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Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.


Papers
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Journal ArticleDOI
G.E. McGuire1
TL;DR: Ion beam sputtering has been combined with Auger spectroscopy to study the effects of ion beams on semiconductor surfaces as mentioned in this paper, and experimental data are presented that illustrate the superposition of selective sputtering and implantation effects on the surface composition.

57 citations

Journal ArticleDOI
TL;DR: A robust CAD-based methodology for simulating 3D microstructures of polycrystalline metals using crystallographic input data on sections created by a focused ion beam (FIB)-scanning electron microscopy system is developed.
Abstract: This paper develops a robust CAD-based methodology for simulating 3D microstructures of polycrystalline metals using crystallographic input data on sections created by a focused ion beam (FIB)-scanning electron microscopy (SEM) system The method is able to construct consistent polycrystalline microstructures with control on the resolution necessary for meaningful computational analysis in microstructure-property estimation The microstructure simulation methodology is based on a hierarchical geometrical representation using primitives used in CAD modeling It involves steps of data cleanup, interface point identification, polynomial and NURBS function-based parametric surface segments construction, generalized cell decomposition, geometric defeaturing, and gap and overlap removal The implementation of the entire procedure described above is performed with the aid of user-programming facilities of a commercial CAD package Unigraphics NX3 The microstructure simulation algorithm is validated using various error criteria and measures for an extracted microstructure of a nickel superalloy

57 citations

Journal ArticleDOI
TL;DR: In this paper, focused ion beam (FIB) technology is used to directly write miniaturized planar electrode systems of reduced graphene oxide (fIB-rGO) on films of graphene oxide.
Abstract: Miniaturization of energy storage devices with enhanced performance metrics can reduce the footprint of microdevices being used in our daily life. Micro-­supercapacitor architectures with planar geometry provides several advantages, such as, the ability to control and reduce the distances ions travel between two electrodes, easy integration to microdevices, and offer the potential of being extended into 3D without compromising the interelectrode distances. Here, focused ion beam (FIB) technology is used to directly write miniaturized planar electrode systems of reduced graphene oxide (FIB-rGO) on films of graphene oxide. Using optimized ion beam irradiation, interdigitated FIB-rGO electrode designs with 40 μm long and 3.5 μm wide fingers with ultrasmall interelectrode spacing of 1 μm demonstrate a large capacitance (102 mF cm−2), ultrasmall time response (0.03 ms), low equivalent series resistance (0.35 mΩ cm2), and retain 95% of the capacitance after 1000 cycles at an ultrahigh current density of 45 mA cm−2. These performance metrics show remarkable improvements on several counts of supercapacitor performance over existing reports due to the miniaturized electrode dimensions and minimal damage to the graphene sheets. It is believed that these results can provide avenues for large-scale fabrication of arrayed, planar, high-performance micro-supercapacitors with a small environmental footprint.

57 citations

Journal ArticleDOI
TL;DR: In this article, a high brightness He ion source is described in terms of its basic operation, its optical properties, and its use in a high resolution microscope, where a column has been designed that will focus the beam to a minimum size of 0.25 nm.

56 citations

Journal ArticleDOI
TL;DR: In this paper, a photoactive layer of poly[2-methoxy-5-(3′,7′-dimethyl octyloxy)-1,4-phenylenevinylene] (MDMO-PPV) and a C60 derivative, (1-(3methoxcarbonyl)propyl-1-phenyl-[6,6]-methanofullerene), (PCBM), sandwiched between an indium tin oxide (ITO) anode covered with poly(ethylene dioxythiophene):poly(
Abstract: Bulk-heterojunction photovoltaic cells consisting of a photoactive layer of poly[2-methoxy-5-(3′,7′-dimethyloctyloxy)-1,4-phenylenevinylene] (MDMO-PPV) and a C60 derivative, (1-(3-methoxycarbonyl)propyl-1-phenyl-[6,6]-methanofullerene), (PCBM), sandwiched between an indium tin oxide (ITO) anode covered with poly(ethylene dioxythiophene):poly(styrene sulfonate) (PEDOT:PSS), and an aluminum cathode have been analyzed using transmission electron microscopy (TEM) and cryogenic Rutherford backscattering spectrometry (RBS) to assess the structural and elemental composition of these devices. TEM of cross sections of fully processed photovoltaic cells, prepared using a focused ion beam, provide a clear view of the individual layers and their interfaces. RBS shows that during preparation diffusion of indium into the PEDOT:PSS occurs while the diffusion of aluminum into the polymer layers is negligible. An iodinated C60 derivative (I-PCBM) was used to determine the concentration profile of this derivative in the vertical direction of a 100 nm active layer.

56 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202394
2022278
2021251
2020329
2019351
2018347