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Fresnel zone

About: Fresnel zone is a research topic. Over the lifetime, 2337 publications have been published within this topic receiving 37650 citations.


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Proceedings ArticleDOI
09 Jun 2013
TL;DR: Image plane holographic microscopy was demonstrated combining coherent illumination from a compact 46.9 nm wavelength laser with Fresnel zone plate optics as discussed by the authors, which enables imaging of low absorption samples with high resolution.
Abstract: Image plane holographic microscopy is demonstrated combining coherent illumination from a compact 46.9 nm wavelength laser with Fresnel zone plate optics. The method enables imaging of low absorption samples with high resolution.

1 citations

Book ChapterDOI
16 Jan 2002

1 citations

Proceedings ArticleDOI
07 Nov 1995
TL;DR: In this article, it is shown that it is possible to build air coupled Fresnel lenses with a reasonable conversion efficiency into subsurface waves, using air as the coupling medium.
Abstract: The Lamb wave and V-groove lenses are distinguished by their high surface wave excitation efficiencies. However, due to the fixed incidence angle, a particular lens can only be used for materials having surface wave velocities within a limited range. Hence, it is desirable to have lenses with adjustable incidence angle. Lamb wave and V-groove lenses constructed as Fresnel lenses are presented. We also discuss the feasibility of Fresnel lenses with air as the coupling medium. It is shown that it is possible to build air coupled Fresnel lenses with a reasonable conversion efficiency into subsurface waves.

1 citations

Journal ArticleDOI
TL;DR: In this article, a new ZPA design-to-manufacture flow that takes fabrication errors into account before the assembly process is proposed, which can be clearly screened by rigorous optical and lithography simulations.
Abstract: Zone plate array lithography (ZPAL) in the X-ray or EUV regimes is one possible next-generation lithography solution because of its potential for high-resolution and maskless operation. To achieve a high throughput, Fresnel zone plates (FZPs) are integrated to form arrays of massively parallel exposure beams. FZP fabrication errors and uniformity can be serious issues in ZPAL systems, which are usually assembled and tested directly after zone plate arrays (ZPAs) are fabricated. The yield of this approach can decrease significantly with increasing beam number. A new ZPA design-to-manufacture flow that takes fabrication errors into account before the assembly process is proposed. The errors can be clearly screened by rigorous optical and lithography simulations. The effectiveness of the proposed approach is demonstrated by analyzing preliminary FZP designs of different zone numbers subject to imperfect zone width control. Simulation results indicate that FZPs with smaller zone numbers can tolerate larger radius deviations.

1 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202326
202249
202137
202052
201965
201878