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Focused ion beam

About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.


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Journal ArticleDOI
TL;DR: In this paper, the top silver layer was etched by a focused ion beam to mill an array of identical slits covering an area of 0.75 mm 2. This was undertaken in a manner that gave well-formed slits with minimal bridging, while at the same time minimizing the damage to the dielectric core.
Abstract: Next the top silver layer was etched by a focused ion beam to mill an array of identical slits covering an area of 0.75 mm 2 . This was undertaken in a manner that gave well-formed slits with minimal bridging, while at the same time minimizing the damage to the dielectric core. The width of each slit w50 nm is significantly less than the visible radiation wavelength, and the periodicity of the array is g =340 nm. The choice of these parameters was based upon initial modeling studies that took into account the resolution limitations of the fabrication process together with the requirement to observe well-defined resonances in the visible regime. The geometrical parameters of the structure are determined from scanning electron microscope SEM imaging Table I; an image of a typical region of the sample surface is presented in Fig. 1b. The dispersion of the modes is determined by recording the spectra of the specularly reflected beam as a function of the angle of incidence . A collimated beam from a tungsten halogen lamp was spectrally filtered by a monochromator. The intensity of the incident light was modulated using a mechanical chopper to allow lock-in detection, and a beam splitter redirected a small fraction of the incident light onto a second detector, allowing for source intensity fluctua

75 citations

Journal ArticleDOI
01 Nov 2006-Carbon
TL;DR: Inspired by a special biological structure in nature, a kind of urchin-like nano/micro hybrid design was proposed to modify conventional micrometer-sized electroactive materials for lithium ion battery.

75 citations

Journal ArticleDOI
TL;DR: In this paper, the porosity, Euler number (pore connectivity), overall roughness, solid phase size and pore size are calculated for catalyst surfaces and volumes using scanning electron microscopy (SEM) and focused ion beam (FIB) tomography.

75 citations

Journal ArticleDOI
TL;DR: In this article, double cantilever beams have been made by focused ion beam milling and compressed in situ using a nano-indenter, which can account for frictional effects and is demonstrated first on single crystals of SiC and GaAs of known toughness.
Abstract: A way of characterizing cracking in a hard coating is described Microscale double cantilever beams have been made by focused ion beam milling and compressed in situ using a nanoindenter The method can account for frictional effects and is demonstrated first on single crystals of SiC and GaAs of known toughness, before studying cracking in CrN-based hard coatings It is found that ultra-fine grained CrAlN/Si3N4 coatings have a toughness approximately twice that of a conventional CrN coating Although grain-size effects are still unclear, in situ observations directly show crack interactions with particles of Cr and voids in the film

74 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202394
2022278
2021251
2020329
2019351
2018347