Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
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31 Oct 2002
TL;DR: In this article, the authors present a theoretical analysis of focused ion beams and their application in the field of field ionization and field desorption, as well as practical applications of Focused Ion Beam Optics and Systems.
Abstract: Preface. About the Authors. Introduction. 1. Field Ionization Sources. 2. Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 4. Interactions of Ions with Solids. 5. Practical Focused Ion Beam Optics and Systems. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields. Index.
132 citations
TL;DR: In this article, focused ion beam (FIB) was used for patterning lithium niobate (LN) at submicronic scale by means of FIB bombardment.
132 citations
TL;DR: In this paper, the serialized reconstruction procedure of a high-performance, mixed ionic-electronic conducting La0.58Sr0.4Co0.2Fe0.8O3−δ (LSCF)-cathode is illustrated in detail.
131 citations
15 Oct 2011-Materials Science and Engineering A-structural Materials Properties Microstructure and Processing
TL;DR: In this article, an incremental focused ion beam (FIB) ring-core milling, combined with high-resolution in situ SEM-FEG imaging of the relaxing surface and a full field strain analysis by digital image correlation (DIC), is presented.
Abstract: A new methodology for the measurement of depth sensitive residual stress profiles of thin coatings with sub-micrometer resolution is presented. The two step method consists of incremental focused ion beam (FIB) ring-core milling, combined with high-resolution in situ SEM-FEG imaging of the relaxing surface and a full field strain analysis by digital image correlation (DIC). The through-thickness profile of the residual stress can be obtained by comparison of the experimentally measured surface strain with finite element modeling using Schajer's integral method. In this work, a chromium nitride (CrN) CAE-PVD 3.0 μm coating on steel substrate, and a gold MS-PVD 1.5 μm on silicon were selected for the experimental implementation. Incremental FIB milling was conducted using an optimized milling strategy that produces minimum re-deposition over the sample surface. Results showed an average residual stress of σ = −5.15 GPa in the CrN coating and σ = +194 MPa in the Au coating. These values are in reasonable agreement with estimates obtained by other conventional techniques. The depth profiles revealed an increasing residual stress from surface to the coating/surface interface for both coatings. This observation is likely related to stress relaxation during grain growth, which was observed in microstructural cross sections, as predicted by existing models for structure–stress evolution in PVD coatings. A correlation between the observed stress gradients and the in-service mechanical behavior of the coatings is proposed. Finally, critical aspects of the technique and the influence of microstructure and elastic anisotropy on stress analysis are analyzed and discussed.
130 citations
129 citations