Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
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TL;DR: The Young's modulus of diamond-like carbon (DLC) pillars was measured by means of mechanical vibration using scanning electron microscopy as mentioned in this paper, which showed that there was a balance between the DLC growth rate and surface bombardment by the ions, and this played an important role in the stiffness of the pillars.
Abstract: The Young’s modulus of diamond-like carbon (DLC) pillars was measured by means of mechanical vibration using scanning electron microscopy. The DLC pillars were grown using Ga+ focused ion beam-induced chemical vapor deposition with a precursor of phenanthrene vapor. The Young’s modulus of the DLC pillars was around 100 GPa at vapor pressure of 5×10−5 Pa and it had a quality (Q) value of resonance exceeding 1200. There seemed to be a balance between the DLC growth rate and surface bombardment by the ions, and this played an important role in the stiffness of the pillars. Some of the DLC pillars showed a very large Young’s modulus over 600 GPa at low gas pressure conditions.
99 citations
TL;DR: In this paper, a new technique for trapping of fast (keV) ion beams is presented, which works on a principle similar to that of optical resonators, and the main advantages of the trap are the possibility to trap fast beams without need of deceleration, the well-defined beam direction, the easy access to the trapped beam by various probes, and a simple requirement in terms of external beam injection.
Abstract: A new technique for trapping of fast (keV) ion beams is presented. The trap, which is electrostatic, works on a principle similar to that of optical resonators. The main advantages of the trap are the possibility to trap fast beams without need of deceleration, the well-defined beam direction, the easy access to the trapped beam by various probes, and the simple requirement in terms of external beam injection. Results of preliminary experiments related to the radiative cooling of molecular ions are also reported.
99 citations
TL;DR: TEM analysis revealed that electrically degraded devices always contain a pit-like defect next to the drain in the top AlGaN layer, and it has been found that the degree of the defect formation strongly correlates to drain current (IDmax) degradation.
99 citations
01 Jan 2005
TL;DR: In this chapter, methods and applications of the FIB lift-out specimen preparation technique are reviewed.
Abstract: In this chapter, we review methods and applications of the FIB lift-out specimen preparation technique. A historical overview of the development of the technique is given. The ex-situ and in-situ lift-out techniques are described. Examples, advantages, and disadvantages of each of the techniques are presented.
99 citations
TL;DR: In this paper, phase connectivity, electrochemically active triple-phase boundary density and phase tortuosity are calculated for a series of anodes with varying Ni-YSZ composition.
99 citations