Showing papers on "Focused ion beam published in 2022"

Mussel-Inspired Polynorepinephrine/MXene-Based Magnetic Nanohybrid for Electromagnetic Interference Shielding in X-Band and Strain-Sensing Performance.

Abstract: The current work delivers preparation of MXene-based magnetic nanohybrid coating for flexible electronic applications. Herein, we report carbon dot-triggered photopolymerized polynorepinepherene (PNE)-coated MXene and iron oxide hybrid deposited on the cellulose microporous membrane via a vacuum-assisted filtration strategy. The surface morphologies have been monitored by scanning electron microscopy analysis, and the coating thickness was evaluated by the gallium-ion-based focused ion beam method. Coated membranes have been tested against uniaxial tensile stretching and assessed by their fracture edges in order to assure flexibility and mechanical strength. Strain sensors and electromagnetic interference (EMI) shielding have both been tested on the material because of its electrical conductivity. The bending strain sensitivity has been stringent because of their fast 'rupture and reform' percolation network formation on the coated surface. Increased mechanical strength, solvent tolerance, cyclic deformation tolerance, and EMI shielding performance were achieved by decreasing interstitial membrane porosity. Considering a possible application, the membrane also has been tested against simulated static and dynamic water flow conditions that could infer its excellent robustness which also has been confirmed by elemental analysis via ICP-MS. Thus, as of nurturing the works of the literature, it could be believed that the developed material will be an ideal alternative of flexible lightweight cellulose for versatile electronic applications.

Investigation of interface microstructure and properties of copper/304 stainless steel fabricated by explosive welding

Abstract: Explosive welding is a solid state welding process that is used for the metallurgical joining of two or more dissimilar metals. This paper presented a systematic study of microstructure and properties of copper/304 stainless steel fabricated by explosive welding. The microstructure and chemical composition were evaluated using Scanning Electron Microscope (SEM) and Transmission Electron Microscope (TEM). The properties were performed by the nanoindentation tests and bending experiments of the microcantilevers, and the microcantilevers were milled out using the Focused Ion Beam (FIB) system. The results showed that the interface between this couple metals presents a typical wavy structure. There are some vortex regions in front of the crest, which are strong intermixing of this couple metals. The diffusion layer and melting layer are two typical layers at the interface. The diffusion layers are formed by strongly collision points, while the melting layers only appear on the stainless steel side. The average nanohardnesses of diffusion layer and melting layer are between that of copper and 304 stainless steel. The nanohardness of this couple metals exhibits increasing trend from 0° to 60°, while decreasing trend from 60° to 90°. The nanohardness in Area 4 of the vortex region is highest, where is the highest temperature. The average flexural strength of micro-cantilevers shows the same change rules with the nanohardness.

Cryogenic Focused Ion Beam Enables Atomic-Resolution Imaging of Local Structures in Highly Sensitive Bulk Crystals and Devices

Abstract: With the development of ultralow-dose (scanning) transmission electron microscopy ((S)TEM) techniques, atomic-resolution imaging of highly sensitive nanomaterials has recently become possible. However, applying these techniques to the study of sensitive bulk materials remains challenging due to the lack of suitable specimen preparation methods. We report that cryogenic focused ion beam (cryo-FIB) can provide a solution to this challenge. We successfully extracted thin specimens from metal–organic framework (MOF) crystals and a hybrid halide perovskite single-crystal film solar cell using cryo-FIB without damaging the inherent structures. The high quality of the specimens enabled the subsequent (S)TEM and electron diffraction studies to reveal complex unknown local structures at an atomic resolution. The obtained structural information allowed us to resolve planar defects in MOF HKUST-1, three-dimensionally reconstruct a concomitant phase in MOF UiO-66, and discover a new CH3NH3PbI3 structure and locate its distribution in a single-crystal film perovskite solar cell. This proof-of-concept study demonstrates that cryo-FIB has a unique ability to handle highly sensitive materials, which can substantially expand the range of applications for electron microscopy.

Engineering Optically Active Defects in Hexagonal Boron Nitride Using Focused Ion Beam and Water

Abstract: Hexagonal boron nitride (hBN) has emerged as a promising material platform for nanophotonics and quantum sensing, hosting optically active defects with exceptional properties such as high brightness and large spectral tuning. However, precise control over deterministic spatial positioning of emitters in hBN remained elusive for a long time, limiting their proper correlative characterization and applications in hybrid devices. Recently, focused ion beam (FIB) systems proved to be useful to engineer several types of spatially defined emitters with various structural and photophysical properties. Here we systematically explore the physical processes leading to the creation of optically active defects in hBN using FIB and find that beam-substrate interaction plays a key role in the formation of defects. These findings are confirmed using transmission electron microscopy, which reveals local mechanical deterioration of the hBN layers and local amorphization of ion beam irradiated hBN. Additionally, we show that, upon exposure to water, amorphized hBN undergoes a structural and optical transition between two defect types with distinctive emission properties. Moreover, using super-resolution optical microscopy combined with atomic force microscopy, we pinpoint the exact location of emitters within the defect sites, confirming the role of defected edges as primary sources of fluorescent emission. This lays the foundation for FIB-assisted engineering of optically active defects in hBN with high spatial and spectral control for applications ranging from integrated photonics, to nanoscale sensing, and to nanofluidics.

A 3D Network of Nanochannels for Possible Ion and Molecule Transit in Mineralizing Bone and Cartilage

Abstract: During crucial growth stages of vertebrate long bones, calcified cartilage beneath the growth plate is anchored to bone by a third mineralized component, the cement line. Proper skeletal development is contingent on the interplay of these three constituents, yet their mineralization processes and structural interactions are incompletely understood, in part from limited knowledge of their meso- and nanoscale features. Herein, focused ion beam-scanning electron microscopy (FIB-SEM) with serial surface imaging is applied to examine the cartilage–bone interface of mouse femoral heads at an unprecedented scale: FIB-SEM provides 3D, nanometer resolution of structural details for volumes encompassing metaphyseal calcified cartilage, bone, and the intervening cement line. A novel and complex structural network is revealed, comprising densely packed nanochannels smaller than bone canaliculi (≈10–50 nm diameter) within the calcified cartilage and bone extracellular matrices, but absent in the cement line. A structural correlation is demonstrated between the nanochannels and ellipsoidal mineral domains, which appear to coalesce during mineralization in a process analogous to powder sintering in metallurgy. A mineralization process is proposed, supported by energy-dispersive X-Ray spectroscopy of nanochannel contents, in which these unreported structures offer ion and molecule conduits to access the extracellular matrices of calcified cartilage and bone.

High-Resolution Numerical Simulation of Microfiltration of Oil-in-Water Emulsion Permeating through a Realistic Membrane Microporous Structure Generated by Focused Ion Beam Scanning Electron Microscopy Images.

Abstract: Owing to the limitations of visualization techniques in experimental studies and low-resolution numerical models based on computational fluid dynamics (CFD), the detailed behavior of oil droplets during microfiltration is not well understood. Hence, a high-resolution CFD model based on an in-house direct numerical simulation (DNS) code was constructed in this study to analyze the detailed dynamics of an oil-in-water (O/W) emulsion using a microfiltration membrane. The realistic microporous structure of commercial ceramic microfiltration membranes (mullite and α-alumina membranes) was obtained using an image processing technique based on focused ion beam scanning electron microscopy (FIB-SEM). Numerical simulations of microfiltration of O/W emulsions on the membrane microstructure obtained by FIB-SEM were performed, and the effects of different parameters, including contact angle, transmembrane pressure, and membrane microporous structure, on filtration performance were studied. Droplet deformation had a strong impact on filtration behavior because coalesced droplets with diameters larger than the pore diameter permeated the membrane pores. The permeability, oil hold-up fraction inside the pores, and rejection were considerably influenced by the contact angle, while the transmembrane pressure had a little impact on the permeability and oil hold-up fraction. The membrane structure, especially the pore size distribution, also had a significant effect on the microfiltration behavior and performance.

Advanced preparation of plan-view specimens on a MEMS chip for in situ TEM heating experiments

Abstract: In situ transmission electron microscopy (TEM) is a powerful tool for advanced material characterization. It allows real-time observation of structural evolution at the atomic level while applying different stimuli such as heat. However, the validity of analysis strongly depends on the quality of the specimen, which has to be prepared by thinning the bulk material to electron transparency while maintaining the pristine properties. To address this challenge, a novel method of TEM samples preparation in plan-view geometry was elaborated based on the combination of the wedge polishing technique and an enhanced focused ion beam (FIB) workflow. It involves primary mechanical thinning of a broad sample area from the backside followed by FIB-assisted installation on the MEMS-based sample carrier. The complete step-by-step guide is provided, and the method’s concept is discussed in detail making it easy to follow and adapt for diverse equipment. The presented approach opens the world of in situ TEM heating experiments for a vast variety of fragile materials. The principle and significant advantage of the proposed method are demonstrated by new insights into the stability and thermal-induced strain relaxation of Ge Stranski–Krastanov islands on Si during in situ TEM heating. Graphical abstract

Advanced preparation of plan-view specimens on a MEMS chip for in situ TEM heating experiments

Abstract: In situ transmission electron microscopy (TEM) is a powerful tool for advanced material characterization. It allows real-time observation of structural evolution at the atomic level while applying different stimuli such as heat. However, the validity of analysis strongly depends on the quality of the specimen, which has to be prepared by thinning the bulk material to electron transparency while maintaining the pristine properties. To address this challenge, a novel method of TEM samples preparation in plan-view geometry was elaborated based on the combination of the wedge polishing technique and an enhanced focused ion beam (FIB) workflow. It involves primary mechanical thinning of a broad sample area from the backside followed by FIB-assisted installation on the MEMS-based sample carrier. The complete step-by-step guide is provided, and the method’s concept is discussed in detail making it easy to follow and adapt for diverse equipment. The presented approach opens the world of in situ TEM heating experiments for a vast variety of fragile materials. The principle and significant advantage of the proposed method are demonstrated by new insights into the stability and thermal-induced strain relaxation of Ge Stranski–Krastanov islands on Si during in situ TEM heating.

Tuning carrier density and phase transitions in oxide semiconductors using focused ion beams

Abstract: Abstract We demonstrate spatial modification of the optical properties of thin-film metal oxides, zinc oxide (ZnO) and vanadium dioxide (VO2) as representatives, using a commercial focused ion beam (FIB) system. Using a Ga+ FIB and thermal annealing, we demonstrated variable doping of a wide-bandgap semiconductor, ZnO, achieving carrier concentrations from 1018 cm−3 to 1020 cm−3. Using the same FIB without subsequent thermal annealing, we defect-engineered a correlated semiconductor, VO2, locally modifying its insulator-to-metal transition (IMT) temperature by up to ∼25 °C. Such area-selective modification of metal oxides by direct writing using a FIB provides a simple, mask-less route to the fabrication of optical structures, especially when multiple or continuous levels of doping or defect density are required.

Cryo-plasma FIB/SEM volume imaging of biological specimens

Abstract: Serial focussed ion beam scanning electron microscopy (FIB/SEM) enables imaging and assessment of sub-cellular structures on the mesoscale (10 nm to 10 μm). When applied to vitrified samples, serial FIB/SEM is also a means to target specific structures in cells and tissues while maintaining constituents’ hydration shells for in-situ structural biology downstream. However, the application of serial FIB/SEM imaging of non-stained cryogenic biological samples is limited due to low contrast, curtaining and charging artefacts. We address these challenges using a cryogenic plasma FIB/SEM (cryo-pFIB/SEM). We evaluated the choice of plasma ion source and imaging regimes to produce high quality SEM images of a range of different biological samples. Using an automated workflow we produced three dimensional volumes of bacteria, human cells, and tissue, and calculated estimates for their resolution, typically achieving 20 to 50 nm. Additionally, a tag-free tool is needed to drive the application of in situ structural biology towards tissue. The combination of serial FIB/SEM with plasmabased ion sources promises a framework for targeting specific features in bulk-frozen samples (>100 μm) to produce lamella for cryogenic electron tomography.

A Preparative Mass Spectrometer to Deposit Intact Large Native Protein Complexes

Abstract: Electrospray ion-beam deposition (ES-IBD) is a versatile tool to study the structure and reactivity of molecules from small metal clusters to large protein assemblies. It brings molecules gently into the gas phase, where they can be accurately manipulated and purified, followed by controlled deposition onto various substrates. In combination with imaging techniques, direct structural information on well-defined molecules can be obtained, which is essential to test and interpret results from indirect mass spectrometry techniques. To date, ion-beam deposition experiments are limited to a small number of custom instruments worldwide, and there are no commercial alternatives. Here we present a module that adds ion-beam deposition capabilities to a popular commercial MS platform (Thermo Scientific Q Exactive UHMR mass spectrometer). This combination significantly reduces the overhead associated with custom instruments, while benefiting from established high performance and reliability. We present current performance characteristics including beam intensity, landing-energy control, and deposition spot size for a broad range of molecules. In combination with atomic force microscopy (AFM) and transmission electron microscopy (TEM), we distinguish near-native from unfolded proteins and show retention of the native shape of protein assemblies after dehydration and deposition. Further, we use an enzymatic assay to quantify the activity of a noncovalent protein complex after deposition on a dry surface. Together, these results not only indicate a great potential of ES-IBD for applications in structural biology, but also outline the challenges that need to be solved for it to reach its full potential.

A robust approach for MicroED sample preparation of lipidic cubic phase embedded membrane protein crystals

Abstract: Abstract Crystallizing G protein-coupled receptors (GPCRs) in lipidic cubic phase (LCP) often yields crystals suited for the cryogenic electron microscopy (cryoEM) method microcrystal electron diffraction (MicroED). However, sample preparation is challenging. Embedded crystals cannot be targeted topologically. Here, we use an integrated fluorescence light microscope (iFLM) inside of a focused ion beam and scanning electron microscope (FIB-SEM) to identify fluorescently labeled GPCR crystals. Crystals are targeted using the iFLM and LCP is milled using a plasma focused ion beam (pFIB). The optimal ion source for preparing biological lamellae is identified using standard crystals of proteinase K. Lamellae prepared using either argon or xenon produced the highest quality data and structures. MicroED data are collected from the milled lamellae and the structures are determined. This study outlines a robust approach to identify and mill membrane protein crystals for MicroED and demonstrates plasma ion-beam milling is a powerful tool for preparing biological lamellae.

Recent Advances in Gas Injection System-Free Cryo-FIB Lift-Out Transfer for Cryo-Electron Tomography of Multicellular Organisms and Tissues

Abstract: Cryo-electron tomography (cryo-ET) enables visualization of protein complexes within their native cellular environment at molecular resolution. Most cells and all tissues, however, are too thick to be imaged directly by transmission electron microscopy (TEM). Overcoming this limitation requires the production of thin biological sections called lamellae. The procedure to obtain lamellae of cells, either seeded or grown directly on electron microscopy grids, requires cryo-focused ion beam (cryo-FIB) milling to thin the samples. This method faces an additional challenge when dealing with tissues and multicellular organisms, as these samples must be high-pressure frozen, which embeds the sample in a thick layer of ice. Nonetheless, lamellae can still be prepared from such samples by extracting a small volume and transferring it to a receiver grid for lamella preparation, a process called lift-out. Here, we describe the available workflows to produce lamellae by lift-out at cryogenic conditions and recent developments in gas injection system (GIS)-free approaches to the lift-out transfer. These advances expand the applications of cryo-ET, enabling the investigation of tissues and whole organisms in situ at molecular resolution.

Optical emission from focused ion beam milled halide perovskite device cross‐sections

Abstract: Cross‐sectional transmission electron microscopy has been widely used to investigate organic–inorganic hybrid halide perovskite‐based optoelectronic devices. Electron‐transparent specimens (lamellae) used in such studies are often prepared using focused ion beam (FIB) milling. However, the gallium ions used in FIB milling may severely degrade the structure and composition of halide perovskites in the lamellae, potentially invalidating studies performed on them. In this work, the close relationship between perovskite structure and luminescence is exploited to examine the structural quality of perovskite solar cell lamellae prepared by FIB milling. Through hyperspectral cathodoluminescence (CL) mapping, the perovskite layer was found to remain optically active with a slightly blue‐shifted luminescence. This finding indicates that the perovskite structure is largely preserved upon the lamella fabrication process although some surface amorphisation occurred. Further changes in CL due to electron beam irradiation were also recorded, confirming that electron dose management is essential in electron microscopy studies of carefully prepared halide perovskite‐based device lamellae.

Engineering high quality graphene superlattices via ion milled ultra-thin etching masks

Abstract: Abstract Nanofabrication research pursues the miniaturization of patterned feature size. In the current state of the art, micron scale areas can be patterned with features down to ~30 nm pitch using electron beam lithography. Here, we demonstrate a nanofabrication technique which allows patterning periodic structures with a pitch down to 16 nm. It is based on focused ion beam milling of suspended membranes, with minimal proximity effects typical to standard electron beam lithography. The membranes are then transferred and used as hard etching masks. We benchmark our technique by electrostatically inducing a superlattice potential in graphene and observe bandstructure modification in electronic transport. Our technique opens the path towards the realization of very short period superlattices in 2D materials, but with the ability to control lattice symmetries and strength. This can pave the way for a versatile solid-state quantum simulator platform and the study of correlated electron phases.

Uncovering the morphological effects of high-energy Ga+ focused ion beam milling on hBN single-photon emitter fabrication.

Abstract: Many techniques to fabricate complex nanostructures and quantum emitting defects in low dimensional materials for quantum information technologies rely on the patterning capabilities of focused ion beam (FIB) systems. In particular, the ability to pattern arrays of bright and stable room temperature single-photon emitters (SPEs) in 2D wide-bandgap insulator hexagonal boron nitride (hBN) via high-energy heavy-ion FIB allows for direct placement of SPEs without structured substrates or polymer-reliant lithography steps. However, the process parameters needed to create hBN SPEs with this technique are dependent on the growth method of the material chosen. Moreover, morphological damage induced by high-energy heavy-ion exposure may further influence the successful creation of SPEs. In this work, we perform atomic force microscopy to characterize the surface morphology of hBN regions patterned by Ga+ FIB to create SPEs at a range of ion doses and find that material swelling, and not milling as expected, is most strongly and positively correlated with the onset of non-zero SPE yields. Furthermore, we simulate vacancy concentration profiles at each of the tested doses and propose a qualitative model to elucidate how Ga+ FIB patterning creates isolated SPEs that is consistent with observed optical and morphological characteristics and is dependent on the consideration of void nucleation and growth from vacancy clusters. Our results provide novel insight into the formation of hBN SPEs created by high-energy heavy-ion milling that can be leveraged for monolithic hBN photonic devices and could be applied to a wide range of low-dimensional solid-state SPE hosts.

Micromanufacturing of Geometrically and Dimensionally Precise Molecular Single‐Crystal Photonic Microresonators via Focused Ion Beam Milling

Abstract: Highly reproducible manufacturing of organic optical crystals with well‐defined geometry and dimension is important to realize industrially relevant all‐organic microelectronic and nanophotonic components and photonic integrated circuits. Here, programmed shape and size alteration of square‐shaped perylene crystal resonators into circular disk and rectangular geometries is demonstrated using the focused‐ion‐beam milling technique. The fabricated smaller sized circular disk and rectangular crystal resonators display shape‐ and size‐dependent optical modes. Due to generality and high reproducibility, this processing technique can be also extended to other organic crystals to create optical components suitable for commercial nanophotonic device applications.

A cryogenic, coincident fluorescence, electron and ion beam microscope

Abstract: Cryogenic electron tomography (cryo-ET) combined with sub-tomogram averaging, allows in-situ visualization and structure determination of macromolecular complexes at sub-nanometre resolution. Cryogenic focused ion beam (cryo-FIB) micromachining is used to prepare a thin lamella-shaped sample out of a frozen-hydrated cell for cryo-ET imaging, but standard cryo-FIB fabrication is blind to the precise location of the structure or proteins of interest. Fluorescence-guided focused ion beam (FIB) milling at target locations requires multiple sample transfers prone to contamination, and relocation and registration accuracy is often insufficient for 3D targeting. Here, we present in-situ fluorescence microscopy-guided FIB fabrication of a frozen-hydrated lamella to address this problem: we built a coincident 3-beam cryogenic correlative microscope by retrofitting a compact cryogenic microcooler, custom positioning stage, and an inverted widefield fluorescence microscope (FM) on an existing focused ion-beam scanning electron microscope (FIB-SEM). We show FM controlled targeting at every milling step in the lamella fabrication process, validated with transmission electron microscope (TEM) tomogram reconstructions of the target regions. The ability to check the lamella during and after the milling process results in a higher success rate in the fabrication process and will increase the throughput of fabrication for lamellae suitable for high-resolution imaging.

Correlative Approach for Atom Probe Sample Preparation of Interfaces Using Plasma Focused Ion Beam Without Lift-Out

Abstract: Abstract Plasma focused ion beam microscopy (PFIB) is a recent nanofabrication technique that is suitable for site-specific atom probe sample preparation. Higher milling rates and fewer artifacts make it superior to Ga+ FIBs for the preparation of samples where large volumes of material must be removed, for example, when trying to avoid lift-out techniques. Transmission Kikuchi diffraction (TKD) is a method that has facilitated phase identification and crystallographic measurements in such electron transparent samples. We propose a procedure for preparing atom probe tomography (APT) tips from mechanically prepared ribbons by using PFIB. This is highly suitable for the preparation of atom probe tips of interfaces such as interphase boundaries from challenging materials where lift-out tips easily fracture. Our method, in combination with TKD, allows the positioning of regions of interest such as interfaces close to the apex of the tip. We showcase the efficacy of the proposed method in a case study on Alloy 718, where the interface between γ-matrix and δ-phase has not been yet extensively explored through APT due to preparation challenges. Results show depletion of γ″-precipitates near the γ/δ interface. A quantitative evaluation of the composition of phases in the bulk versus near the interface is achieved.

The Trends of In Situ Focused Ion Beam Technology: Toward Preparing Transmission Electron Microscopy Lamella and Devices at the Atomic Scale

Abstract: The increased complexity and scaling down of electronic devices lead to great challenges in extracting an interesting nanoscale area of the device for transmission electron microscopy (TEM) characterization. The traditional TEM sample preparation methods, such as electrolytic polishing, can not precisely process a specific area of the device. Focused ion beam (FIB) technology is an advanced in situ specimen preparation method for TEM. FIB can not only locate specific position and mill a TEM sample with the nanoscale resolution, but also manipulate the sample in a controlled manner in real time. With the development of electronic devices, variations, and optimizations of the FIB method for advanced devices with new structures have been reported. In this review, the TEM sample preparation methods for fin field‐effect transistor, high electron mobility transistor, enhanced dynamic random‐access memory, and 2D material‐based devices are discussed. Their advantages, disadvantages, and an overview of the applications are summarized. Based on current research, future research directions for enhancing the quality of TEM samples are suggested.

Development of hard masks for reactive ion beam angled etching of diamond

Abstract: Diamond offers good optical properties and hosts bright color centers with long spin coherence times. Recent advances in angled-etching of diamond, specifically with reactive ion beam angled etching (RIBAE), have led to successful demonstration of quantum photonic devices operating at visible wavelengths. However, larger devices operating at telecommunication wavelengths have been difficult to fabricate due to the increased mask erosion, arising from the increased size of devices requiring longer etch times. We evaluated different mask materials for RIBAE of diamond photonic crystal nanobeams and waveguides, and how their thickness, selectivity, aspect ratio and sidewall smoothness affected the resultant etch profiles and optical performance. We found that a thick hydrogen silesquioxane (HSQ) layer on a thin alumina adhesion layer provided the best etch profile and optical performance. The techniques explored in this work can also be adapted to other bulk materials that are not available heteroepitaxially or as thin films-on-insulator.