Fresnel zone

About: Fresnel zone is a research topic. Over the lifetime, 2337 publications have been published within this topic receiving 37650 citations.

Method for the optical alignment of designs in two near planes and alignment apparatus for performing this method

Abstract: The invention relates to the alignment of designs in two near planes, whereby one (the mask) carries a design which is to be reproduced on the second (the pattern). The invention relates to a method for the optical alignment of these two planes using a pair of marks formed by a lens (4) having linear Fresnel zones inscribed on the mask (1) and a reflecting grating (3) of appropriate width inscribed on the pattern (2). The illumination by a parallel beam of monochromatic light of the lens with Fresnel zones produces on the pattern a substantially rectangular illumination spot which, when made to coincide with the line inscribed on the pattern is reflected or transmitted, and supplies a detected intensity maximum or minimum depending on whether the lines reflects more or less than the remainder of the pattern. The invention also relates to an optical alignment apparatus for performing this method. The invention applies to the alignment of lithographic X-ray masks or photographic masks with respect to patterns on which reproduction is to take place.

Varifocal moiré zone plates for straightness measurement

Abstract: A Fresnel zone plate of variable size can be formed as a moire pattern between a suitable pair of identical grids. The focusing power may be varied over a considerable range by relative translation of the grids if their line sbapejs are determined by a combination of cubic and linear functions. Elliptical and hyperbolic patterns are also obtainable. If both grids ae constructed in phase reversal form, the irradiance in the diffraction image due to the zone plate is enhanced substantially. The device may then be used with photoelectric detection to monitor the straightness of a continuous linear motion. A possible application to field widening in interference spectroscopy is also suggested.

Spatially modulated imaging system

Abstract: Noncoherent radiation, such as X-rays, is spatially coded, directed through an object and spatially detected to form a spatially coded pattern, from which an image of the object may be reconstructed The X-ray source may be formed by X-ray fluorescence and subtraction of the holographic images formed by two sources having energy levels predominantly above and below the maximum absorption range of an agent in the object may be used to enhance contrast in the reproduced image Constant spatial frequency coding of the source may be used to produce a spatial carrier frequency to enhance detection of low spatial frequency components of the spatially coded pattern so that images may be a more easily reconstructed such as the optical reconstruction of spatially code formed by the off-center section of a Fresnel zone pattern by converting the detected intensity pattern to a diffraction or phase pattern

On-axis diffractional behavior of two-dimensional pupils

Abstract: We show that, at any Fresnel number, a suitable one-dimensional Fourier transform relates the complex-amplitude distribution along the optical axis with the zero-order circular harmonic of the amplitude transmittance of a two-dimensional diffracting screen. First, our general result is applied to recognize that any rationally nonsymmetric screen generates an axial-irradiance distribution that exhibits focal shift. In this way we identify a wide set of two-dimensional screens that produce the same focal shift as that produced by the clear circular aperture. Second, we identify several apodizers for shaping the axial-amplitude distribution. We discuss some examples for achieving high-precision focusing, axial hyperresolution, or high focal depth.

Wave-optical simulation of hard-x-ray nanofocusing by precisely figured elliptical mirrors

Abstract: Computer simulations of nanofocusing by elliptical mirrors are presented wherein the diffraction and propagation of coherent hard x rays are predicted using wave-optical calculations. Surface height data acquired via microstitching interferometry were used to calculate the complex pupil function of a mirror, taking into account the Fresnel reflectivity and treating the surface topography as an aberration to a perfect elliptical mirror. The reflected wave-field amplitude and phase downstream of the mirror were obtained by numerically evaluating the Fresnel-Kirchhoff diffraction integral. Simulated intensity profiles and contours (isophotes) around the focal plane are presented for coherent illumination by a 15 keV point source, which indicate nearly diffraction-limited focusing at the 40 nm level. The effect of high spatial frequency microroughness on nanofocusing was investigated by low-pass filtering the Fourier spectrum of the residual height profile. Simulations using the filtered metrology data confirmed that roughness length scales shorter than 0.1 mm have a minor effect on the focal spot size and intensity.