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Showing papers on "Gas heater published in 1990"


Patent
13 Dec 1990
TL;DR: In this paper, the carrier gas is heated by a gas heater before entering the three-way valve to generate a source gas by contacting a high-temperature carrier gas which flows there through and becomes mixed with the source gas.
Abstract: Fixed amounts of a liquid source for a chemical vapor deposition process is supplied continuously from a source tank (12) and through a liquid mass flow controller (14) to a three-way valve (16). Inside the three-way valve (16), the liquid source is evaporated to generate a source gas by contacting a high-temperature carrier gas which flows therethrough and becomes mixed with the source gas. The gas mixture thus generated is supplied into a process chamber (24) for a chemical vapor deposition process. The carrier gas may be heated by a gas heater (18, 20) before entering the three-way valve. Alternatively, the three-way valve (16) may be enclosed inside a thermostatic container, the carrier gas being heated inside the container.

18 citations


Patent
21 May 1990
TL;DR: An electric air or gas heater includes a plurality of equal diameter elongated linear serpentine resistive wire heating elements circularly arranged in parallel about a common axis and disposed within a cylindrical chamber having separable air and gas entrance and exit sections at its opposite ends as mentioned in this paper.
Abstract: An electric air or gas heater includes a plurality of equal diameter elongated linear serpentine resistive wire heating elements circularly arranged in parallel about a common axis and disposed within a cylindrical chamber having separable air or gas entrance and exit sections at its opposite ends. Each heating element is disposed in a close-fitting ceramic or quartz tube. The tubes are supported by discs at the opposite ends of the chamber which block air or gas flow outside the cross-sectional area of the tubes. Each heating element has a ceramic cylinder extending through the center thereof through which a wire for electrically connecting adjacent pairs of heating elements extends.

17 citations


Patent
11 Apr 1990
TL;DR: In this paper, an organic metal gas prepara tion excitation chamber which dissociates a carbonyl organic metal and forms excita tion species, and a reaction chamber which houses a substrate, dissolves and deposits the excitation species.
Abstract: PURPOSE: To make it possible to prepare a film at low noise under good control perfor mance and hence obtain an expected quality by installing an organic metal gas prepara tion excitation chamber which dissociates a carbonyl organic metal and forms excita tion species, and a reaction chamber which houses a substrate, dissolves and deposits the excitation species. CONSTITUTION: When a material is preheated only with a gas heater, the temperature of a preheating device 4 in an excitation device 7 is heated up to a proper temperature at which excitation species required to produce high quality film are available and dissociation reaction products are monitored with a gas concentration detection device 13, and the temperature, pressure and the supply of feed gas are controlled with the preheating device 4, a pressure control device 6, a carrier gas of first class and mass flow controller 5, which makes it possible to avoid the formation of carbide, oxide and the like. For example, when W(CO) 6 is prerheated under the aforesaid controlled condition, the ligand CC is dissociated so that only the excitation species W(CO) x (x = 0 to 5) may be formed. It is, therefore, possible to obtain a high quality film under excellent controlled performance by introducing the excitation species into the reaction chamber by way of carrier gas and using thermal decomposition based on the heating of a heater without increasing the temperature more than required. COPYRIGHT: (C)1992,JPO&Japio

5 citations


Patent
02 Oct 1990
TL;DR: In this article, a desulfurizing agent is sprayed into a flue by a nozzle and the exhaust gas is then guided to a dust collector to prevent the accumulation of a solid in a dust collecting apparatus.
Abstract: PURPOSE: To prevent the accumulation of a solid in a dust collecting apparatus, in an exhaust gas desulfurizer equipped with a desulfurizing reactor and a dust collector, by providing a gas heater controlling the temp. of the gas flowing in the dust collector. CONSTITUTION: The temp. of the exhaust gas 2 from a boiler 1 is lowered by an air heater 3 to guide the exhaust gas 2 to a desulfurizing reactor 4. A desulfurizing agent 5 is sprayed to a flue 6 by a nozzle 11 and the exhaust gas is guided to the desulfurizing reactor 4. Water is sprayed into the desulfurizing reactor 4 from a nozzle 12 to lower the temp. of the exhaust gas. The exhaust gas issued from the desulfurizing reactor 4 is guided to a dust collector 8 while the temp. thereof is controlled to the condensing point of water or the dew point of sulfuric acid or higher. By this method, the condensation of water or sulfuric acid causing scale can be prevented. COPYRIGHT: (C)1992,JPO&Japio

5 citations


Patent
29 Mar 1990
TL;DR: In this paper, a failsafe control of a gas heater is described, where one sensor is mounted directly in the flue and the other behind the baffles, to monitor any flow out of the side vents.
Abstract: One sensor (14) is mounted directly in the flue and the other (17) behind baffles, to monitor any flow out of the side vents in the flue, e.g. to monitor if the flue is blocked. The output signals from the sensors are connected to a processor (16) which operates a shut-off valve in a failsafe control to switch off the burners if the flue is blocked. The sensors are non linear types, with a definite characteristic. They are linked into a potential divider circuit which is monitored by an operational amplifier. A simple logic system including time delay circuits controls the operation of the shut-off valve. ADVANTAGE - Failsafe control of gas heater.

3 citations



Patent
17 Dec 1990
TL;DR: In this paper, a substrate exchanging chamber is evacuated by closing a gate 7 and opening an evacuation gate valve 8, and a substrate 2 treated in a vacuum treating chamber 6 is conveyed into the chamber 1 by opening the gate 7.
Abstract: PURPOSE:To reduce adherence of dust to a wafer by introducing purging gas of higher temperature than temperature in a vacuum chamber onto a material to be treated in the chamber for placing the material to be treated, and setting the chamber to an atmospheric pressure. CONSTITUTION:A substrate exchanging chamber 1 is evacuated by closing a gate 7 and opening an evacuation gate valve 8, and a substrate 2 treated in a vacuum treating chamber 6 is conveyed into the chamber 1 by opening the gate 7. Then, the gate 7 and the valve 8 are closed, and a purging gas valve 9 is opened to gradually introduce nitrogen gas (N2) heated by a gas heater 3 from a purging gas inlet 4 onto the substrate 2. When the chambers 1 becomes an atmospheric pressure therein, a cover 1A is opened, and the substrate 2 is removed. The chamber 1 is cooled by a cooler 5 from its outside.

2 citations


Patent
03 Jul 1990
TL;DR: In this article, the authors proposed to increase a power generating efficiency by removing carbon dioxide gas from the gas exhausted from an anode, returning the gas to the anode through a reformer, and supplying the CO2 gas to a cathode together with air.
Abstract: PURPOSE:To increase a power generating efficiency by removing carbon dioxide gas from the gas exhausted from an anode, returning the gas to the anode through a reformer, and supplying the carbon dioxide gas to a cathode together with air. CONSTITUTION:Gas exhausted from an anode 3 contains CO2 and H2O generated in a fuel cell in addition to unused CH4, H2, and CO. Most of the gas is supplied to a reformer 5 through an anode outlet gas branch line 10, and part of it is supplied to an absorbing tower 13a of a carbon dioxide gas separation unit 13 from an anode outlet gas line 9 through a cooler 11 and a condenser 12. Most of the carbon dioxide in the gas supplied to the absorbing tower 13a is removed, and residual gas containing CH , H2 is taken out from the absorbing tower 13a through a residual gas line 14, and preheated with a residual gas heater 15, then supplied to the upper stream of a heater 6, reformed to fuel gas with the reformer 5, and supplied to the anode 3 of a fuel cell 1 to use for cell reaction.

2 citations


Patent
07 Mar 1990
TL;DR: In this article, the authors proposed to suppress the resonance characteristics and shifting the frequency of resonance and reduce resonance sounds remarkably by constituting part of an outer box of a burner section with a low sound resistant material, that is, a membrane plate of porous plate of a very low rate of openings.
Abstract: PURPOSE:To suppress the resonance characteristics and shifting the frequency of resonance and reduce resonance sounds remarkably by constituting part of an outer box of a burner section with a low-sound resistant material, that is, a membrane plate of porous plate of a very low rate of openings. CONSTITUTION:The air supplied from a blower passes through a blast channel which is surrounded by the outer box 5 of a burner section and is supplied to a combustion chamber 3 and is mixed with a combustible gas that is supplied from a gas control device 9 and used for combustion in the combustion chamber. The noises of combustion are partly radiated from an exhaust channel through a heat exchanger 4 on the downstream side and partly radiated from the suction port of the blower through a blast channel of the burner section 2 on the upstream side. The latter develops noises and they are also radiated from a membrane plate made of resin which is of a low-sound resistant material provided on the bottom plate of the outer box 5 of the burner section 2. With this arrangement the total area of opening sections S and S' becomes very large and the frequency of sound resonance can be shifted from low frequency sound waves which contain much of combustion noises to the area of high frequency sound waves and at the same time the resonance characteristics can be suppressed and changed to mild ones.

1 citations


Patent
02 May 1990
TL;DR: In this article, a self-diagnostic function was proposed to enable a control system custom gas heater for cooling and heating to satisfy various desires of consumers and to quickly clear up the causes of faults by giving a self diagnostics function which can raise the fire power of a custom heater to a set value by performing A/D conversion on the feedback current of a linear gas valve at a high speed to the control system.
Abstract: PURPOSE: To enable a control system custom gas heater for cooling and heating to satisfy various desires of consumers and to quickly clear up the causes of faults, by giving a self-diagnostic function which can raise the fire power of a custom heater to a set value by performing A/D conversion on the feedback current of a linear gas valve at a high speed to the control system. CONSTITUTION: A control system is constituted of a routine of a sequence which turns on the operation of a custom heater in a prescribed operation sequence, a pre-purge sequence, a pre-ignition sequence, an ignition detecting sequence, a weak ignition sequence, a heating (weak) operation sequence, and a heating (strong) operation sequence, a routine for accomplishing the system operation of a self-diagnostic function, etc. As the operation sequence advances, normal operation displays, abnormal state displays, reset displays, and buzzer drive and digit displays are made. When an external interruption is permitted, a clock interruption and the external interruption are made to be accomplished simultaneously. The external interruption is made to be accomplished in an external interruption routine which is made in the stage, etc., in which the timer interruption is made to be permitted.

1 citations


Patent
29 Mar 1990
TL;DR: In this article, a dissolving chamber, a dissolved substance receiving tank, a gas combustion device, and an air circulating device having respective specified functions have been provided to treat harmful waste at a site to produce harmless waste by providing a disassembling chamber.
Abstract: PURPOSE:To treat harmful waste at a site to produce harmless waste by providing a dissolving chamber, a dissolved substance receiving tank, a gas combustion device, and an air circulating device having respective specified functions. CONSTITUTION:When waste is charged through a charge port 16, it is guided to a hopper 2 and enters a dissolved substance receiving tank 5 provided in a dissolving chamber 15. The charge port is closed, and an operation switch is turned ON. A heater 9 is heated and the dissolving chamber is kept at 180 - 280 deg.C. Plastic is dissolved to generate a trace amount of gas and vaporize a moisture content also. After elapse of a given time, a gas heater 8 and an air pump 6 are driven. Gas is decomposed thermally by a gas heater 8 and is returned to the gas heater through a radiator 12, an air pump 6, and a cresol solution tank 4. The heater 9 is turned OFF for a given time, a cooling water pump 13 is driven, and the temperature of the dissolving chamber is reduced. The cooling water pump, a gas combustion heater, and the air pump are turned OFF after elapse of a given time. Molten and cured waste is taken out through a take-out port 17 together with the dissolved substance receiving tank, and is disposed as normal incombustible refuse.

Patent
23 Mar 1990
TL;DR: In this article, the authors proposed a method to reduce the time required for heating metal chips and removal of oil therefrom in such a sufficient amount as to minimize the residual oil therein by placing the oil-contaminated metal chips into a centrifugal separator and subjecting the same to a centrifugal action while blowing a hot gas there against.
Abstract: PURPOSE:To permit a reduction in time required for heating metal chips and removal of oil therefrom in such a sufficient amount as to minimize the residual oil therein by placing the oil-contaminated metal chips into a centrifugal separator and subjecting the same to a centrifugal action while blowing a hot gas thereagainst. CONSTITUTION:Oil-contaminated metal chips are placed into a centrifugal separator 3 and centrifuged for separation of the oil therefrom, while a hot gas of 50-150 deg.C is being blown thereagainst by the means consisting of a gas blowout pipe 4, an air blower 5, a gas heater 6, valves 7, 8 and 10, an air supply pipe 9 and an exhaust gas supply pipe 11. The oil removal in this way permits a reduction in the time required for heating the metal chips, allows little accumulation of the heat of oxidative reactions due to the heating and permits the separation of the oil from the metal chips in such a sufficient amount as to minimize the residual oil therein.

Patent
18 Jan 1990
TL;DR: In this paper, the authors proposed a method to efficiently remove org sulfur compds in gas by bringing the gas into contact with a catalyst supporting diglycolamine to decompose the compds and by absorbing and removing H2S produced by the decomposition.
Abstract: PURPOSE:To efficiently remove org sulfur compds in gas by bringing the gas into contact with a catalyst supporting diglycolamine to decompose the org sulfur compds and by absorbing and removing H2S produced by the decomposition CONSTITUTION:Gas 1 contg org sulfur compds such as COS and CS2 is heated with a gas heater 2 and sent to a tower 3 packed with a catalyst prepd by supporting diglycolamine on a carrier such as alumina or zeolite to decompose the COS and CS2 H2S produced by the decomposition is sent to a tower 4 packed with an absorbent such as iron oxide or iron hydroxide Since the H2S is absorbed and removed, purified gas 5 is obtd

Patent
31 May 1990
TL;DR: In this paper, a linking stirrup is formed by a single U-shaped leaf, a coating, for example a plastic resin, being subsequently moulded on above the stirrup and some of the connecting clips in order to ensure sealing along the latter and along the copper tube.
Abstract: The member carrying out the bridging of the copper tube (2) is a linking stirrup (12) formed by a single U-shaped leaf, a coating, for example a plastic resin, being subsequently moulded on above the stirrup and some of the connecting clips in order to ensure sealing along the latter and along the copper tube. Application to electromagnetic safety devices for a gas heater.