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Hemispherical resonator gyroscope

About: Hemispherical resonator gyroscope is a research topic. Over the lifetime, 83 publications have been published within this topic receiving 653 citations.


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Proceedings ArticleDOI
05 May 2014
TL;DR: The Disc Resonator Gyroscope (DRG) as discussed by the authors is a compact planar micro-machined design with central support and carries no critical loads, which has been shown to have a stable rate within 0.01° o/h over a week of continual measurement.
Abstract: As microelectromechanical system (MEMS) gyros were being developed for automotive safety and military tactical applications, in 1994 Boeing selected a conventionally-machined hemispherical resonator gyroscope (HRG) for high performance, continuous space pointing applications. In that same year research was begun into high performance MEMS gyros for compact, low-cost space pointing applications. Collaboration with several national MEMS research labs and operational experience with the HRG led to an understanding of the benefits of high Q, symmetrical resonator designs in MEMS. Early post resonator designs led to closed loop, tuned, low-noise electronics design and operation with capacitive sensing but required undesirable 3D assembly of the post onto the micro-machined flexures. High dynamic loading and imprecision of the bonded joints led to gyro bias that was not stable over the long run. This led to the conception of the Disc Resonator Gyroscope (DRG) which yielded a compact planar micro-machined design with central support and carrying no critical loads. Successive optimization of the layout, scale, material selection and fabrication design as well as the operational electronics has led to progressively more stable performance. A recent fixed orientation laboratory run demonstrated a stable rate within 0.01 o /h over a week of continual measurement, believed to be a record for a MEMS gyroscope. This research background behind the DRG and its principle of operation will be presented along with the latest test results which promise high performance, as well as compact, low-cost MEMS gyroscopes for space applications.

172 citations

Journal ArticleDOI
TL;DR: In this article, the authors report the fabrication of hemispherical polycrystalline diamond resonators fabricated on a novel high-temperature glass substrate, which can be operated in either rate or whole-angle mode due to its high degree of symmetry.
Abstract: In this paper we report the fabrication of hemispherical polycrystalline diamond resonators fabricated on a novel high-temperature glass substrate. The hemispherical resonator gyroscope is one of the most accurate and rugged of the mechanical gyroscopes, and can be operated in either rate or whole-angle mode due to its high degree of symmetry. A fabrication sequence for creating extremely symmetric 3D MEMS hemispheres is presented. Mode shapes and frequencies obtained with a laser vibrometer are shown, as well as curves of Q versus pressure, and the dependence of frequency on anchor size. Fundamental mode frequency matching to <0.1% in as-fabricated devices has been achieved, which is essential to gyroscope operation in whole-angle mode.

45 citations

Proceedings ArticleDOI
16 Jun 2013
TL;DR: In this article, a scale factor self-calibration in MEMS Coriolis vibratory gyroscopes enabled by real-time control of the sense-mode closed loop gain is reported.
Abstract: We report a scale factor self-calibration in MEMS Coriolis vibratory gyroscopes enabled by real time control of the sense-mode closed loop gain. Similarly to the closed loop scale factor employed in the Hemispherical Resonator Gyroscope (HRG), we measure and remove scale factor changes by injecting a known dither signal (virtual input rate) into the sense-mode dynamics during the normal operation of the gyroscope. The approach was validated using an inhouse developed sub-°/hr silicon MEMS Quad Mass Gyroscope (QMG) with HRG-like structural symmetry and low dissipation. We demonstrated a 350 ppm accuracy (limited by the setup) and a 1 ppm precision by simultaneously measuring the true and self-calibrated scale factors over a 10 °C dynamic temperature range.

40 citations

Journal ArticleDOI
TL;DR: It is verified by simulations and tests that the proposed model of the fully closed-loop system is effective, which can not only identify the main errors of the HRG accurately but also provide an accurate model for error analysis.
Abstract: This article proposes a modeling method for the fully closed-loop system of hemispherical resonator gyroscope (HRG) under force-to-rebalance mode. A fully closed-loop system consists of two parts: driving loop and detecting loop. First, the dynamic equations of the driving loop are derived to obtain the vibration differential equations of a hemispherical resonator driven by the electrostatic forces, to further obtain accurate output models of the wave amplitude and angular rate, which establishes a model of the driving loop. Next, the output model of the wave amplitude is analyzed to clarify the relationship between the amplitude voltage and wave amplitude. Simultaneously, the influences of interference factors on the amplitude voltage and angular rate voltage are analyzed, which can result in the HRG output error. Then, a model of detecting capacitance is built based on the deformation equations of the hemispherical resonator. A model of the detecting loop is established to analyze its performance and precision. Finally, by tests of amplitude voltage and resonant frequency, the accuracy of the models of the driving loop and detecting loop is proven. A model of the fully closed-loop system of the HRG is proposed based on the models of the driving loop and detecting loop. The HRG output errors caused by the resonator’s deformation, detecting error, and nonuniformity of the quality factor are identified and compensated accurately by the proposed model. It is verified by simulations and tests that the proposed model of the fully closed-loop system is effective, which can not only identify the main errors of the HRG accurately but also provide an accurate model for error analysis.

31 citations

Proceedings ArticleDOI
21 Mar 2016
TL;DR: In this paper, a large panel of applications covered with HRG, in a nominal configuration system and in a redundant inertial skewed system, is presented, and the ultimate performance application obtained with specific system configuration, thanks to the remarkable properties of the HRG.
Abstract: For more than two decades, Sagem has built up its expertise through different developments and applications of CVG (Coriolis Vibrating Gyros). One example is the well-known HRG (Hemispherical Resonator Gyroscope). This paper shows the large panel of applications covered with HRG, in a nominal configuration system and in a redundant inertial skewed system. We also evoke the ultimate performance application obtained with specific system configuration, thanks to the remarkable properties of the HRG. In the end, we describe the industrial aspects deployed to address all these applications.

30 citations

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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202111
20207
20195
20184
20176
20167