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Showing papers on "Graphene oxide paper published in 1997"


Journal ArticleDOI
TL;DR: Thin oxide films (from one to tens of monolayers) of SiO2, MgO, NiO, Al2O3, FexOy, and TiO2 supported on refractory metal substrates have been prepared by depositing the oxide metal precursor in a background of oxygen.
Abstract: Thin oxide films (from one to tens of monolayers) of SiO2, MgO, NiO, Al2O3, FexOy, and TiO2 supported on refractory metal substrates have been prepared by depositing the oxide metal precursor in a background of oxygen (ca 1 x 10(-5) Torr). The thinness of these oxide samples facilitates investigation by an array of surface techniques, many of which are precluded when applied to the corresponding bulk oxide. Layered and mixed binary oxides have been prepared by sequential synthesis of dissimilar oxide layers or co-deposition of two different oxides. Recent work has shown that the underlying oxide substrate can markedly influence the electronic and chemical properties of the overlayer oxide. The structural, electronic, and chemical properties of these ultrathin oxide films have been probed using Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), electron energy loss spectroscopy (ELS), ion-scattering spectroscopy (ISS), high-resolution electron energy loss spectroscopy (HREELS), infrared reflectance absorption spectroscopy (IRAS), temperature-programmed desorption (TPD), scanning tunneling microscopy (STM), and scanning tunneling spectroscopy (STS).

183 citations


Journal ArticleDOI
01 Jan 1997-Carbon
TL;DR: In this paper, a mass production method of petal-like graphite sheets by hydrogen arc discharge evaporation was proposed, which was confirmed to be stacking of graphene by using a selected area electron diffraction pattern.

162 citations


Patent
Tadashi Suzuki1, Hideo Sobukawa1
06 Oct 1997
TL;DR: The composite oxide and the composite oxide carrier are composed of a composite oxide in which at least one of cerium and zirconium, and aluminium disperse with extremely high homogeneity as discussed by the authors.
Abstract: The composite oxide and the composite oxide carrier are manufactured by the precursor forming step and firing step. The precursor forming step includes high speed mixing means. The composite oxide catalyst is obtained by preparing a composite of catalytic components simultaneously with the formation of the precursor of composite oxide in the step of forming the precursor of composite oxide. The composite oxide and the composite oxide carrier are composed of a composite oxide in which at least one of cerium and zirconium, and aluminium disperse with extremely high homogeneity. With this structure, the heat resistance of the carrier is improved and consequently, enlargement of particles of the composite oxide defining the carrier, and sintering of adjacent particles of the composite oxide can be restrained, whereby the catalyst using the composite oxide carrier in accordance with the present invention is excellent in heat resistance. With the present invention, the carrier is not limited to a general catalyst carrier. The carrier may be interpreted to indicate general formed bodies. For example, the carrier with the present invention can be also used as materials for sensors and electrodes, optical materials, semiconductors and structure materials. Furthermore, the carrier can be used for a three-way catalyst, NOx catalyst or oxidation catalyst or a part thereof, and a promoter.

113 citations


Patent
12 May 1997
TL;DR: In this paper, a gas sensor and a method for manufacturing it is described, where a gas-sensitive gallium oxide layer of the gas sensor is coated with a filter layer that comprises silicon dioxide.
Abstract: A gas sensor and method for manufacturing a gas sensor is provided. In order to increase the selectivity and the sensitivity to a gas to be measured, a gas-sensitive gallium oxide layer of a gas sensor is coated with a filter layer that comprises silicon dioxide. In an alternative embodiment, the gallium oxide layer can be coated with a gas-sensitive metal oxide layer made of titanium oxide, aluminum vanadate, tungsten oxide or tantalum oxide.

32 citations


Journal ArticleDOI
TL;DR: The applicability of scanning probe microscopy in the dielectric breakdown characteristics of silicon oxide has been demonstrated in this paper, where the authors demonstrate that the measurement on the oxide is free from the effect of trapped charge created by Fowler-Nordheim tunneling when a sufficient distance is maintained between the measuring points.
Abstract: The applicability of scanning probe microscopy in the dielectric breakdown characteristics of silicon oxide has been demonstrated. Our study demonstrates that the measurement on the oxide is free from the effect of trapped charge created by Fowler–Nordheim tunneling when a sufficient distance is maintained between the measuring points. In this condition, for a 13-nm-thick oxide, the dielectric breakdown voltages were found to be so uniform as to fluctuate only 1%. We applied this method to oxides on the wafers from two different vendors, and found that the dielectric breakdown strength of the oxide depends on the difference on the Si substrates. We also applied this method to a square oxide pattern surrounded by a field oxide, and the result was that the dielectric breakdown strength of the oxide on the edge is lower than the one in the center.

28 citations


Patent
14 Feb 1997
TL;DR: In this paper, a method for forming a uniform and reliable oxide layer on the surface of a semiconductor substrate using projection gas immersion laser doping (P-GILD) is provided. But this method is limited to a single or multiple thermal oxidation step(s) to have at least a first oxide thickness.
Abstract: A method for forming a uniform and reliable oxide layer on the surface of a semiconductor substrate using projection gas immersion laser doping (P-GILD) is provided. A semiconductor substrate is immersed in an oxide enhancing compound containing atmosphere. The oxide enhancing compound containing atmosphere may include phosphorus, arsenic, boron or an equivalent. A 308 nm excimer laser is then applied to a portion of the substrate to induce incorporation of the oxide enhancing compound into a portion of the substrate. The deposition depth is dependent upon the strength of the laser energy directed at the surface of the substrate. A uniform and reliable oxide layer is then formed on the surface of the substrate by heating the substrate. The laser may be applied with a reflective reticle or mask formed on the substrate. An E 2 PROM memory cell having a program junction region in a silicon substrate is also provided. An oxide layer is positioned between a program junction and a floating gate. The oxide layer is formed by a single or multiple thermal oxidation step(s) to have at least a first oxide thickness due to a GILD oxide enhancing compound underlying a region of the oxide having at least the first oxide thickness.

20 citations


Journal ArticleDOI
TL;DR: In this paper, a new method to grow silicon oxide layers at temperatures below 300°C was developed using catalytic activity of platinum, where a ca. 1 nm-thick chemical oxide layer was formed on the Si surface and then a 3-nthick platinum layer was deposited on it.

12 citations


Patent
23 Jun 1997
TL;DR: In this article, a high quality conductor paste which uses an internal conductor containing mainly silver, suppresses the occurrence of voids and cracks resulting from voids even when the paste is baked simultaneously with a ceramic material by a conductor melting method, improves the productivity of multilayer ceramic parts, reduces the cost, and has excellent electric characteristics is prepared by dispersing a conductive material made mainly of silver and a metal oxide in a vehicle.
Abstract: High-quality conductor paste which uses an internal conductor containing mainly silver, suppresses the occurrence of voids and cracks resulting from voids even when the paste is baked simultaneously with a ceramic material by a conductor melting method, improves the productivity of multilayer ceramic parts, reduces the cost, and has excellent electric characteristics is prepared by dispersing a conductive material made mainly of silver and a metal oxide in a vehicle. The metal oxide is one or more kinds of metal oxides selected from among Ga oxide, La oxide, Pr oxide, Sm oxide, Eu oxide, Gd oxide, Dy oxide, Er oxide, Tm oxide, and Yb oxide. The baking of the conductor paste is performed at a temperature equal to or higher than the melting point of the conductive material and lower than the boiling point of the material.

8 citations


Patent
Yasuji Yamada1, Tamaki Masegi1, Junichi Kawashima1, Yusuke Niiori1, Izumi Hirabayashi1 
15 Oct 1997
TL;DR: An oxide superconductor comprises a base material consisting of a single crystalline oxide, and a coating film consisting essentially of a Ba--Cu--O oxide and covering the surface of the oxide super-conductor film, the coating film having a thermal expansion coefficient higher than that of the OSS film as discussed by the authors.
Abstract: An oxide superconductor comprises a base material consisting of a single crystalline oxide, an oxide superconductor film consisting of a Y123 compound and formed on the single crystalline oxide base material, and a coating film consisting essentially of a Ba--Cu--O oxide and covering the surface of the oxide superconductor film, the coating film having a thermal expansion coefficient higher than that of the oxide superconductor film.

8 citations


Patent
29 Dec 1997
TL;DR: In this article, a method of forming a recessed electrically insulating field oxide region in a semiconductor substrate is described, which includes the steps of oxidizing a surface of the substrate, depositing a polysilicon layer over the oxide layer, and then etching away both layers where the field oxide is to be located.
Abstract: A method of forming a recessed electrically-insulating field oxide region in a semiconductor substrate is disclosed. In a preferred embodiment, the method includes the steps of oxidizing a surface of the substrate; depositing a polysilicon layer over the oxide layer; depositing a silicon nitride layer over the polysilicon layer; patterning the silicon nitride and polysilicon layers and etching away both layers where the field oxide is to be located; forming a field oxide by thermally oxidizing the substrate in the openings previously formed in the silicon nitride and polysilicon layers; etching away the thermal field oxide; thermally oxidizing the substrate in the etched-away field oxide areas; etching away the silicon nitride layer; optionally, implanting through the thermal oxide with an impurity; depositing a doped oxide; densifying the oxide in a steam ambient; etching back the deposited oxide; then either depositing an undoped CVD oxide, coating the oxide with a leveling layer to planarize the oxide surface, etching both the undoped CVD oxide and leveling layers and etching away the polysilicon; or etching away the polysilicon, leaching the dopants out of the surface of the field oxide structure and passivating the surface in a dry oxygen ambient.

6 citations


Patent
Ho-jin Kweon1, Baek Kae-Dong1, Soon-kyo Hong1, Dong-Gon Park1, Hye-Jin Kim1 
11 Jul 1997
TL;DR: In this article, a method for fabricating a porous composite oxide is provided, which includes the steps of slowly mixing a solution including a silicon oxide source and an aluminum oxide source, adding hydrochloric acid to the mixed solution prepared in the previous step to obtain a sol; and adding sodium hydroxide to said sol, reacting the obtained resultant at room temperature for 30 minutes to 12 hours, and drying the resultant.
Abstract: A method for fabricating a porous composite oxide is provided. The method includes the steps of: (a) slowly mixing a solution including a silicon oxide source and a solution including an aluminum oxide source; (b) adding hydrochloric acid to the mixed solution prepared in said step (a) to obtain a sol; and (c) adding sodium hydroxide to said sol, reacting the obtained resultant at room temperature for 30 minutes to 12 hours, and drying the resultant. The porous composite oxide has an abundance of fine pores and the distribution of pore size is relatively uniform, so that the porous composite oxide is suitable for a carrier.

Patent
23 Jun 1997
TL;DR: In this article, a conductor paste is prepared by dispersing a silver base conductive material and a metal oxide in a vehicle, at a temperature between the melting point and lower than the boiling point.
Abstract: of EP0853321An object is to provide a conductor paste of quality which uses a silver base internal conductor, suppresses the generation of voids and the concomitant occurrence of cracks even when co-fired with ceramic material by the conductor melting method, and has improved productivity, reduced cost, and improved electrical properties. The conductor paste is prepared by dispersing a silver base conductive material and a metal oxide in a vehicle. At least one of Ga oxide, La oxide, Pr oxide, Sm oxide, Eu oxide, Gd oxide, Dy oxide, Er oxide, Tm oxide, and Yb oxide is used as the metal oxide. The conductor paste is fired at a temperature between the melting point and lower than the boiling point of the conductive material.