Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.

A review of focused ion beam applications in microsystem technology

Abstract: In this paper the possibilities of focused ion beam (FIB) applications in microsystem technology are reviewed. After an introduction to the technology and the operating principles of FIB, two classes of applications are described. First the subject of FIB for microsystem technology inspection, metrology and failure analysis is outlined. A procedure for cross sectioning on samples is presented, as well as some examples of how this technique can be applied to study processing results. The second part of the paper is on the use of FIB as a tool for maskless micromachining. Both subtractive (etching) and additive (deposition) techniques are discussed, as well as the combination of FIB implantation of silicon with subsequent wet etching. We will show the possibility to fabricate three-dimensional structures on a micrometre scale, and give examples of recent realizations thereof.

Introduction to focused ion beams : instrumentation, theory, techniques, and practice

Abstract: The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.

Focused Ion Beam Microscopy and Micromachining

Abstract: The fairly recent availability of commercial focused ion beam (FIB) microscopes has led to rapid development of their applications for materials science. FIB instruments have both imaging and micromachining capabilities at the nanometer–micrometer scale; thus, a broad range of fundamental studies and technological applications have been enhanced or made possible with FIB technology. This introductory article covers the basic FIB instrument and the fundamentals of ion–solid interactions that lead to the many unique FIB capabilities as well as some of the unwanted artifacts associated with FIB instruments. The four topical articles following this introduction give overviews of specific applications of the FIB in materials science, focusing on its particular strengths as a tool for characterization and transmission electron microscopy sample preparation, as well as its potential for ion beam fabrication and prototyping.

Atom probe tomography

Abstract: Atom probe tomography is a powerful tool for the characterization of the size, morphology and composition of ultrafine features in a variety of materials. With the development of new forms of specimen preparation especially with focused ion beam milling systems, atom probe tomography should be extended to a wider variety of applications in nanotechnology.

Microstructural investigation of gas shales in two and three dimensions using nanometer-scale resolution imaging

Abstract: The microstructure of gas shale samples from nine different formations has been investigated using a combination of focused ion beam (FIB) milling and scanning electron microscopy (SEM). Backscattered electron (BSE) images of FIB cross sectioned shale surfaces show a complex microstructure with variations observed among the formations. Energy dispersive spectroscopy of the shale cross sections indicates that clay, carbonate, quartz, pyrite, and kerogen are the most prevalent components. In the BSE images, areas of kerogen are observed interspersed with the inorganic grains. Pores are observed in both the kerogen and inorganic matrix with the size, shape, and number of pores varying among the shale samples. By using FIB milling and SEM imaging sequentially and repetitively, three-dimensional (3-D) data sets of SEM images have been generated for each of the shale samples. Three-dimensional volumes of the shales are reconstructed from these images. By setting thresholds on the gray scale, the kerogen and pore networks are segmented out and visualized in the reconstructed shale volumes. Estimates of kerogen and pore volume percentages of the reconstructed shale volumes have been made and range from 0 to 90.0% for the kerogen and 0.2 to 2.3% for pores. Estimates of pore-size distributions suggest that although pores with radii of approximately 3 nm dominate in number, they do not necessarily dominate in total volumetric contribution. Scanning electron microscopy images and 3-D reconstructions reinforce the facts that shales are quite different and that their microstructures are highly variable and complex.