Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
Papers published on a yearly basis
Papers
More filters
Patent•
22 Jan 2004
TL;DR: In this paper, a microbeam oscillator is tuned by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator and the tuning is carried out by adding or subtracting material.
Abstract: The invention relates to a microbeam oscillator. Tuning of the oscillator is carried out by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator member.
49 citations
TL;DR: In this paper, electron beam-induced deposition (EBID) of Pt and tetra-ethyl-ortho-silicate (TEOS) gas precursors on nanopillar tips by lateral shifting of a scanning electron microscope beam was used to grow suspended nanostructures.
Abstract: Suspended nanostructures (SNSs) are grown by electron beam-induced deposition (EBID) of Pt and tetra-ethyl-ortho-silicate (TEOS) gas precursors on nanopillar tips, by lateral shifting of a scanning electron microscope beam Shape evolution of SNSs is characterized as a function of electron energy (5, 10, 15?keV) and electron charge deposited per unit length (CDL, 1?9?pC?nm?1 range) along the beam track Pt SNSs grow as single nanowires, evolving from thin (15?20?nm) and horizontal to thick (up to 70?nm) and inclined (up to 60?) geometry as CDL increases TEOS SNSs consist of multiple nanowires arranged in a stack: horizontal and parallel along the beam shift direction and aligned on top of each other along the beam incidence axis As the CDL increases, the number of nanowires increases and the top edge of the stack progressively inclines, taking the form of a hand-fan Deposition yield and overall size of SNSs are found to be proportional to CDL and inversely proportional to electron energy for both Pt and TEOS precursors As an example of 3D nanoarchitectures achievable by this lateral EBID approach, a 'nano-windmill' TEOS structure is presented
49 citations
TL;DR: In this article, focused ion beam (FIB) was used for microstructural characterization of wear-resistant coatings, which can be combined with other techniques such as nanoindentation or wear testing to obtain further information about the mechanisms governing the performance of the coatings in service.
Abstract: An outline of the application of the focused ion beam (FIB) workstation to the characterization of wear-resistant coatings is provided. Specimen preparation difficulties sometimes limit the usefulness of electron microscopy for microstructural characterization of coatings. However, FIB technology overcomes many of these difficulties allowing microstructural characterization to be performed both by cross-sectioning and imaging coatings and by specimen preparation of electron transparent cross-sections for subsequent examination by electron microscopy. In addition, the FIB may be combined with other techniques, such as nanoindentation or wear testing, to obtain further information about the mechanisms governing the performance of the coatings in service.
49 citations
TL;DR: Long-range tracer penetration over tens of micrometers proves that these submicrometer-large defects are connected by highly diffusive paths and that they appear with significant frequency.
Abstract: Radiotracer experiments on diffusion of 63 Ni and 86 Rb in severely deformed commercially pure copper (8 passes of equal channel angular pressing) reveal unambiguously the existence of ultrafast transport paths. A fraction of these paths remains in the material even after complete recrystallization. Scanning electron microscopy and focused ion beam techniques are applied. Deep grooves are found which are related to original high-energy interfaces. In-depth sectioning near corresponding triple junctions reveals clearly multiple microvoids or microcracks caused by the severe deformation. Long-range tracer penetration over tens of micrometers proves that these submicrometer-large defects are connected by highly diffusive paths and that they appear with significant frequency.
49 citations
TL;DR: In this paper, the fabrication and transport characteristics of stacked-junctions of thin graphite flake were investigated using a three-dimensional focused-ion-beam milling, and the stacked-joints with in-plane area A (from 2 down to 0.25μm 2 ) and stack height-length along c-axis were fabricated.
49 citations