au surface to fabricate a 590-nm-long linear ridge that acts as a surface plasmon nanoresonator. Cathodoluminescence imaging spectroscopy is then used to excite and image surface plasmons on the ridge. Principal component analysis reveals distinct plasmonic modes, which proves confinement of surface-plasmon oscillations to the ridge. Boundary-element-method calculations confirm that a linear ridge is able to support highly-localized surface-plasmon modes (mode diameter < 100 nm). The results demonstrate that focused-ion-beam milling can be used in rapid prototyping of nanoscale single-crystal plasmonic components.
TL;DR: In this paper, the authors explain the occurrence of ion exchange and an index profile around the focal point inside a commercial crown glass formed by femtosecond laser irradiation, which indicates that local densification occurred in the glass.
Abstract: We explain the occurrence of ion exchange and an index profile around the focal point inside a commercial crown glass formed by femtosecond laser irradiation. The index profile in the photoinduced area has a ring-shaped pattern, which indicates that local densification occurred in the glass. An irregular surface reflecting the density distribution is formed around the focal point by dry etching process using a focused ion beam. By the irradiation of femtosecond laser pulses, the effect of ion exchange between the focal point and the surrounding area is also observed in the area in which local densification occurred.
TL;DR: In this article, in situ microdiffraction experiments were conducted on focused ion beam machined single crystal Cu pillars oriented for double slip during deformation, the crystal undergoes lattice rotation on both the primary and critical slip system.
Abstract: In situ microdiffraction experiments were conducted on focused ion beam machined single crystal Cu pillars oriented for double slip. During deformation, the crystal undergoes lattice rotation on both the primary and critical slip system. In spite of the initial homogeneous microstructure of the Cu pillar, rotation sets in already at yield and is more important at the top of the pillar than at the bottom, demonstrating the inhomogeneous stress state during a microcompression experiment. The rotation results are confirmed by electron backscatter diffraction measurements.
TL;DR: The provision of osseointegration is not exclusively linked to a particular set of surface features if the implant surface character is a major factor in that process, and the studied methodology provides an effective tool to also analyze the interface between implant and surrounding bone.
Abstract: Background: Since osseointegration of the respective implant is claimed by all manufacturing companies, it is obvious that not just one specific surface profile including the chemistry controls bon ...
TL;DR: In this paper, a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300nm from the sample is presented. But their sensitivity is limited to ∼70 electron spins per root hertz at 4K.
Abstract: Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300nm from the sample. The 600nm–2μm pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of ∼70 electron spins per root hertz at 4K.
TL;DR: Use of high numerical aperture focusing with negative longitudinal spherical aberration is shown to enable deep (> microm), high aspect ratio, nano-scale-width holes to be machined into the surface of a fused-silica substrate with single pulses from a 200 fs, 4 microJ Ti-Sapphire laser source.
Abstract: Use of high numerical aperture focusing with negative longitudinal spherical aberration is shown to enable deep (> microm), high aspect ratio, nano-scale-width holes to be machined into the surface of a fused-silica (SiO(2)) substrate with single pulses from a 200 fs, 4 microJ Ti-Sapphire laser source. The depths of the nano-holes are characterized by use of a non-destructive acetate replication technique and are confirmed by imaging of sectioned samples with a dual focused ion beam/scanning electron microscope.
TL;DR: In this article, the tribological properties of a nano-patterned Si surface have been investigated in ambient condition by atomic force microscopy (AFM), where the pattern, consisting of parallel grooves, was realized on a Si(0,0,1) single crystal via focused ion beam (FIB) milling.
TL;DR: The morphology and structure of the weld interface in magnetic pulse welding of similar and dissimilar metals were investigated in this paper, where extensive characterisation techniques were used, including the focused ion beam (FIB) method, to prepare a cross-section of the Al-Mg interface for TEM characterisation.
Abstract: The morphology and structure of the weld interface in magnetic pulse welding of similar and dissimilar metals were investigated. The interface zone of dissimilar metal couples such as Al–Mg, was studied in comparison to Al–Al welds. It was found that intermetallic phases (IMP) of different compositions are created during welding of the Al–Mg couple by rapid solidification of a thin melted layer at the interface. According to the calculated energy balance of magnetic pulse welding (MPW), there is enough energy to melt a thin interfacial layer and create IMP. Intensive characterisation techniques were used, including the focused ion beam (FIB) method that was used to prepare a cross-section of the Al–Mg interface for TEM characterisation. It was established that the jet action plays an important role in the melting process at the bonding zone.
TL;DR: In this article, focused ion beam (FIB) fabrication of fiber optic sensors, mainly chemical sensors, which are based on plasmonics-active nanostructures formed on the cleaved tips of optical fibers, is reported.
Abstract: Focused ion beam (FIB) fabrication of fiber optic sensors, mainly chemical sensors, which are based on plasmonics-active nanostructures formed on the cleaved tips of optical fibers, is reported. The nanostructures fabricated included nanoholes in optically thick metallic films as well as metallic nanopillars and nanorods. The sensing mechanism is based on detecting shifts in surface plasmon resonances (SPRs) associated with nanoholes in metallic films and localized SPRs of metallic nanopillars and nanorods, when the refractive index of the medium surrounding the nanostructures is changed. These sensors can be employed for the detection of chemical agents in air as well as liquid media surrounding the sensors. FIB milling was employed to fabricate ordered arrays of nanoholes in optically thick (100–240nm) metallic films deposited on cleaved end faces of multimode, four-mode, and single-mode optical fibers. Separately, metallic nanorods and nanopillars were formed by first depositing a metallic (gold or sil...
TL;DR: In this article, the effects of parameters including working pressure, RIE power, and ICP power on congruent LiNbO3 single crystals were investigated and analyzed by measurement of etching depth, selectivity, uniformity, etched surface state, and sidewall profile by means of focused ion beam etching, energy-dispersive x-ray analysis, secondary ion mass spectroscopy, scanning electron microscopy, and surface profilometry.
Abstract: The etching characteristics of congruent LiNbO3 single crystals including doped LiNbO3 and proton-changed LiNbO3 have been studied in reactive ion etching (RIE) and inductively coupled plasma (ICP) etching tools, using different recipes of gas mixtures. The effects of parameters including working pressure, RIE power, and ICP power are investigated and analyzed by measurement of etching depth, selectivity, uniformity, etched surface state, and sidewall profile by means of focused ion beam etching, energy-dispersive x-ray analysis, secondary ion mass spectroscopy, scanning electron microscopy, and surface profilometry. The effects of a sample carrier wafer coating have also been investigated. Optimized processes with high etching rates, good mask selectivity, and a near-vertical profile have been achieved. Ridge waveguides on proton-exchanged LiNbO3 have been fabricated and optically measured.
TL;DR: Sub-100-nm magnetic dots embedded in a non-magnetic matrix are controllably generated by selective ion irradiation of paramagnetic Fe(60)Al(40) (atomic %) alloys, taking advantage of the disorder-induced magnetism in this material.
Abstract: Sub-100-nm magnetic dots embedded in a non-magnetic matrix are controllably generated by selective ion irradiation of paramagnetic Fe(60)Al(40) (atomic %) alloys, taking advantage of the disorder-induced magnetism in this material. The process is demonstrated by sequential focused ion beam irradiation and by in-parallel broad-beam ion irradiation through lithographed masks. Due to the low fluences used, this method results in practically no alteration of the surface roughness. The dots exhibit a range of magnetic properties depending on the size and shape of the structures, with the smallest dots (<100 nm) having square hysteresis loops with coercivities in excess of micro(0)H(C) = 50 mT. Importantly, the patterning can be fully removed by annealing. The combination of properties induced by the direct magnetic patterning is appealing for a wide range of applications, such as patterned media, magnetic separators, or sensors.
Patent•
23 Apr 2008TL;DR: An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a charged particle beam processor capable of reducing the time it takes to fill up a processed hole with a high degree of flatness at the filled area as discussed by the authors.
Abstract: An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a charged particle beam processor capable of reducing the time it takes to fill up a processed hole with a high degree of flatness at the filled area. The observation device is capable of switching the kind of gas ion beam used for machining a sample with the kind of a gas ion beam used for observing the sample. To implement the switch between the kind of a gas ion beam used for sample machining and the kind of a gas ion beam used for sample observation, at least two gas introduction systems are used, each system having a gas cylinder a gas tube, a gas volume control valve, and a stop valve.
TL;DR: The morphological evolution of a GaAs surface induced by a focused ion beam (FIB) has been investigated by in situ electron microscopy and the ratio of wavelength to the droplet diameter predicted is in excellent agreement with experimental observations.
Abstract: The morphological evolution of a GaAs surface induced by a focused ion beam (FIB) has been investigated by in situ electron microscopy. Under off-normal bombardment without sample rotation, Ga droplets with sizes from 70 to 25 nm in diameter on the GaAs surface can self-assemble into a highly ordered hexagonal pattern instead of Ostwald ripening or coalescence. The mechanism relies on a balance between anisotropic loss of atoms on the surface of droplets due to sputtering and an anisotropic supply of atoms on the substrate surface due to preferential sputtering of As. The ratio of wavelength to the droplet diameter predicted by this model is in excellent agreement with experimental observations.
15 Nov 2008-Materials Science and Engineering A-structural Materials Properties Microstructure and Processing
TL;DR: Active brazing is an effective technique for joining diamond or cBN grit to metallic substrates as discussed by the authors, which is currently used to manufacture superabrasive, high-performance tools.
Abstract: Active brazing is an effective technique for joining diamond or cBN grit to metallic substrates. This technique is currently used to manufacture superabrasive, high-performance tools. The investigation of interface reactions between diamond and active brazing alloys plays an important role in understanding and improving the brazing process and the resultant tool performance. Focused ion beam (FIB) milling enabled the high resolution investigation of these extremely difficult to prepare metal–diamond joints. The interfacial nanostructure is characterized by the formation of two layers of TiC with different morphologies. First a cuboidal layer forms directly on the diamond and reaches a thickness of approximately 70 nm. Then a second layer with columnar TiC crystals grows on the first layer into the brazing filler metal by a diffusion-controlled process. The combined thickness of both TiC layers varies between 50 nm and 600 nm depending on the brazing temperature and holding time.