Showing papers on "Graphene oxide paper published in 1978"
TL;DR: In this paper, the pseudoboehmite was incorporated into barrier oxide during anodization, and the high field strength of this barrier oxide was confirmed by transmission electron microscopy.
31 citations
Patent•
11 Jul 1978TL;DR: In this article, the process of forming a thermal oxide film or heat treatment of an oxide film in making a semiconductor device comprising a compound semiconductor of arsenic, is handled in an atmosphere containing arsenic oxide vapor in order to prevent evaporation of the arsenic trioxide in the thermal oxidation film or the oxide film under heat treatment.
Abstract: In the process of forming a thermal oxide film or heat treatment of an oxide film in making a semiconductor device comprising a compound semiconductor of arsenic, the semiconductor is handled in an atmosphere containing arsenic oxide vapor in order to prevent evaporation of the arsenic tri-oxide in the thermal oxidation film or the oxide film under heat treatment, thereby to form a thermal oxide film having good chemical stability and good electrical characteristics, or to improve the oxide film so as to have good chemical stability and good electrical characteristics.
3 citations