Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.

Elevated temperature, nano-mechanical testing in situ in the scanning electron microscope

Abstract: A general nano-mechanical test platform capable of performing variable temperature and variable strain rate testing in situ in the scanning electron microscope is described. A variety of test geometries are possible in combination with focused ion beam machining or other fabrication techniques: indentation, micro-compression, cantilever bending, and scratch testing. The system is intrinsically displacement-controlled, which allows it to function directly as a micro-scale thermomechanical test frame. Stable, elevated temperature indentation/micro-compression requires the indenter tip and the sample to be in thermal equilibrium to prevent thermal displacement drift due to thermal expansion. This is achieved through independent heating and temperature monitoring of both the indenter tip and sample. Furthermore, the apex temperature of the indenter tip is calibrated, which allows it to act as a referenced surface temperature probe during contact. A full description of the system is provided, and the effects of indenter geometry and of radiation on imaging conditions are discussed. The stabilization time and temperature distribution throughout the system as a function of temperature is characterized. The advantages of temperature monitoring and thermal calibration of the indenter tip are illustrated, which include the possibility of local thermal conductivity measurement. Finally, validation results using nanoindentation on fused silica and micro-compression of ⟨100⟩ silicon micro-pillars as a function of temperature up to 500 °C are presented, and procedures and considerations taken for these measurements are discussed. A brittle to ductile transition from fracture to splitting then plastic deformation is directly observed in the SEM for silicon as a function of temperature.

Making electrical contacts to nanowires with a thick oxide coating

Abstract: Techniques are presented for making ohmic contacts to nanowires with a thick oxide coating. Although experiments were carried out on Bi nanowires, the techniques described in this paper are generally applicable to other nanowire systems. Metal electrodes are patterned to individual Bi nanowires using, electron beam lithography. Imaging the chemical reaction on the atomic scale with in situ high-resolution transmission electron microscopy shows that annealing in H-2 or NH3 can reduce the nanowires' oxide coating completely. The high temperatures required for this annealing, however, are not compatible with the lithographic techniques. Low-resistance ohmic contacts to individual bismuth nanowires are achieved using a focused ion beam (FIB) to first sputter away the oxide layer and then deposit Pt contacts. By combining electron beam lithography and FIB techniques, ohmic contacts stable from 2 to 400 K are successfully made to the nanowires. A method for preventing the burnout of nanowires from electrostatic discharge is also developed.

Electron beam processing

Abstract: A method and apparatus for electron beam processing using an electron beam (101) activated gas to etch or deposit material. The invention is particularly suitable for repairing defects in lithography masks. By using an electron beam (101) in place of an ion beam, the many problems associated with ion beam mask repair, such as staining and riverbedding, are eliminated. Endpoint detection is not critical because the electron beam and gas will not etch the substrate. In one embodiment, xenon ditluoride gas is activated by the electron beam (101) to etch a tungsten, tantalum nitride, or molybdenum silicide film on a transmission or reflection mask. To prevent spontaneous etching by the etchant gas in processed sites at which the passivation layer was removed, processed sites can be re-passivated before processing additional sites.