Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
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TL;DR: In this paper, a planar magnetic element with high magnetic shape anisotropy, an extremely high aspect ratio of greater than 30:1, and an end radius of less than 25 nm was used for magnetic force microscopy.
Abstract: Atomic force microscope tips coated by the thermal evaporation of a magnetic 30 nm thick Co film have been modified by focused ion beam milling with Ga+ ions to produce tips suitable for magnetic force microscopy. Such tips possess a planar magnetic element with high magnetic shape anisotropy, an extremely high aspect ratio of greater than 30:1, and an end radius of less than 25 nm. These tips have been used in a commercial atomic force microscope under ambient conditions to obtain 30 nm resolution magnetic images of an established CoNi/Pt multilayer reference sample.
86 citations
Patent•
24 Apr 1985
TL;DR: In this article, the precise sputter etching and imaging of insulating and other targets, using a finely focused beam of ions produced from a liquid metal ion source, is described.
Abstract: An apparatus is described which makes possible the precise sputter etching and imaging of insulating and other targets, using a finely focused beam of ions produced from a liquid metal ion source. This apparatus produces and controls a submicron beam of ions to precisely sputter etch the target. A beam of electrons directed on the target neutralizes the charge created by the incident ion beam. Imaging of the target surface and ultra-precise control of the etching process is achieved by monitoring the particles that are sputtered from the target surface.
86 citations
TL;DR: In this paper, a light-guiding defect line running along the center of a Si3N4-air photonic crystal was constructed by a combination of laser interference lithography (LIL) and local focused ion beam assisted deposition.
Abstract: Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).
86 citations
TL;DR: The provision of osseointegration is not exclusively linked to a particular set of surface features if the implant surface character is a major factor in that process, and the studied methodology provides an effective tool to also analyze the interface between implant and surrounding bone.
Abstract: Background: Since osseointegration of the respective implant is claimed by all manufacturing companies, it is obvious that not just one specific surface profile including the chemistry controls bon ...
86 citations
TL;DR: In this article, single-walled carbon nanotubes have been grown on a variety of substrates by chemical vapor deposition using low-coverage vacuum-deposited iron as a catalyst.
Abstract: Single-walled carbon nanotubes have been grown on a variety of substrates by chemical vapor deposition using low-coverage vacuum-deposited iron as a catalyst. Ordered arrays of suspended nanotubes ranging from submicron to several micron lengths have been obtained on Si, SiO 2 , Al 2 O 3 , and Si 3 N 4 substrates that were patterned on hundred nanometer length scales with a focused ion beam machine. Electric fields applied during nanotube growth allow the control of growth direction. Nanotube circuits have been constructed directly on contacting metal electrodes of Pt/Cr patterned with catalysts. Patterning with solid iron catalyst is compatible with modern semiconductor fabrication strategies and may contribute to the integration of nanotubes in complex device architectures.
86 citations