Fresnel zone

About: Fresnel zone is a research topic. Over the lifetime, 2337 publications have been published within this topic receiving 37650 citations.

3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates

Abstract: Focusing X-rays to single nanometer dimensions is impeded by the lack of high-quality, high-resolution optics. Challenges in fabricating high aspect ratio 3D nanostructures limit the quality and the resolution. Multilayer zone plates target this challenge by offering virtually unlimited and freely selectable aspect ratios. Here, a full-ceramic zone plate is fabricated via atomic layer deposition of multilayers over optical quality glass fibers and subsequent focused ion beam slicing. The quality of the multilayers is confirmed up to an aspect ratio of 500 with zones as thin as 25 nm. Focusing performance of the fabricated zone plate is tested toward the high-energy limit of a soft X-ray scanning transmission microscope, achieving a 15 nm half-pitch cut-off resolution. Sources of adverse influences are identified, and effective routes for improving the zone plate performance are elaborated, paving a clear path toward using multilayer zone plates in high-energy X-ray microscopy. Finally, a new fabrication concept is introduced for making zone plates with precisely tilted zones, targeting even higher resolutions.

Quantitative X-ray wavefront measurements of Fresnel zone plate and K-B mirrors using phase retrieval

Abstract: A scanning coherent diffraction imaging method was used to reconstruct the X-ray wavefronts produced by a Fresnel zone plate (FZP) and by Kirkpatrick-Baez (KB) focusing mirrors. The ptychographical measurement was conducted repeatedly by placing a lithographed test sample at different defocused planes. The wavefronts, recovered by phase-retrieval at well-separated planes, show good consistency with numerical propagation results, which provides a self-verification. The validity of the obtained FZP wavefront was further confirmed with theoretical predictions.

Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method

Abstract: A method to analyze extreme ultraviolet microscopy images of nanostructures that allows for the simultaneous determination of an object’s feature size and image resolution is presented. It is based on the correlation between the image and a set of templates of known resolution generated from the original image using Gaussian filters. The analysis was applied to images obtained with a Fresnel zone plate microscope that uses a 13.2 nm wavelength laser light for illumination. The object’s feature size and the resolution obtained with this method are shown to be in very good agreement with independent measurements of both magnitudes. © 2008 Optical Society of America OCIS codes: 100.2000, 100.2960, 110.0180.

Laser direct writing of volume modified Fresnel zone plates

Abstract: Volume zone plates consisting of a number of Fresnel zone plate layers are designed and fabricated inside a fused silica by the femtosecond laser direct writing method. Light diffracted from different layers of a volume zone plate constructively interfere at the focal spot to increase diffraction efficiency. The technique is experimentally verified to be effective for both low-numerical-aperture (NA) and high-NA zone plates, resulting in a significant increase in overall diffraction efficiency. The spatial resolution of a high NA volume zone plate is 500 nm.