Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
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TL;DR: In this article, a review discusses some of the issues that will govern future commercial adoption of ion beam nanoscale fabrication and lithography, with special reference to some major fields of application.
76 citations
TL;DR: In this paper, the FIB induced damages in the preparation of TEM specimen were studied by TEM and X-ray Energy Dispersive Spectroscopy (EDX).
76 citations
TL;DR: In this article, the authors examined the hardening effects of focused ion beam (FIB) induced damage produced during the fabrication of micropillars by introducing a surface layer of nanosized obstacles into a dislocation dynamics simulation.
Abstract: : The hardening effects of focused ion beam (FIB) induced damage produced during the fabrication of micropillars are examined by introducing a surface layer of nanosized obstacles into a dislocation dynamics simulation. The influence of the depth and strength of the obstacles as a function of pillar diameter is assessed parametrically. We show that for a selected set of sample sizes between 0.5 and 1.0 micrometer, the flow strength can increase by 10 20%, for an obstacle strength of 750 MPa, and damage depth of 100 nm. On the other hand, for sizes larger and smaller than this range, the effect of damage is negligible. Results show that the obstacles formed during the FIB milling may be expected to alter the microstructure of micropillars, however, they have a negligible effect on the observed size-strength scaling laws.
76 citations
TL;DR: In this article, the uniaxial compression behavior of highly alloyed, focused ion beam (FIB) manufactured micropillars, ranging from 200 up to 4000 nm in diameter, was investigated.
Abstract: The present paper investigates the uniaxial compression behavior of highly alloyed, focused ion beam (FIB) manufactured micropillars, ranging from 200 up to 4000 nm in diameter. The material used was the Ni-based oxide-dispersion strengthened (ODS) alloy Inconel MA6000. Stress–strain curves show a change in slip behavior comparable to those observed in pure fcc metals. Contrary to pure Ni pillar experiments, high critical resolved shear stress (CRSS) values were found independent of pillar diameter. This suggests that the deformation behavior is primarily controlled by the internal obstacle spacing, overwhelming any pillar-size-dependent mechanisms such as dislocation source action or starvation.
76 citations
TL;DR: In this article, the authors compare information obtained from micro patterned ion beams about the accelerating electron sheath, and the influence of magnetic fields on the electron transport inside conducting targets.
Abstract: Since their discovery, laser accelerated ion beams have been the subject of great interest. The ion beam peak power and beam emittance is unmatched by any conventionally accelerated ion beam. Due to the unique quality, a wealth of applications has been proposed, and the first experiments confirmed their prospects. Laser ion acceleration is strongly linked to the generation and transport of hot electrons by the interaction of ultra-intense laser light with matter. Comparing ion acceleration experiments at laser systems with different beam parameters and using targets of varying thickness, material and temperature, some insight on the underlying physics can be obtained. The paper will present experimental results obtained at different laser systems, first beam quality measurement on laser accelerated heavy ions, and ion beam source size measurements at different laser parameters. Using structured targets, we compare information obtained from micro patterned ion beams about the accelerating electron sheath, and the influence of magnetic fields on the electron transport inside conducting targets.
76 citations