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Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.


Papers
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Journal ArticleDOI
TL;DR: In this paper, a cantilever bending technique for the determination of mode I fracture toughness and strength of thin films is presented, where the depth profile of residual stresses in the film is determined in order to investigate the possible existence of pronounced stress gradients.

70 citations

Journal ArticleDOI
TL;DR: Computer simulations reveal how the bending is initiated by ion beam induced damage, and detailed structural characterization identifies dislocations to relax stresses and make the bending and alignment permanent, even surviving annealing procedures.
Abstract: Ion beams can be used to permanently bend and re-align nanowires after growth. We have irradiated ZnO nanowires with energetic ions, achieving bending and alignment in different directions. Not only the bending of single nanowires is studied in detail, but also the simultaneous alignment of large ensembles of ZnO nanowires. Computer simulations reveal how the bending is initiated by ion beam induced damage. Detailed structural characterization identifies dislocations to relax stresses and make the bending and alignment permanent, even surviving annealing procedures.

70 citations

Journal ArticleDOI
TL;DR: The interfering effect of water in the detection of carbon monoxide and the intrinsic potential of nanowire-based devices as humidity sensors are illustrated and the first step towards fundamental understanding of single-crystalline one-dimensional (1D) tin oxide nanostructures for sensor applications is taken.
Abstract: Individual tin oxide nanowires (NWs), contacted to platinum electrodes using focused ion beam assisted nanolithography, were used for detecting water vapor (1500–32 000 ppm) in different gaseous environments. Responses obtained in synthetic air (SA) and nitrogen atmospheres suggested differences in the sensing mechanism, which were related to changes in surface density of the adsorbed oxygen species in the two cases. A model describing the different behaviors has been proposed together with comparative evaluation of NW responses against sensors based on bulk tin oxide. The results obtained on ten individual devices (tested >6 times) revealed the interfering effect of water in the detection of carbon monoxide and illustrated the intrinsic potential of nanowire-based devices as humidity sensors. Investigations were made on sensitivity, recovery time and device stability as well as surface–humidity interactions. This is the first step towards fundamental understanding of single-crystalline one-dimensional (1D) tin oxide nanostructures for sensor applications, which could lead to integration in real devices.

70 citations

Journal ArticleDOI
08 Jun 2015-ACS Nano
TL;DR: The successful application of focused electron (and ion) beam induced deposition techniques for the growth of nanowires on flexible and transparent polycarbonate films supports the large potential of focused beam deposition as a high-resolution nanolithography technique on transparent and flexible substrates.
Abstract: The successful application of focused electron (and ion) beam induced deposition techniques for the growth of nanowires on flexible and transparent polycarbonate films is reported here. After minimization of charging effects in the substrate, sub-100 nm-wide Pt, W, and Co nanowires have been grown and their electrical conduction is similar compared to the use of standard Si-based substrates. Experiments where the substrate is bent in a controlled way indicate that the electrical conduction is stable up to high bending angles, >50°, for low-resistivity Pt nanowires grown by the ion beam. On the other hand, the resistance of Pt nanowires grown by the electron beam changes significantly and reversibly with the bending angle. Aided by the substrate transparency, a diffraction grating in transmission mode has been built based on the growth of an array of Pt nanowires that shows sharp diffraction spots. The set of results supports the large potential of focused beam deposition as a high-resolution nanolithograp...

70 citations

Patent
25 May 1990
TL;DR: In this paper, a focused ion beam along a substrate in the presence of a vapor of a precursor platinum compound is used to generate high deposition rates and steep walls by milling a cavity or trench with the focused beam and then locally applying the precursor vapor while scanning of the beam continues.
Abstract: Metal is deposited in lines of submicron width by scanning a focused ion beam along a substrate in the presence a vapor of a precursor platinum compound. High deposition rates and steep walls may be obtained by milling a cavity or trench with the focused beam and then locally applying the precursor vapor while scanning of the beam continues. Platinum containing features deposited in this way extend horizontally between wires, or vertically between layers to form conductive interconnects in integrated circuits, and also form pattern repairs in x-ray masks. The platinum chemistry is compatible with silicon wafer processing.

70 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202394
2022278
2021251
2020329
2019351
2018347