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Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.


Papers
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Journal ArticleDOI
TL;DR: In this study, elemental distributions of minor elements with weak signals were enhanced by applying principal component analysis (PCA), which is a superior technique to extract weak signals from a large dataset.

59 citations

Journal ArticleDOI
TL;DR: In this article, two commonly used focused ion beam (FIB) milling techniques were employed for Mg micropillar fabrication to investigate the influence of individual FIB technique on the microcompression testing method.

59 citations

Journal ArticleDOI
TL;DR: In this paper, a scanning probe capable of simultaneously measuring topography and local electrochemistry at a sample surface is proposed, which is achieved by integrating micro-and nanoelectrodes into atomic force microscopy tips using focused ion beam techniques.
Abstract: This paper concerns a scanning probe capable of simultaneously measuring topography and local electrochemistry at a sample surface. Our approach ensures the distance regulation of the electrode by maintaining a fixed working distance between the probe and the sample surface independent from the electrochemical response. This is achieved by integrating micro- and nanoelectrodes into atomic force microscopy tips using focused ion beam techniques. The feasibility and functionality of the fully featured tip is demonstrated by a simultaneous topographical and electrochemical measurement of a porous polymer membrane as model surface.

59 citations

Journal ArticleDOI
TL;DR: In this paper, a new approach to the local measurement of residual stress in microstructures is described, which takes advantage of the combined milling-imaging features of a focused ion beam (FIB) equipment to scale down the widely known hole drilling method.
Abstract: A new approach to the local measurement of residual stress in microstructures is described in this paper. The presented technique takes advantage of the combined milling-imaging features of a focused ion beam (FIB) equipment to scale down the widely known hole drilling method. This method consists of drilling a small hole in a solid with inherent residual stresses and measuring the strains/displacements caused by the local stress release, that takes place around the hole. In the presented case, the displacements caused by the milling are determined by applying digital image correlation (DIC) techniques to high resolution micrographs taken before and after the milling process. The residual stress value is then obtained by fitting the measured displacements to the analytical solution of the displacement fields. The feasibility of this approach has been demonstrated on a micromachined silicon nitride membrane showing that this method has high potential for applications in the field of mechanical characterization of micro/nanoelectromechanical systems

59 citations

Journal ArticleDOI
01 Jun 2009-Micron
TL;DR: The FIB milling technique was able to produce high-quality TEM sections of ivory dentine, which are suitable for further investigation using electron energy-loss spectroscopy (EELS) and energy-filtering TEM (EFTEM) to probe the collagen/apatite interface.

59 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202394
2022278
2021251
2020329
2019351
2018347