Gas heater

About: Gas heater is a research topic. Over the lifetime, 1799 publications have been published within this topic receiving 6169 citations.

Semiconductor wafer thermal processing apparatus

Abstract: The apparatus comprises: a process chamber 21, a susceptor 22 on which a wafer is mounted inside the process chamber, a resistance heater 29 for heating the susceptor, a lamp 28 installed at the top of the process chamber for raising the temperature of the process chamber up to a temperature required in the process, a gas injector 33 installed on one side of the process chamber for supplying gas to the process chamber, and a gas heater 34 mounted on the gas injector for preheating gas supplied to the process chamber. The wafer is held on the susceptor by vacuum supplied to a groove 24 and is lifted off the susceptor by pins 35. The lamp is used for temperatures up to 1200‹C whilst the heater 29 is used for temperatures up to 500‹C. The heater 34 preheats the gas to between 50 and 800‹C.

Power supply for electric arc gas heater

Abstract: This invention concerns power supplies suitable for electric arc gas heaters such a plasma torches. It more particularly relates to the dimensioning of the inductor in the switched-mode DC to DC converter used for feeding the torch. The invention concerns in particular a DC power supply for driving a non-transferred electric arc gas heater, comprising: an AC to DC rectifier providing a potential U 0 ; a DC to DC switching converter having a switching frequency f s; a current control loop having a latency Formula (I); and, a ballast inductor having an inductance L; characterized in that inductance L is such that Formula (II) and Formula (III). Such a design ensures the stability of the current control loop, while also ensuring a sufficient amount of current ripple to spread out the erosion zone on the electrodes of the torch.

Device and method for comprehensively carrying out desulfurization, denitration and dioxin removing on steel sintering flue gas

Abstract: The invention discloses a device and a method for comprehensively carrying out desulfurization, denitration and dioxin removing on steel sintering flue gas. The device mainly comprises a GGH (Gas Gas Heater), a flue gas heating furnace, an ammonia injection grid, an SCR (Selective Catalytic Reduction) reactor, a flue gas-water heat exchanger, a booster fan, a circulating water pump, a desulfurization tower, a chimney and the like. The method adopts a technology of desulfurizing after denitrating and is characterized by firstly accessing sintering flue gas after dust removing to an SCR flue gas denitration device after passing through a main exhaust fan, thus removing NOX and the dioxin; then enabling the sintering flue gas to enter a wet desulfurization tower to desulfurizing, and finally enabling the sintering flue gas to be subjected to standardized emission through the chimney. According to the device and the method, disclosed by the invention, in one hand, the sintering flue gas can be subjected to standardized emission, and the phenomenon that white smoke is discharged by the chimney is removed; meanwhile, on the other hand, the heating energy consumption of the flue gas is reduced, and the energy source is saved.

Air heating and humidifying gas burning furnace

Abstract: This invention relates to gas heaters and furnaces and more specifically to those types in which the humidity of the heated air may be controlled and adjusted as desired. One of the primary objects of this invention is to provide an improved gas heater which may be utilized either as a floor...