Topic
Focused ion beam
About: Focused ion beam is a research topic. Over the lifetime, 12154 publications have been published within this topic receiving 179523 citations. The topic is also known as: FIB.
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TL;DR: Novel methods for specimen preparation using a dual beam FIB are developed, including site-specific techniques and lift-out methods aimed at material and device applications, and a conventional electropolished specimen is used as a blank.
73 citations
TL;DR: In this article, the tribological behavior of copper was studied with a pin-on-disk system designed to achieve a wide range of velocities, and the system was also designed with a high-rate data acquisition system in order to obtain dynamic friction data.
73 citations
TL;DR: In this paper, a focused ion beam nanofabrication technique was investigated as a high-resolution patterning method suitable for nanocontact imprinting, and different ion beam currents, milling times, and dwell times were exploited to optimize focused ionbeam milling conditions.
Abstract: We investigated a focused ion beam nanofabrication technique as a high-resolution patterning method suitable for nanocontact imprinting. Different ion beam currents, milling times, and dwell times are exploited to optimize focused ion beam milling conditions. Single-pixel lines are milled on a silicon master and replicated on polydimethylsiloxane through replica moulding. The profile of the grooves (the depth-to-width aspect ratio) was found to be depth dependent regardless of the beam current and dwell time. The depth of the line cuts was strongly dependent upon beam current and dwell time at a given dose. This technique holds great promise for mass production of nanostructures due to its simplicity and high reproducibility.
73 citations
Patent•
06 Aug 2003TL;DR: In this article, a co-axial focused ion beam and an electron beam were used for accurate processing with the FIB using images formed by the electron beam, and the landing energy of the electrons can be varied without changing the working distance.
Abstract: A system including co-axial focused ion beam and an electron beam allows for accurate processing with the FIB using images formed by the electron beam. In one embodiment, a deflector deflects the electron beam onto the axis of the ion beam and deflects secondary particles collected through the final lens toward a detector. In one embodiment, a positively biased final electrostatic lens focuses both beams using the same voltage to allow simultaneous or alternating FIB and SEM operation. In one embodiment, the landing energy of the electrons can be varied without changing the working distance.
73 citations
TL;DR: In this article, focused ion beam (FIB) fabrication of fiber optic sensors, mainly chemical sensors, which are based on plasmonics-active nanostructures formed on the cleaved tips of optical fibers, is reported.
Abstract: Focused ion beam (FIB) fabrication of fiber optic sensors, mainly chemical sensors, which are based on plasmonics-active nanostructures formed on the cleaved tips of optical fibers, is reported. The nanostructures fabricated included nanoholes in optically thick metallic films as well as metallic nanopillars and nanorods. The sensing mechanism is based on detecting shifts in surface plasmon resonances (SPRs) associated with nanoholes in metallic films and localized SPRs of metallic nanopillars and nanorods, when the refractive index of the medium surrounding the nanostructures is changed. These sensors can be employed for the detection of chemical agents in air as well as liquid media surrounding the sensors. FIB milling was employed to fabricate ordered arrays of nanoholes in optically thick (100–240nm) metallic films deposited on cleaved end faces of multimode, four-mode, and single-mode optical fibers. Separately, metallic nanorods and nanopillars were formed by first depositing a metallic (gold or sil...
73 citations