Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
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TL;DR: In this article, a gelatinous silicon precursor is deposited on porous natural graphite, which provides an excellent cycling stability, high coulombic efficiencies and a good rate capability.
116 citations
TL;DR: Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis and the merits of using these systems are discussed and the three main techniques used to prepare cross‐section specimens for transmission electron microscopy (TEM) are compared.
Abstract: Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis In this article the merits of using these systems are discussed and the three main techniques used to prepare cross-section specimens for transmission electron microscopy (TEM) are both discussed and compared with emphasis being placed on the tricks that users do to make the lamellae as thin as possible and with a minimum of damage at their sidewalls Other techniques such as serial slicing for three-dimensional reconstruction and the preparation of plan-view specimens are also summarized
116 citations
01 Jan 2003-Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
TL;DR: Focused ion beam (FIB) sputtering is used to shape a variety of cutting tools with dimensions in the 15-100-μm range and cutting edge radii of curvature of 40-nm.
Abstract: Focused ion beam (FIB) sputtering is used to shape a variety of cutting tools with dimensions in the 15–100 μm range and cutting edge radii of curvature of 40 nm. The shape of each microtool is controlled to a pre-specified geometry that includes rake and relief features. We demonstrate tools having rectangular, triangular, and other complex-shaped face designs. A double-triangle tip on one tool is unique and demonstrates the versatility of the fabrication process. The FIB technique allows observation of the tool during fabrication, and, thus, reproducible features are generated with sub-micron precision. Tools are made from tungsten carbide, high-speed tool steel, and single crystal diamond. Application of FIB-shaped tools in ultra-precision microgrooving tests shows that the cross-section of a machined groove is an excellent replication of the microtool face. Microgrooves on 40–150 μm pitch are cut into 3 mm diameter polymer rods, for groove arc lengths greater than 12 cm. The surface finish of machined features is also reported; groove roughness (Ra) is typically less than 0.2 μm. Ultra-precision machining of cylindrical substrates is extended to make bound metal microcoils having feature sizes of 20–40 μm.
116 citations
TL;DR: It is verified that translocation achieved by electro-osmostic transport is an effective means of slowing translocation velocities of highly charged particles without compromising particle capture rate as compared to more traditional approaches based on electrophoretic transport.
Abstract: We observe single nanoparticle translocation events via resistive pulse sensing using silicon nitride pores described by a range of lengths and diameters. Pores are prepared by focused ion beam milling in 50 nm-, 100 nm-, and 500 nm-thick silicon nitride membranes with diameters fabricated to accommodate spherical silica nanoparticles with sizes chosen to mimic that of virus particles. In this manner, we are able to characterize the role of pore geometry in three key components of the detection scheme, namely, event magnitude, event duration, and event frequency. We find that the electric field created by the applied voltage and the pore’s geometry is a critical factor. We develop approximations to describe this field, which are verified with computer simulations, and interactions between particles and this field. In so doing, we formulate what we believe to be the first approximation for the magnitude of ionic current blockage that explicitly addresses the invariance of access resistance of solid-state p...
116 citations
TL;DR: Focused ion beam microscopes are extremely versatile and powerful instruments for materials research as discussed by the authors, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, three-dimensional (3D) nano-to- macroscale tomography, and high resolution rapid prototyping.
Abstract: Focused ion beam microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, three-dimensional (3D) nano- to macroscale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specific manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation, such as new ion sources that encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector configurations for 3D structural, chemical, and ion contrast characterization, and robust and versatile process automation capabilities, is an exciting development for many fields of materials research.
116 citations