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Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.


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Journal ArticleDOI
01 Feb 2013-Carbon
TL;DR: In this article, LiMn1/3Ni 1/3Co/3O2 and LiPF6-EC:PC:DEC electrolyte were cycled under several conditions, and the solid electrolyte interphase (SEI) on the graphite electrode was studied.

84 citations

Journal ArticleDOI
Ty J. Prosa1, David J. Larson1
TL;DR: A short review of the origin of the FIB method and the standard methods used today for lift-out and sharpening, using the annular milling method as applied to atom probe tomography specimens.
Abstract: Approximately 30 years after the first use of focused ion beam (FIB) instruments to prepare atom probe tomography specimens, this technique has grown to be used by hundreds of researchers around the world. This past decade has seen tremendous advances in atom probe applications, enabled by the continued development of FIB-based specimen preparation methodologies. In this work, we provide a short review of the origin of the FIB method and the standard methods used today for lift-out and sharpening, using the annular milling method as applied to atom probe tomography specimens. Key steps for enabling correlative analysis with transmission electron-beam backscatter diffraction, transmission electron microscopy, and atom probe tomography are presented, and strategies for preparing specimens for modern microelectronic device structures are reviewed and discussed in detail. Examples are used for discussion of the steps for each of these methods. We conclude with examples of the challenges presented by complex topologies such as nanowires, nanoparticles, and organic materials.

84 citations

Journal ArticleDOI
TL;DR: In this article, a focused ion beam microscope was used to collect secondary electron images and secondary ion mass spectroscopy elemental maps as a function of depth, which were then used to reconstruct volume image and chemical maps with 20 nm lateral and depth resolutions.
Abstract: A technique to reconstruct high resolution three-dimensional structural images and chemical maps using focused ion beam microscopy is presented. A focused ion beam microscope is used to collect secondary electron images and secondary ion mass spectroscopy elemental maps as a function of depth. These images and elemental maps are then used to reconstruct volume image and chemical maps with 20 nm lateral and depth resolutions. Methods to improve lateral resolution and to reduce uncertainties due to differential sputtering are also discussed.

84 citations

Journal ArticleDOI
TL;DR: In this article, a local thresholding algorithm is used to extract the catalyst layer pore morphology from focused ion beam scanning electron microscopy (FIB-SEM) images, and n-point correlation functions, such as auto-correlation, chord length, and pore-size distribution are computed to interpret the micro-structure variations between different images of the same catalyst layer.
Abstract: Image analysis and numerical simulation algorithms are introduced to analyze the micro-structure, transport, and electrochemical performance of thin, low platinum loading inkjet printed electrodes. A local thresholding algorithm is used to extract the catalyst layer pore morphology from focused ion beam scanning electron microscopy (FIB-SEM) images. n-point correlation functions, such as auto-correlation, chord length, and pore-size distribution are computed to interpret the micro-structure variations between different images of the same catalyst layer. Pore size distributions are in agreement with experimental results. The catalyst layer exhibits anisotropy in the through-plane direction, and artificial anisotropy in the FIB direction due to low slicing resolution. Microscale numerical mass transport simulations show that transport predictions are affected by image resolution and that a minimum domain size of 200 nm is needed to estimate transport properties. A micro-scale electrochemical model that includes a description of the ionomer film resistance and a multi-step electrochemical reaction model for the oxygen reduction reaction is also presented. Results show that the interfacial mass transport resistance in the ionomer film has the largest effect on the electrochemical performance.

84 citations

Journal ArticleDOI
TL;DR: In this paper, the microstructural and mechanical properties of an ultrafine-grained (UFG) Al-Zn alloy processed by high-pressure torsion (HPT) are investigated using depth-sensing indentations, focused ion beam, scanning electron microscopy and scanning transmission electron microscope.
Abstract: The microstructural and mechanical properties of an ultrafine-grained (UFG) Al–Zn alloy processed by high-pressure torsion (HPT) are investigated using depth-sensing indentations, focused ion beam, scanning electron microscopy and scanning transmission electron microscopy. Emphasis is placed on the microstructure and the effects of grain boundaries at room temperature. The experiments show the formation of Zn-rich layers at the Al/Al grain boundaries that enhance the role of grain boundary sliding leading to unique plastic behavior in this UFG material. The occurrence of significant grain boundary sliding at room temperature is demonstrated by deforming micro-pillars. Our results illustrate a potential for using UFG materials as advanced functional materials in electronic micro-devices.

84 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202394
2022278
2021251
2020329
2019351
2018347